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TV 551/701
Navigator
969-8832
969-8834
969-8836
969-8922
969-8924
969-8926
969-8974
87-900-934-01(B)
APRIL 2002
969-8833
969-8835
969-8837
969-8923
969-8925
969-8927
969-8975
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Manuales relacionados para Varian TV 551 Navigator
Resumen de contenidos para Varian TV 551 Navigator
- Página 1 MANUALE DI ISTRUZIONI TV 551/701 BEDIENUNGSHANDBUCH Navigator NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES 969-8832 969-8833 MANUAL DE INSTRUÇÕES 969-8834 969-8835 BEDRIJFSHANDLEIDING 969-8836 969-8837 969-8922 969-8923 INSTRUKSTIONSBOG 969-8924 969-8925 BRUKSANVISNING 969-8926 969-8927 INSTRUKSJON MANUAL 969-8974 969-8975 OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-934-01(B) APRIL 2002...
- Página 2 TV 551 Navigator TV 701 Navigator...
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Página 5: Tabla De Contenido
ISTRUZIONI PER L’USO ...........................1 GEBRAUCHSANLEITUNG ..........................3 MODE D’EMPLOI ...............................5 INSTRUCCIONES DE USO ..........................7 INSTRUÇÕES PARA O USO ..........................9 GEBRUIKSAANWIJZINGEN ..........................11 BRUGSANVISNING ............................13 BRUKSANVISNING............................15 BRUKERVEILEDNING .............................17 KÄYTTÖOHJEET .............................19 PDHGIES CRHSEWS ............................21 INSTRUCTIONS FOR USE..........................23 TECHNICAL INFORMATION ...........................25 DESCRIPTION OF THE TV 551/701 NAVIGATOR ..............25 Pump Description.......................26 Controller Description......................26 TECHNICAL SPECIFICATION ....................27... - Página 6 Connection B - FORE-VACUUM PUMP ................46 Connection C - ELECTRICAL....................46 PUMP USED WITH CORROSIVE GASES..................46 PUMP USED IN PRESENCE OF MAGNETIC FIELDS ...............47 ACCESSORIES AND SPARE PARTS..................47...
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Página 7: Informazioni Generali
ISTRUZIONI PER L'USO INFORMAZIONI GENERALI Questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ritiene sollevata eventuali responsabilità dovute... - Página 8 è chiusa con la flangia di chiusura. In caso di guasto è possibile usufruire del servizio di riparazione Varian o del "Varian advanced exchange service", Non toccare la turbopompa e i suoi eventuali accessori durante che permette di ottenere un sistema rigenerato in sostituzione le operazioni di riscaldamento.
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Página 9: Allgemeine Informationen
Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen Mißachtung nationalen einschlägigen Normen übernimmt die Firma Varian keinerlei Haftung. Modell TV 551/701 Navigator ist ein integriertes System, das aus einer Turbomolekularpumpe für Hoch- und Höchstvakuum- anwendungen, integriert mit einem entsprechenden Controller, besteht. - Página 10 Temperatur am Pumpengehäuse unter 50°C abgesunken ist. Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlußflansch verschlossen ist. Bei Defekten kann der Varian Service oder der "Varian Während des Aufheizens dürfen weder die Pumpe noch advanced exchange service" in Anspruch genommen werden, eventuelle heiße Zubehörteile berührt werden.
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Página 11: Indications Generales
Cet appareillage a été conçu en vue d'une utilisation professionnelle. Avant toute utilisation de l'appareil, il est conseillé à l'utilisateur de lire attentivement cette notice d'instructions ainsi que toute autre indication supplémentaire fournie Varian décline conséquent toute responsabilité en cas de non respect total ou partiel des instructions données, d'utilisation impropre par un personnel... - Página 12 ! ! ! ! ou "advanced exchange service", remplir et faire parvenir au ATTENTION! bureau Varian de votre région la fiche "Sécurité et Santé" jointe au présent manuel d'instructions. Une copie de cette fiche Lorsque la turbopompe fonctionne, éviter tout choc, oscillation devra être mise dans l'emballage de la pompe avant...
