Brooks Instrument Sho-Rate 1350G Serie Manual De Instalación Y Funcionamiento página 29

Installation and Operation Manual
X-VA-1350G-eng
Part Number: 541B205AAG
November, 2016
Table 5-1 Sho-Rate 1350G/1355G Parts List (Continued)
VALVE
TYPE
SIZE BUNA
LOW 947N091BMA
CARTRIDGE 3
MED 947N097BMA
SS
HIGH 947N103BMA
LOW 947N063BNA
CARTRIDGE 2
947N069BNA
MED
SS
947N077BNA
HIGH
1 947L301BMA
2 947L307BMA
NRS 3 947L313BMA
SS
4 947L319BMA
5 947L325BMA
6 947L331BMA
7 947L337BMA
*Sizing Based on Sizing Tab
Brooks
O-RING MATERIAL
VITON KALREZ
947N092BMA 947N095BMA 947N094BMA
947N098BMA 947N101BMA 947N100BMA
947N104BMA 947N107BMA 947N106BMA
947N060BNA 947N064BNA 947N065BNA
947N061BNA 947N070BNA 947N071BNA
947N062BNA 947N078BNA 947N079BNA
947L302BMA 947L305BMA 947L304BMA
947L308BMA 947L311BMA 947L310BMA
947L314BMA 947L317BMA 947L316BMA
947L320BMA 947L323BMA 947L322BMA
947L326BMA 947L329BMA 947L328BMA
947L332BMA 947L335BMA 947L334BMA
947L338BMA 947L341BMA 947L340BMA
® Sho-Rate TM
EPR/EPM KALREZ/TEFLON
947N096BMA 947N093BMA
947N102BMA 947N099BMA
947N108BMA 947N105BMA
INVALID
INVALID
INVALID
947L306BMA 947L303BMA
947L312BMA 947L309BMA
947L318BMA 947L315BMA
947L324BMA 947L321BMA
947L330BMA 947L327BMA
947L336BMA 947L333BMA
947L342BMA 947L339BMA
Section 5 Parts List
Models 1350G/1355G
BUTYL
INVALID
**Existing valve, using for initial release
INVALID
**CART II valve no longer being offered
INVALID
**Size 7 no longer being offered
5-7