ND = No hay datos
INTER-
CONCEN- CLO 2
FERENTE TRACIÓN
(PPM)
Acetona
1000
Acetileno
12000
Amoníaco
25
Arsina
1
Benceno
20
Bromo
2
Dióxido de
carbono
5000
Disulfuro de
carbono
15
Monóxido de
carbono
100
Cloro
5
Diborano
20
Etileno
50
Alcohol
etílico
100
Óxido de
etileno
10
Éter
400
Flúor
5
Freón 12
1000
Germano
1
3-6
HF
PH 3
ASH 4
0
ND
ND
ND
0
ND
ND
ND
0
0
ND
ND
0
ND
0.7
1
0
ND
ND
ND
1
ND
ND
ND
0
ND
ND
ND
0
ND
0
0
0
ND
0
1
2.5
5
ND
ND
0
ND
3.5
5
0
ND
0.5
1
0
ND
ND
ND
0
ND
ND
ND
0
ND
ND
ND
1
ND
ND
ND
0
0
0
0
0
ND
0.7
1
SiH 4
GeH 3 B 2 H 6
Br 2
ND
ND
ND
0
ND
ND
ND
0
ND
ND
ND
0
1
1
5
0
ND
ND
ND
0
ND
ND
ND
2
ND
ND
ND
0
0
0
0
0
0
0
0
0
ND
ND
ND
4
4
5
20
0
1
1
2
0
ND
ND
ND
0
ND
ND
ND
ND
ND
ND
ND
0
ND
ND
ND
2
0
0
0
0
1
1
5
0