Technical Information
Description of the TPS-compact
The TPS-compact pumping system consists of a pump with an integrated
controller and a forepump and is available in twenty-four models which differ in the
TPM size, high vacuum flange and voltage. The models are:
Table 1
P/N
X3580-64000
X3580-64001
X3580-64002
X3580-64003
X3580-64010
X3580-64011
X3580-64012
X3580-64013
X3580-64020
X3580-64021
X3580-64022
X3580-64023
X3582-64000
X3582-64001
X3582-64002
X3582-64003
X3582-64004
X3582-64005
X3582-64006
X3582-64007
X3582-64008
X3582-64009
X3582-64010
X3582-64011
182
TMP
Flange
74 FS
KF40
74 FS
CFF 2.75
74 FS
ISO63
74 FS
CFF 4.5
74 FS
KF40
74 FS
CFF 2.75
74 FS
ISO63
74 FS
CFF 4.5
74 FS
KF40
74 FS
CFF 2.75
74 FS
ISO63
74 FS
CFF 4.5
305 FS
ISO100
305 FS
CFF6
305 FS
ISO160
305 FS
CFF8
305 FS
ISO100
305 FS
CFF6
305 FS
ISO160
305 FS
CFF8
305 FS
ISO100
305 FS
CFF6
305 FS
ISO160
305 FS
CFF8
Foreline
3.6 m3/h Scroll
3.6 m3/h Scroll
3.6 m3/h Scroll
3.6 m3/h Scroll
3.0m3/h Scroll
230V 50-60Hz
3.0m3/h Scroll
230V 50-60Hz
3.0m3/h Scroll
230V 50-60Hz
3.0m3/h Scroll
230V 50-60Hz
3.6 m3/h Scroll
3.6 m3/h Scroll
3.6 m3/h Scroll
3.6 m3/h Scroll
3.6 m3/h Scroll
3.6 m3/h Scroll
3.6 m3/h Scroll
3.6 m3/h Scroll
3.0m3/h Scroll
230V 50-60Hz
3.0m3/h Scroll
230V 50-60Hz
3.0m3/h Scroll
230V 50-60Hz
3.0m3/h Scroll
230V 50-60Hz
3.6 m3/h Scroll
3.6 m3/h Scroll
3.6 m3/h Scroll
3.6 m3/h Scroll
Agilent TPS-compact User Manual
Voltage
115V 60Hz
115V 60Hz
115V 60Hz
115V 60Hz
100V 60Hz
100V 60Hz
100V 60Hz
100V 60Hz
115V 60Hz
115V 60Hz
115V 60Hz
115V 60Hz
100V 60Hz
100V 60Hz
100V 60Hz
100V 60Hz