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Página 13: Información General
Varian antes de usar el aparato. Varian se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones, al uso impropio por parte de personal no preparado, a operaciones no autorizadas o a un uso contrario a las normas nacionales específicas. -
Página 14: Mantenimiento
La alta temperatura puede En caso de avería se podrá utilizar el servicio de reparación provocar lesiones a las personas. Varian o el “Varian advanced exchange service”, que permite obtener un sistema regenerado para sustituir el averiado. ! ! ! ! ¡ATENCIÓN! -
Página 15: Instalação
INSTRUÇÕES DE USO INFORMAÇÕES GERAIS Esta aparelhagem destina-se a uso profissional. O utilizador deve ler atentamente o presente manual de instruções e todas as informações adicionais fornecidas pela Varian antes de utilizar aparelhagem. Varian não responsabiliza pela inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não... - Página 16 Em caso de defeito é possível usufruir do serviço de durante as operações de aquecimento. A elevada temperatura assistência Varian ou do "Varian advanced exchange service", pode causar lesões às pessoas. que permite obter um sistema regenerado que substitua a bomba com defeito.
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Página 17: Algemene Informatie
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Página 18 In geval van storing is het mogelijk om de reparatiedienst van Vermijd schokken, trillingen of bruuske verplaatsingen van de Varian of de "Varian advanced exchange service" in te turbopomp wanneer deze in werking is. De lagers kunnen schakelen: zo krijgt men een ruilpomp ter vervanging van de anders beschadigd raken.
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Página 19: Brugsanvisning
Varian, før udstyret anvendes. Varian tager ikke ansvar for skader helt eller delvis som følge af tilsidesættelse af disse instruktioner, fejlagtig brug af personer uden tilstrækkeligt kendskab, ukorrekt anvendelse af udstyret eller håndtering, der strider imod gældende lokale regler. - Página 20 Pumpen må aldrig aktiveres, hvis indløbsflangen ikke er tilsluttet vakuumkammeret, eller hvis pumpen ikke er lukket ved hjælp af lukkeflangen. I tilfælde af skader på systemet kontaktes et Varian Rør aldrig turbopumpen eller dens tilbehør i forbindelse med reparationsværksted eller “Varian advanced exchange service”, opvarmningsprocedurerne.
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Página 21: Allmän Information
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Página 22 ! ! ! ! VARNING! Om pumpen havererar, kontakta Varian reparationsverkstad Sätt aldrig igång pumpen om intagsflänsen varken är kopplad eller Varian utbytesservice, som kan ersätta systemet med ett till vakuumkammaren eller är blockerad på plats med renoverat system. låsflänsen.
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Página 23: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Página 24 COMMUNICATION DESCRIPTION” tillegget “Teknisk Varian. For detaljer henvises det til “Teknisk informasjon”. Informasjon”). Den grønne lysdioden LD1 på TV 551/701 basepanel angir systemets funksjon ved hjelp av blink: MERK den lyser fast: pumpen roterer normalt TV 551/701 Navigator må...
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Página 25: Yleisiä Tietoja
YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti ohjekirja ja muut Varianin toimittamat lisätiedot. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydellisestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä, valtuuttamattomista toimenpiteistä... - Página 26 Korkea lämpötila saattaa aiheuttaa henkilöiden täydellistä pysähtymistä. Antakaa tämän jälkeen pumpun loukkaantumisia. pintalämmön laskea alle 50ºC:en. Laitteen vahingoittuessa on mahdollista käyttää Varianin " " " " korjauspalvelua tai "Varian advanced exchange service" - HUOMIO! vaihtopalvelua, jonka kautta saatte uudistetun pumpun Vältä...
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Página 27: Pdhgies Crhsews
£llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ, mh exousiodothm◊nej epemb£seij ÿ... - Página 28 ÿ den e∂nai kleistÿ me th fl£ntza kleis∂matoj. Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei Mhn agg∂zete thn tourmpoantl∂a kai ta endecÒmena exartÿmat£ th dunatÒthta na antikatastÿsete thn calasm◊nh antl∂a me m∂a thj kat£...
