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Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
®
Brooks
SLA5850, SLA5851, SLA5853
Mass Flow Controllers Models
and Models SLA5860, SLA5861, SLA5863
Mass Flow Meters
Model SLA5850D
DeviceNet
with Coplanar Valve
Model SLA5853S
Analog I/O MFC
with RS-485
Digital I/O
TM
MFC
Model SLA5850S
Analog I/O MFC
with RS-485
®
Brooks
Digital MFC's & MFM's
Model SLA5850F
Digital I/O
F
Fieldbus MFC
OUNDATION
with Coplanar Valve
Model SLA5850S
Analog I/O MFC
with RS-485
Elastomer Downport
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Manuales relacionados para Brooks Instrument SLA5850
Resumen de contenidos para Brooks Instrument SLA5850
- Página 1 Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 ® Brooks SLA5850, SLA5851, SLA5853 Mass Flow Controllers Models and Models SLA5860, SLA5861, SLA5863 Mass Flow Meters Model SLA5850D Model SLA5850F Digital I/O Digital I/O DeviceNet...
- Página 2 Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013...
- Página 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Página 4 Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Página 5: Tabla De Contenido
Contents Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's April, 2013 Paragraph Page Number Number Section 1 Introduction Scope ............................1-1 Purpose ............................1-1 Description ..........................1-1 Specifications ..........................1-2 Section 2 Installation General ............................2-1 Receipt of Equipment ......................... - Página 6 Contents Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's April, 2013 Section 4 Maintenance & Troubleshooting Maintenance and Troubleshooting ..................... 4-1 4-1-1 Troubleshooting Analog or DeviceNet version ................4-2 4-1-2 System Checks .......................... 4-4 4-1-3 Cleaning Procedures ........................
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Página 7: Section 1 Introduction
The SLA5800 Series covers an extremely broad range of flowrates. Model SLA5850 can have a full scale flow as low as 3 ccm. With a high turndown ratio of 50:1, accurate gas flow can be measured or controlled down to 0.06 ccm! Model SLA5853 can meter or control gas flow up to 2500 lpm. -
Página 8: Specifications
1-4 Specifications PERFORMANCE CHARACTERISTICS: Flow Ranges Models SLA5850/SLA5860 - Any FS range from 0-3 ccm to 0-50 lpm (N eq.) Models SLA5851/SLA5861 - Any FS range from 20-100 lpm (N eq.) Up to 200 lpm H... - Página 9 (2) Max. Delta P for 5853 is 20 bar (300 psi). (3) 70 bar / 1000 psi for UL Certification. Pressure Differential Range (Controllers) Minimum: Model SLA5850 5 psi (0.35 bar) up to 50 lpm (N eq.) Model SLA5851 10 psi (0.69 bar) from 30 lpm to 100 lpm (N eq.)
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Página 10: Electrical Characteristics
Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 PHYSICAL: Materials of Construction ® Wetted parts - stainless steel with Viton fluoroelastomers ® ® Optional: Buna-N, Kalrez , Teflon /Kalrez and EPDM Outline Dimensions Refer to Figures 1-5 thru 1-13 Process Connections... - Página 11 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 supported. Setpoint input types are software selectable as follows: 0 - 5 Vdc 1 - 5 Vdc 0 - 20 mA 4 - 20 mA Voltage Setpoint Input Specifications Nominal Range:...
- Página 12 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 0.3 Vdc > VOR > 4.8 Vdc: Undefined Valve Override Signal Specifications (Analog I/O Versions only) Input Impedence: 800 kΩ Absolute Max. Input: -25 Vdc > VOR > 25 Vdc (without damage) 5 Volt Reference Signal (Analog I/O versions only) A 5 Vdc reference output is provided to the customer for use in generating...
- Página 13 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Fast Response Performance The curves in Figure 1-3 depict the MFC output signal and actual transitional flow to steady-state when gas flow enters into process chamber, under a step response command condition.
- Página 14 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Table 1-2 Calibration Select Signal. DEFAULT = CAL# 1 (External resistor not installed) Resistor Value (k ohms) Resistor Value (k ohms) Not Installed Shorted 80.6...
