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- Página 1 Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 ® Brooks Direct Liquid Injection Vaporizer Brooks DLI Advanced Direct Liquid Injection Vaporizer System (L to R: DLIHV15, DLIFS & DLIWL)
- Página 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Página 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Página 4 Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Página 5: Tabla De Contenido
2-11-1 Temperature Controller ......................2-8 2-11-2 Temperature Limit Controller ...................... 2-9 Section 3 Startup Operation ........................... 3-1 Prior to Starting Up the DLI Vaporizer ..................3-1 Starting Up the DLI Vaporizer ..................... 3-2 Section 4 Maintenance and Cleaning Maintenance and Troubleshooting ..................... 4-1 Troubleshooting the DLI Vaporizer ..................... - Página 6 Contents Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG Brooks ® DLI Vaporizer System May, 2016 Figures Figure Page Number Number DLIFS/DLIWx Diagram ......................1-2 DLIHV Diagram .......................... 1-5 Fine Droplet Atomizer Detail ....................... 1-6 Vaporizer System PID Diagram ....................2-6...
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Página 7: Section 1 Introduction
1-3 Product Support References Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the DLI Vaporizer. Those documents include: Brooks DLI Vaporizer data sheets: DS- VAP-DLI Systems-eng... -
Página 8: Warning, Caution And Notice Statements
Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 1-4 Warning, Caution and Notice Statements Warning, caution and notice statements are located throughout this manual in ANSI format. A WARNING statement indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury. -
Página 9: Description
Brooks DLI Vaporizer System May, 2016 1-6 Description Brooks Instrument DLI (Direct Liquid Injection) vaporizer is a fully integrated direct liquid injection system offered in three different models depending upon process conditions and user preference. DLI Flange (DLIFS) The DLIFS vaporizer (see Figure 1-1) is an integrated system which combines Brooks Instrument’s proprietary atomizer along with a flange,... - Página 10 DLI Welded (DLIWx) The DLIWx Series vaporizers (see Figure 1-1) are an integrated system which combines Brooks Instrument’s proprietary atomizer along with a welded 316L SS recirculating heat exchanger that is wrapped in band heaters and insulation inside an aluminum enclosure and mounted on an aluminum back plate.
- Página 11 Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 Figure 1-2 DLIHV Diagram deliver up to 83 g/min (~5 kg/hr) of water vapor. The DLIHV circulation heater is constructed of a 316L stainless steel helical coiled tube cast in an aluminum body with tubular elements.
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Página 12: Theory Of Operation
1-7-1 Fluid (Liquid) Flow Control Path Liquid is delivered under a defined pressure range to either a user- supplied liquid flow controller or a Brooks Instrument Quantim Coriolis mass flow controller. The Quantim controller will provide flow control at a selectable rate based on the process conditions provided ensuring the specified rate of vaporization. -
Página 13: Gas Flow Control Path
DLI vaporizer system uses an atomizer to first break up the fluid into small micron size droplets. Small droplets increase the surface area by thousands of times making vaporization fast, efficient and gentle. - Página 14 Section 1 Introduction Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Página 15: Section 2 Installation
DLI Vaporizer System May, 2016 2-1 General This section provides installation instructions for the Brooks DLI Vaporizer. The installation of the DLI vaporizer involves mounting the device, making the required mechanical connections and making the required electrical connections 2-2 Receipt of Equipment When the instrument is received, the outside packing case should be checked for damage incurred during shipment. -
Página 16: Recommended Storage Practice
Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 2-3 Recommended Storage Practice If intermediate or long-term storage of the device is required, it is recommended that it be stored in accordance with the following conditions: •... -
Página 17: Transit Precautions
Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 2-4 Transit Precautions To safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory, if circumstances permit.well. -
Página 18: Installation Preparation
It is necessary to heat trace the vapor line from the DLI vaporizer connection to the point where the vapor is to be used, to prevent condensation of the vapor in the process line. Heat tracing material and its installation is the responsibility of the end user. - Página 19 X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 controller can be 316L EP stainless steel, Alloy C22, or Titanium tubing depending on the precursor. As precursor flow rates are typically low, it is recommended to keep the inventory volume in the process hook-up tubing as small as possible.
