Tabla de contenido
Publicidad
The turbopump with ISO inlet flange must be fixed to the vac-
uum chamber by means of clamps or claws. The following ta-
ble shows, for each flange and fixing device, the necessary
number of clamps or claws and the relevant fixing torque.
FLANGE
FIXING
DEVICE
ISO 63
M10 clamps
M8 claws
ISO 100
M10 clamps
M8 claws
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian hard-
ware. See the appendix "Technical Information" for a detailed
description.
NOTE
The TV 141 Navigator cannot be fixed by means of its base.
For installation of optional accessories, see "Technical
Information".
USE
This paragraph details the fundamental operating procedures.
Make all electrical an pneumatic connections before the use of
the system.
While heating the vacuum chamber, the temperature of the
inlet flange must not exceed 120 °C.
! ! ! !
WARNING!
Never use the turbopump when the inlet flange is not con-
nected to the vacuum chamber or is not blanked.
! ! ! !
WARNING!
Do not touch the turbopump or any of its accessories during
the heating process. The high temperatures may cause burns.
! ! ! !
Avoid impacts or harsh movements of the pump when in
operation. The bearings may become damaged.
! ! ! !
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
For pumping aggressive gases, these pumps are fitted with a
special port to allow a steady flow of inert gas (like N
pump bearing protection (see the appendix "Technical Informa-
tion").
! ! ! !
WARNING!
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
N.
FIXING
TORQUE
4
22 Nm
4
11 Nm
4
22 Nm
8
11 Nm
CAUTION
CAUTION
, Ar) for
2
Switching on and Use of TV 141 Navigator
To switch on the TV 141 Navigator it is necessary to supply the
mains. The integrated controller automatically recognizes the
interlock and start signals presence and start up the pump.
The first pump start up is in "Soft Start" mode. When the start
up cycle is finished, the "Soft Start" mode automatically is dis-
abled, and the following start ups are without the "Soft Start"
mode. To re-enable the "Soft Start" mode it must be activated
by the suitable software command (see the paragraph "RS 485
COMMUNICATION DESCRIPTION" in the appendix "Technical
Information").
The green LED LD1 located on the TV 141 Navigator base
front panel indicates with its flashing frequency the system op-
erating conditions:
•
with no flashing: the pump is normally rotating;
•
slowly flashing (period of about 400 ms): the system is in
ramp, or in braking, or in Stop, or in "Waiting for interlock"
status;
•
fast flashing (period of about 200 ms): error condition.
TV 141 Navigator Switching off
To switch off the TV 141 Navigator it is necessary to remove
the mains. The integrated controller immediately stops the
pump.
Emergency Stop
To immediately stop the TV 141 Navigator in an emergency
condition it is necessary to remove the supply cable from the
mains plug.
The mains disconnecting device is the supply cable. Install the
mains plug in an accessible location.
MAINTENANCE
The TV 141 Navigator does not require any maintenance. Any
work performed on the system must be carried out by author-
ized personnel.
! ! ! !
Before carrying out any work on the system, disconnect it from
the mains, vent the pump by opening the appropriate valve,
wait until the rotor has stopped turning and wait until the sur-
face temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned system to replace that
broken down.
Before returning the system to the constructor for repairs, or
replacement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the system package before shipping.
If a system is to be scrapped, it must be disposed of in accor-
dance with the specific national standards.
24
INSTRUCTION MANUAL
! ! ! !
CAUTION
WARNING!
NOTE
87-900-924-01(B)
Publicidad
Tabla de contenido