- Página 15 The Brooks SLA5800 Digital Series is also available with DeviceNet communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a...
- Página 16 See Table 1-1 for further pressure information PC-based Support Tools Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. SmartDDE may be used with any unit supporting RS-485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices.
- Página 17 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Figure1-5 Model SLA5850D Digital I/O Devicenet MFC Figure 1-6 Model SLA5850S Analog I/O MFC with RS-485 Elastomer Downport Connections 1-11...
- Página 18 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Figure 1-7 Model SLA5850F Digital I/O F Fieldbus MFC with Coplanar Valve OUNDATION Figure 1-8 Model SLA5851D Digital I/O DeviceNet MFC 1-12...
- Página 19 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Figure 1-9 Model SLA5853F Digital I/O F Fieldbus MFC OUNDATION Figure 1-10 Model SLA5853S Analog I/O MFC with Flanged Connections 1-13...
- Página 20 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Figure 1-11 Model SLA5860S Analog I/O MFM with RS-485 Figure 1-12 Model SLA5861F Digital I/O F Fieldbus MFM OUNDATION 1-14...
- Página 21 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Figure 1-13 Model SLA5863D Digital I/O Devicenet MFM Figure 1-14 Model SLA5863 Analog I/O MFM with Flanges 1-15...
- Página 22 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 THIS PAGE WAS INTENTIONALLY LEFT BLANK 1-16...
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Página 23: Section 2 Installation
If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to your nearest Product Service Department. Brooks Instrument 407 W. Vine Street P.O. Box 903... -
Página 24: Return Shipment
Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. This is required before any Brooks Personnel can begin processing. Copies of the form can be obtained from any Brooks Instrument location listed above. 2-5 Transit Precautions To safeguard against damage during transit, transport the instrument to the installation site in the same container used for transportation from the factory if circumstances permit. -
Página 25: In-Line Filter
MFC. The filtering element should be replaced periodically or ultrasonically cleaned. Table 2-1 Recommended Filter Size Models Maximum Flow Rate Recommended Filter SLA5850/60 100 ccm 2 micron SLA5850/60 500 ccm 2 micron SLA5850/60... - Página 26 Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 e. When installing a mass flow controller or meter with full scale flow rates of 10 lpm or greater, be aware that sharp, abrupt angles in the system piping directly upstream of the controller may cause a small shift in accuracy.
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Página 27: Electrical Interface
Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Proper process line venting is also important. If operating at pressures greater than 50 psig, be sure to perform a controlled pressure release from inlet and back pressure simultaneously in order to prevent bellows damage from excesssive back pressure. - Página 28 Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 For a DeviceNet unit, 11-25 Vdc power and communication I/O are supplied via the standard 5-pin Circular Micro-Connector. 15 PIN MALE D-CONNECTOR *BROOKS READ OUT MFC / MFM FUNCTION...
- Página 29 Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply) Figure 2-4 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)
- Página 30 Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Figure 2-5 RS-485 Multidrop Interconnection TMFs and PC The RS-485 is a multidrop connection and allows a maximum of 32 devices to be connected to a computer system. IBM-ompatible PCs are not equipped with RS-485 ports as standard.
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Página 31: Operation Check Procedure (Analog I/O)
Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 2-11 Operation Check Procedure (Analog I/O) a. Mount the MFC/MFM in its final orientation. b. Apply power to the MFC/MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature. -
Página 32: Digital I/O: Devicenet Or Foundation Fieldbus
Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 2-12 Digital I/O: DeviceNet or F Fieldbus OUNDATION a. Mount the MFC/MFM in its final orientation. b. Apply power to the MFC/MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature. -
Página 33: Section 3 Operation
Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 3-1 Overview This section contains the following information: • Theory of Operation • Features 3-2 Theory of Operation for Flow Measurement The thermal mass flow measurement system consists of two components: the restrictor and the flow sensor. -
Página 34: Features
Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 3-3 Features Note: All Brooks Digital Series mass flow meters are configured at the factory according to customer order and do not require adjustment. Not all features are available on all instruments. - Página 35 Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Figure 3-1 Flow Sensor Operational Diagram (VCR End Connections Shown) Zero Button Figure 3-2 Externally Accessible Adjustment for all Meters/Controllers.