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Página 29: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interfer- ence with the equipment or any action contrary to that provided for by specific national standards. -
Página 30: Technical Information
The pressure at the vent port must be less than 2 bar (above atmospheric pressure). In the case of breakdown, contact your local Varian service For pumping aggressive gases, these pumps are fitted with a center who can supply a reconditioned system to replace that... -
Página 31: Description Of The Tv 551/701 Navigator
551 and two models for TV 701. The models of − Model 969-8975 for TV 701 Navigator. each group differ in the high vacuum flange. The TV 551 Navigator four models are: − Model 969-8832 with ISO 160 high vacuum flange; − Model 969-8833 with ConFlat 8” external di- ameter high vacuum flange;... -
Página 32: Pump Description
TECHNICAL INFORMATION The pump can operate in any position and can be Pump Description supported on the high vacuum flange. The connec- The pump consists of a high frequency motor driv- tion of the forevacuum on the side of the pump is a ing a turbine fitted with 8 bladed stages and 4 KF 25 NW flange. -
Página 33: Technical Specification
< 5 minutes Start-up time software (optional) Recommended Storage temperature -20° C to +70° C forepump Weight kg (lbs) Mechanical Varian SD 300 Varian 450 ISO flange 19.4 (43) 19.4 (43) Diaphragm Varian MD60 Varian MD60 CF flange 23.4 (51.6) 25.5 (54.2) -
Página 34: Tv 551/701 Navigator Outline
TECHNICAL INFORMATION TV 551/701 NAVIGATOR OUTLINE The following figures show the TV 551/701 Naviga- tor outlines (dimensions are in inches [mm]). TV 551 Navigator outline 87-900-934-01(B) - Página 35 TECHNICAL INFORMATION TV 701 Navigator outline 87-900-934-01(B)
- Página 36 TECHNICAL INFORMATION TV 551 TV 701 Graph of nitrogen pumping speed vs inlet pressure (with inlet screen) Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-934-01(B)
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Página 37: Interconnections
TECHNICAL INFORMATION INTERCONNECTIONS J1 - IN-OUT The following figure shows the TV 551/701 inter- connections. This connector carries all the input and output sig- nals to remote control the TV 551/701 Navigator. It is a 15-pins D type connector; the available sig- nals are detailed in the table, the following para- graphs describe the signal characteristics and use. -
Página 38: Soft Start
TECHNICAL INFORMATION SPEED SETTING: PWM input signal to set the FAULT: this open collector output signal is ON pump speed. The PWM signal characteristics must when a system fault condition is detected. be the following: • frequency: 100 Hz +/-20% PROGRAMMABLE SET POINT: this open collec- •... - Página 39 TECHNICAL INFORMATION When no external input-output device is available this connector must be closed with the supplied mating connector that short-circuits the START and INTERLOCK inputs with the GROUND input (see the following figure). How to connect the output open collector of the controller Here below there are the typical connections of the output open collector of TV551/701 Navigator to an...
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Página 40: P2 - Serial
TECHNICAL INFORMATION P2 - Serial Communication Protocol The communication protocol is a MASTER/SLAVE type where: • Host = MASTER • Controller = SLAVE The communication is performed in the following way: This is a 9 pin D-type serial input/output connector 1. -
Página 41: Window Meanings
TECHNICAL INFORMATION The addressed SLAVE will respond with an AN- STX ADDR ACK ETX SWER whose structure depends from the MESSAGE Command: SOFT-START (OFF) type. Source: PC Destination: Controller When the MESSAGE is a reading command, the SLAVE will respond transmitting a string with the same structure of the MESSAGE. - Página 42 272 to 714 roed by the rotational reset com- (default = 714) frequency in mand) Hz (active only in Stop Reserved to Varian service condition) Set vent On = 1 valve on/off Off = 0 QE5XXXX (on = EPROM (where “XXXX”...
