Instructions For Use - Varian 969-9369 Manual De Instrucciones

GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional
information supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring due
to non-compliance, even partial, with these instructions, im-
proper use by untrained persons, non-authorised interference
with the equipment or any action contrary to that provided for
by specific national standards.
The Turbo-V 150HT series pumps are turbo-molecular pumps
for high and ultra-high vacuum applications and can pump any
type of gas or gas compound. They are not suitable for pump-
ing liquids or solid particles. The pumping action is obtained
through a high speed turbine (max. 62000 rpm) driven by a
high-performance 3-phase electric motor. The Turbo-V 150HT
pumps are free of contaminating agents and, therefore, are
suitable for applications requiring a "clean" vacuum.
The following paragraphs contain all the information necessary
to guarantee the safety of the operator when using the equip-
ment. Detailed information is supplied in the appendix "Techni-
cal Information".
This manual uses the following standard protocol:
! ! ! !
WARNING!
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not fol-
lowed correctly, could lead to serious injury.
! ! ! !
CAUTION
The caution messages are displayed before procedures which,
if not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
STORAGE
When transporting and storing the pumps, the following envi-
ronmental requirements should not be exceeded:
−
temperature: from -20° to +70 °C
−
relative humidity: 0 - 95% (non-condensing)
If the storage time is long start the pump using the SOFT
START mode (see control unit manual).
PREPARATION FOR INSTALLATION
The pump is supplied in a special protective packing. If this
shows signs of damage which may have occurred during tran-
sport, contact your local sales office.
When unpacking the pump, be sure not to drop it and avoid
any kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized
manner. The material is 100% recyclable and complies with
EEC Directive 85/399.
! ! ! !
CAUTION
In order to prevent outgassing problems, do not use bare
hands to handle components which will be exposed to vacuum.
Always use gloves or other appropriate protection.
NOTE
Normal exposure to the environment cannot damage the pump.
Nevertheless, it is advisable to keep it closed until it is installed
in the system, thus preventing any form of pollution by dust.
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23
INSTRUCTION MANUAL
INSTALLATION
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk. Dur-
ing operation, the following environmental conditions must be
respected:
−
maximum pressure: 2 bar above atmospheric pressure
−
temperature: from +5 °C to +35 °C
−
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be pretected
using a ferromagnetic shiled. See the appendix "Technical In-
formation" for detailed informations.
The Turbo - V 150HT series pumps must only be used with one
of the special Varian controllers (series 969-9405, 969-9505,
969-9423, 969-9523) and must be connected to a primary
pump (see "Technical Information").
! ! ! !
CAUTION!
Do not remove the adhesive and protective cap before con-
necting the turbopump to the system.
87-900-891-01(C)