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Página 36: Analog I/O Mode Of Operation
Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 3-4 Analog I/O Mode of Operation The following paragraphs describe the basic features of the Brooks Digital Series Mass Flow Meters/Controllers. NOTE: Read Section 3-3, Features, before reading this section. - Página 37 Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Valve Override (MFC Only) Connector Pin 12 on the 15 pin D-Connector allows the valve to be forced to its most closed state or its most open state, regardless of setpoint. If this input is not electrically connected, the MFC will operate according to the current values of the other MFC inputs.
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Página 38: Communications Features
Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 5 Vdc Reference Connector Pin 11 on the 15 pin D-Connector provides a 5 Vdc reference output signal and is for use in generating a setpoint and/or Valve Override Signal. - Página 39 The Brooks SLA5800 Digital Series is also available with DeviceNet communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a...
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Página 40: Alarms And Warnings (Analog Versions Only)
Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Device type dependant function block are available representing the different device functions: · Current Flow Value (Mass Flow device only) · Current Pressure Value (Pressure device only) ·... - Página 41 Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Latching Enable - When an alarm/warning is set to non-latching, that means the alarm is indicated only when the monitored value exceeds the specified conditions.
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Página 42: Diagnostic Alarms (Analog Versions Only)
Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 3-6-2 Diagnostic Alarms (Analog versions only) A Diagnostic Alarm will be indicated when any of the diagnostics below detect a failure providing a visual indication via the red and/or green LED, and activating the TTL open collector output located on the 15 pin D-Connector. -
Página 43: General Alarms And Warnings (Analog Versions Only)
Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 3-6-3 General Alarms and Warnings (Analog versions only) Several alarms are available to indicate unexpected process control events as follows: Flow Alarms Two flow alarms will be provided. -
Página 44: Calibration/Configuration Sets
Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 Flow Analog Output Out of Range Alarm The Flow Analog Output Out of Range Alarm will occur when the measured flow results in an Analog Output which exceeds the specified range for either the Voltage or Current Output. -
Página 45: Special Features
Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 3-8 Special Features Special Features may be adjusted by an advanced user via the Service Port using a special software application available from Brooks. Reference the Brooks Service Suite User Manual for more information about the Service Port and Service Tool software applications. -
Página 46: Flow Signal Lock-In
3-9 PC-based Support Tools Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. SmartDDE may be used with any unit supporting RS-485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices. - Página 47 Section 4 Maintenance & Installation and Operation Manual X-TMF-SLA5800-MFC-eng Troubleshooting Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's April, 2013 4-1 Maintenance and Troubleshooting No routine maintenance is required on the Brooks Digital MFC's and MFM's. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned.
- Página 48 Section 4 Maintenance & Installation and Operation Manual X-TMF-SLA5800-MFC-eng Troubleshooting Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's April, 2013 4-1-1 Troubleshooting Analog or DeviceNet version This section contains suggestions to help diagnose MFC related problems in the gas distribution system and answers commonly asked questions. Failure of the flow rate or flow signal to achieve setpoint.
- Página 49 Section 4 Maintenance & Installation and Operation Manual X-TMF-SLA5800-MFC-eng Troubleshooting Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's April, 2013 NOTE: This information and all other detailed DeviceNet information is available in the Brooks DeviceNet Supplement Instruction Manual. Questions Analog Version Q: What is purpose of the LED on top of the MFC? A: The LED on top of the MFC should normally be lit GREEN, This signifies the MFC is in proper working mode.
- Página 50 Section 4 Maintenance & Installation and Operation Manual X-TMF-SLA5800-MFC-eng Troubleshooting Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's April, 2013 Table 4-1 Sensor Troubleshooting SENSOR SCHEMATIC FUNCTION Heater Upstream Temperature Sensor (Su) Downstream Temperature Sensor (Sd) Sensor Common Heater Common Thermistor Flex Circuit Wire Numbers Thermistor...