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Página 43: Inlet Screen Installation
TECHNICAL INFORMATION The inlet screen, however, does reduce the pump- NOTES ing speed by about 10%. 1. Automatic means that when the controller stops, the vent valve is opened with a delay de- The inlet screen is fitted in the upper part of the fined by window n. -
Página 44: Heater Band Installation
TECHNICAL INFORMATION Switch on the heater while the turbopump is in op- eration. In the event of turbopump overheat, the pump will be automatically cut out by the thermistor sensor. NOTE The turbopump must be "baked" only when operat- ing with an inlet pressure less than 10 mbar and with water cooling. -
Página 45: Tv 551/701 Pump With Standard Rack Controller
TECHNICAL INFORMATION To fix the fan to the TV 551/701 case execute the following procedure (see the following figure): 1. Fix the fan to the suitable bracket by means of the furnished screws; 2. Fix the bracket to the pump body between the pump and the controller;... -
Página 46: Water Cooling Kit Installation
TECHNICAL INFORMATION Cooling may be carried out either through an open WATER COOLING KIT INSTALLATION circuit with eventual discharge of the water, or us- The water cooling kit mod. 969-9347 or 969-9337 ing a closed circuit cooling system. must be installed when the pump is used under heavy load conditions or when air cooling is insuffi- The water temperature must be between +10°C cient. -
Página 47: Standard Rack Controller Compatible
TECHNICAL INFORMATION Then screw the vent valve into the pump and Vent Device mod. 969-9831 tighten it using a 16 mm hexagonal spanner with a torque of 2.5 Nm. The vent device has adjustable delay time (up to 36 min.). To install the vent device unscrew and remove the threaded plug (see figure below). -
Página 48: Vibration Isolator Installation
TECHNICAL INFORMATION and then screw the gas purge valve (with a torque VIBRATION ISOLATOR INSTALLATION of 2.5 Nm) as shown in the following figure. Six vibration isolators for ISO and CFF inlet flange version pumps are available as accessories. The four model part numbers are the following: −... -
Página 49: Tv 551/701 Controller Installation
TECHNICAL INFORMATION TV 551/701 CONTROLLER INSTALLATION Side mounting The controller can be mounted in two position: NOTE − bottom mounting (as per the complete system) The L-shaped bracket (P/N 969-9349) is available as an option. − side mounting. See the following figure. To install the controller execute the following pro- cedures. -
Página 50: Typical Layout Diagram
TECHNICAL INFORMATION TYPICAL LAYOUT DIAGRAM With Standard Rack Controller With Navigator Controller 1. Turbo-V standard rack controller 2. Vent valve Turbo-V Navigator controller Vacuum pump shut-off valve (optional) Vent valve System vent valve (optional) Vacuum pump shut-off valve (optional) Vacuum chamber System vent valve (optional) Ionization gauge Vacuum chamber... -
Página 51: Connection A - High Vacuum Flange
TECHNICAL INFORMATION Connection A - HIGH VACUUM FLANGE For ConFlat flange connections we recommend using Varian hardware. To connect the Turbo-V551/701 pump to the ISO To facilitate assembly and dismantling, apply Fel- inlet flange, remove the outer ring and position the pro C-100 high temperature lubricant to the screw centering ring as shown in the figure. -
Página 52: Connection B - Fore-Vacuum Pump
Connection B - FORE-VACUUM PUMP CAUTION A flange KF 25 NW is available to connect the To prevent bearing damage, Varian suggests a Turbo-V551/701 pump to the fore-vacuum pump. A minimum purge gas flow rate of 10 sccm (0.17 hose or vacuum approved pipe can be used. If a mbar l/s). -
Página 53: Pump Used In Presence Of Magnetic Fields
Vibration isolator, ISO 100 969-9344 However if the effect is grater, than the case should be carefully reviewed by Varian's specialist. Vibration isolator, CF 6" 969-9334 As a matter of fact, in case of high magnetic fields, Vibration isolator, ISO 160... -
Página 54: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Página 55 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
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Página 56: Sales And Service Offices
Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...