Resumen de contenidos para MKS HPS Two-Stage
- Página 1 Two-Stage Jalapeño Valve Service Manual 651 Lowell Street Methuen, MA 01844 Main Telephone: (800) 227-8766 P/N 1061055 www.mksinst.com Rev 001...
- Página 2 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc. Printed in the United States of America DeviceNet™...
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Página 3: Tabla De Contenido
Table of Contents Valve Safety Information ..........................1 Symbols Used in This Instruction Manual ........................1 Symbols Found on the Unit ............................1 Safety Procedures and Precautions ..........................1 Sicherheitshinweise für das Ventil........................3 In dieser Betriebsanleitung vorkommende Symbole ..................... 3 Erklärung der am Gerät angebrachten Symbole ...................... -
Página 5: Valve Safety Information
Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these requirements. - Página 6 DO NOT SUBSTITUTE PARTS OR MODIFY VALVE Do not install substitute parts or perform any unauthorized modification to the valve. Return the valve to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
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Página 7: Sicherheitshinweise Für Das Ventil
Sicherheitshinweise für das Ventil Sicherheitshinweise für das Ventil In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw. - Página 8 Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Ventil vor. Schicken Sie das Ventil zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben.
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Página 9: Informations De Sécurité Relatives Au Manomètre
Informations de sécurité relatives au manomètre Informations de sécurité relatives au manomètre Symboles utilisés dans ce manuel d’utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L’indication AVERTISSEMENT signale un danger pour le personnel. Elle attire l’attention sur une procédure, une pratique, une condition, ou toute autre situation présentant un risque d’accident pour le personnel, en cas d’exécution incorrecte ou de non-respect des consignes. - Página 10 Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur la valve. Renvoyer la valve à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.
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Página 11: Medidas De Seguridad Del Manómetro
Medidas de seguridad del manómetro Medidas de seguridad del manómetro Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales. - Página 12 No instale piezas que no sean originales o modifique la válvula sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe la válvula al Centro de servicio y calibración de MKS toda vez que sea necesario efectuar reparaciones o tareas de mantenimiento.
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Página 13: Chapter One: General Information
MKS Calibration and Service Center before shipping. The RMA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be certified free of harmful, corrosive, radioactive, or toxic materials. -
Página 14: Introduction
Silicone mat heaters with foam insulation are used to heat the valve. For more information on the heater, please see the MKS Instruments HPS Products Series 46 User's Manual. While the valve is designed to inhibit particulate buildup, periodic cleaning of... -
Página 15: Chapter Two
Disassembly of the main valve Chapter Two: Servicing an HPS Products Two-Stage Valve Chapter Two: Servicing an HPS Products Two-Stage Valve Vacuum components must be kept free of both particulate contamination and of all foreign materials which would have a significant vapor pressure. Before repairing the vacuum valve, prepare a clean work station in a dust-free area. - Página 16 Chapter Two: Servicing an HPS Products Two-Stage Valve Disassembly of the main valve To soak the valve, 1) remove the bypass valve (see pg.4 on bypass valves). 2) Prepare a bath of warm deionized water. 3) Immerse the valve to the body flange. Do not allow water inside of the bellows since it is very difficult to remove (even with baking), it can damage the stem guide bearing, and it can rust the spring.
- Página 17 Disassembly and Inspection of Internal Assembly Chapter Two: Servicing an HPS Products Two-Stage Valve Disassembly and Inspection of Internal Assembly WARNING: The internal assembly of the pneumatic valve contains a strong spring. Instructions below must be followed to avoid personal injury. To disassemble this unit, the closing spring must be compressed.
- Página 18 Chapter Two: Servicing an HPS Products Two-Stage Valve Disassembly and Inspection of Internal Assembly Figure 1 – Exploded View of Main Valve...
- Página 19 Disassembly of the bypass valve Chapter Two: Servicing an HPS Products Two-Stage Valve 4-Unscrew piston nut while holding the spanner on the nosepiece. Remove the piston nut, warning washer, piston, and the piston bushing. Inspect the piston U-cup and Teflon wear ring for excessive wear.
- Página 20 Chapter Two: Servicing an HPS Products Two-Stage Valve Disassembly and Inspection of the Bypass Valve Internal rebuild bypass assembly kits are available. A new kit easily slides into the cleaned valve body. The bypass valve internal assembly can be disassembled further if necessary. Disassembly and Inspection of the Bypass Valve...
- Página 21 Assembly of Main and Bypass Valves Chapter Two: Servicing an HPS Products Two-Stage Valve Assembly of Main and Bypass Valves Assembly is the reverse of disassembly. The inside of the actuator caps should be lubricated with a light coat of Fomblin grease. Once reassembled, the entire Two-Stage Valve should be leak checked with a Helium Leak Detector.
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Página 22: Index
Chapter Two: Servicing an HPS Products Two-Stage Valve...