Brooks Instrument GCS404 Serie Manual De Instalación Y Funcionamiento página 25

Installation and Operation Manual
X-PR-GCS400-eng
Part Number: 541B175AAG
February, 2012
Greek
Brooks Instrument ,
:
: (1)
.
:
,
Brooks Instrument
25 mm
( / )
Brooks Instrument
«D»
.
.
CE.
:
:
.
:
1.
2.
3.
,
:
,
, ,
,
'
,
.
,
,
,
0,5 bar (g)
(PED).
25 mm 1
1
Brooks Instrument
( 2004/108/EC (89/336/
,
,
.
.
ESD (
.
Appendix A Essential Instructions
Brooks
,
,
.
.
.
.
.
Brooks Instrument.
.
.
,
.
25 mm
1.
,
CE
EMC)).
:
CE.
100%
.
.
.
.
(ESD)
,
.
.
.
)
(NMOS, SMOS
.
®
GCS404/GCS405 Series
!
.
.
Brooks Instrument.
/
Brooks Instrument.
.
,
.
.
(PED)
1
PED.
97/23/ .
PED.
(SEP).
(EMC)
CE.
.
360 .
100%
,
.).
,
,
.
,
.
.
.
.
. (2)
.
.
A-9