Controller Description; Technical Specification - Varian TV 1001 SEM Manual De Instrucciones

Controller Description

The dedicated controller is a solid-state frequency
converter which is driven by a single chip micro-
computer and is composed of two PCBs which in-
clude power supply and 3-phase output, analog
and input/output section, microprocessor and digi-
tal section.
The power supply, together with the 3-phase out-
put, converts the single phase AC mains supply
into a 3-phase, low voltage, medium frequency
output which is required to power the pump.
The controller can be operated by a remote host
computer via the serial connection. A Windows-
based software is available (optional).

TECHNICAL SPECIFICATION

Pumping speed (with ISO 200K / ISO 200F:
inlet screen)
N : 950 l/s
2
He: 870 l/s
H : 900 l/s
2
Compression ratio
N 1 x 10
2
He 1 x 10
H 1 x 10
2
Base pressure < 1 x 10
with recommended
(< 1 x 10
forepump
(According to standard DIN 28 428,
the base pressure is that measured
in a leak-free test dome, 48 hours
after the completion of test dome
bake-out, with a Turbopump fitted
with a ConFlat flange and using the
recommended pre-vacuum pump)
Inlet flange ISO 200K, ISO 200F
Foreline flange KF 40 NW
Rotational speed 38000 rpm
Start-up time < 4 minutes
Recommended DS 402, TriScroll 300
forepump
Operating position Any
Operating ambient +5 °C to +35 °C
temperature
Bakeout temperature 80° C at inlet flange max.
Vibration level bearing peak: < 45 mm/sec
(Data measured with
residual unbalance: < 350 mm/sec
an indicated bearing
temperature of 20
(see the following typical vibration
°C: see vibration
graph)
graph in the following
figure)
Lubricant permanent lubrication
9
7
6
-10
mbar
-10
Torr)
2
2
Cooling require-
ments
Coolant water
Noise level
Power supply:
Input voltage:
Input freq.:
Max input power:
Stand-by power:
Max operating
power:
Protection fuse
Compliance with:
Installation category
Pollution degree
Power cable
Serial communica-
tion (Navigator kit)
Storage temperature
Weight kg (lbs)
ISO 200K flange
ISO 200F flange
Controller
When the TV 1001 SEM has been stored at a
temperature less than 5°C, wait until the system has
reached the above mentioned temperature.
26
TECHNICAL INFORMATION
Forced air or water
Minimum flow: 200 l/h (0.89 GPM)
Temperature: +10 °C to +20 °C
Pressure: 3 to 5 bar (45 to 75 psi)
<45 dB(A) at 1 meter
100 - 240 Vac
50 - 60 Hz
850 VA
30 to 35 W
450 W with water cooling
220 W with air cooling
1 x 6.3 A
UNI EN 292-1
UNI EN 292-2
EN-CENELEC 55011
IEC 1000-4-2 (ex 801-2)
IEC 1000-4-3 (ex 801-3)
IEC 1000-4-4 (ex 801-4)
EN 61010-1 (IEC 1010-1)
EN 1012-2
II
2
With European or NEMA plug
3 meters long (optional)
RS232 cable with a 9-pin D type
male connector and a 9-pin D type
female connector, and Navigator
software (optional)
-20° C to +70° C
19 (41.8)
19.4 (43)
5.4 (12)
NOTE
87-900-973-01