- Página 51 (See Section 3-4 zeroing function). If the output signal does not zero properly, please contact Brooks Instrument. 2. Connect the instrument to a source of the same gas used for it's original calibration. Regulate the Setpoint to 100% flow and adjust the inlet and outlet pressures to calibration conditions.
- Página 52 ® equipment, in addition to digital communications. If your device needs calibration Brooks Instrument can provide this service at one of its service locations. Visit www.BrooksInstrument.com to locate the service location nearest to you. However, if traceable calibration equipment is available at your facility, Brooks service Suite Calibration software, along with training, is available for purchase.
- Página 53 (regardless of Setpoint) and (Section 4-1-2). there is flow through the meter/controller Defective electronic board Contact Brooks Instrument Flow cannot be achieved Clogged Control Valve Clean the control valve (Section 4-1-2) or regardless of Setpoint. return the device to the factory...
- Página 54 Section 4 Maintenance & Installation and Operation Manual X-TMF-SLA5800-MFC-eng Troubleshooting Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's April, 2013 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Página 55 Section A Essential Instructions Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG April, 2013 ® Brooks Digital MFC's and MFM's Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" ( (PED).
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Página 56: Základní Instrukce
P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující... - Página 57 Section A Essential Instructions Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG April, 2013 ® Brooks Digital MFC's and MFM's Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så...
- Página 58 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken. De volgende instructies moeten worden toegevoegd aan en geïntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert, bedient en onderhoudt.
- Página 59 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite nõuetele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrument'i toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Página 60 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
- Página 61 Brooks Instrument et que des personnes qualifiées effectuent le remplacement. Les pièces et procédures non autorisées peuvent porter atteinte au fonctionnement du produit et mettre en péril la sécurité de votre procédé. Les remplacements par des pièces d’apparence similaire peuvent entraîner des incendies, des risques électriques ou un mauvais fonctionnement.
- Página 62 Bitte zuerst lesen! Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt. Die folgenden Anweisungen müssen eingehalten werden und in Ihr Sicherheitsprogramm integriert werden, wenn Sie Brooks Produkte installieren, bedienen und warten.
- Página 63 Section A Essential Instructions Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG April, 2013 ® Brooks Digital MFC's and MFM's Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED).
- Página 64 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Página 65 Leggerle subito! La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali. Tali apparecchiature devono essere installate, messe in esercizio e tenute in manutenzione in maniera adeguata affinché operino in conformità alle loro normali specifiche di funzionamento.
- Página 66 P rliecinieties par to, lai pirms instrumenta tehnisk s apkopes b tu likvid ts procesa l nijas spiediens. Ja ir nepieciešams veikt k du da u nomai u, nodrošiniet, lai tiktu izmantotas „Brooks Instrument” nor d t s da as un da u nomai u veiktu kvalific ts person ls. Neat autu da u un proced ru izmantošana var ietekm s ražojuma sniegumu un samazin t procesa droš...
- Página 67 25 mm arba 1 colio ar mažesni matuokliai atitinka tinkam inžinerijos praktik (SEP). Europoje taikomi elektromagnetinio suderinamumo (EMC) reikalavimai CE ženklu pažym ta „Brooks Instrument“ (elektrin / elektronin ) ranga buvo s kmingai išbandyta pagal elektromagnetinio suderinamumo reikalavimus (EMC direktyv 2004/108/EC).
- Página 68 Urz dzenia pomiarowe o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2004/108/EC).
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Página 69: Instruções Básicas
Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de... -
Página 70: Indica Ii De Referin
În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei. - Página 71 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Página 72 Najprej preberite jih Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim doma im in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podro ju funkcioniranja. Naslednjih navodil se mora držati in potrebno je vgraditi v program varstva pri delu pri instaliranju, koriš...
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Página 73: Directriz Europea De Los Equipos De Presión (Ped)
¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento. - Página 74 Läs detta innan du fortsätter ! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Página 75 Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's April, 2013 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Página 76 Europe +31 (0) 318 549 290 Asia +81 (0) 3 5633 7100 Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks ............Brooks Instrument, LLC ITK ..............Fieldbus F OUNDATION Brooks Service Suite ........