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Página 20: Electrical Connections
Wire the DLI vaporizer in a safe manner following local and national electrical codes using appropriate wire sizing, temperature rating and fusing (circuit breakers), a disconnect (switch) is recommended. -
Página 21: System Purging
Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 2-9 System Purging Prior to the introduction of precursor to the vaporizer, it is important to eliminate all atmosphere (air) and moisture (except for water vaporizers) from the process lines and vaporizer and replace them with an inert gas, as most precursor chemistries react with air and/or moisture. -
Página 22: Setting Up Temperature And Temperature Limit Controllers
The temperature controller, whether a Watlow PID controller supplied by Brooks Instrument, or a customer-supplied system, is used to set the operating temperature of the DLI vaporizer. Temperature is reported to the controllers by two Type K thermocouples attached to the vaporizer heat exchanger, one for temperature control and one for limit control. -
Página 23: Temperature Limit Controller
2-11-2 Temperature Limit Controller The Temperature Limit controller is used to shut off the DLI vaporizer at the maximum safe temperature for the specific precursor being vaporized in the event of a primary thermocouple, temperature controller, or cable failure. - Página 24 Section 2 Installation Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK 2-10...
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Página 25: Section 3 Startup
May, 2016 3 Operation 3-1 Prior to Starting Up the DLI Vaporizer Before attempting to start up the DLI vaporizer ensure you perform the following steps: • Read all warning labels and this startup procedure in its entirety before attempting to hook up or start up the DLI vaporizer •... -
Página 26: Starting Up The Dli Vaporizer
Brooks DLI Vaporizer System May, 2016 • If you have any questions regarding the safe startup of the DLI vaporizer, please contact your nearest Brooks’ representative or Brooks Instrument, Hatfield, PA 19440. For other locations nearest you, please visit our website at www.BrooksInstrument.com or call +1-215-362-3500. - Página 27 Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 12. Perform a dry carrier gas purge and monitor system pressure at: • Atomizer inlet • Vaporizer outlet (if pressure transducer is available) • Process chamber 13.
- Página 28 Section 3 Startup Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Página 29: Maintenance And Troubleshooting
May, 2016 4 Maintenance and Troubleshooting In normal service, the DLI vaporizer does not require any maintenance as it is designed to operate with clean liquids and clean dry gases. Some metal organic fluids might be subject to decomposition. In this type of service a flush with a compatible solvent is recommended. - Página 30 Section 4 Installation and Operation Manual X-VAP-DLI-Standard-eng Maintenance and Cleaning Part Number: 541B203AAG Brooks ® DLI Vaporizer System May, 2016 Table 4-1 General Troubleshooting Information and Courses of Action Problem Possible Cause Course of Action Incomplete vaporization Heater exchanger temperature too low Ensure heater is set to the correct temperature.
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Página 31: Recommended Spare Parts
Due to the variety of configurations, we recommend that you contact your Brooks Instrument representative for a list of recommended spare parts. Contact Brooks Instrument to order all spare parts. Refer to the back cover of this manual for Brooks Instrument contact information. -
Página 32: Return Shipment
All devices returned to Brooks require completion of Form RPR003-1, Brooks Instrument Decontamination Statement, along with a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing by Brooks personnel. -
Página 33: Section A Essential Instructions
Section A Essential Instructions Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG May, 2016 ® Brooks DLI Vaporizer System Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED). -
Página 34: Základní Instrukce
P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující... - Página 35 X-VAP-DLI-Standard-eng Part Number: 541B203AAG May, 2016 ® Brooks DLI Vaporizer System Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så at de kan virke tilsvarende deres normale anvendelsesperiode. De følgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation.
- Página 36 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
- Página 37 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Página 38 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
- Página 39 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
- Página 40 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2004/108/EC) erfolgreich bestanden.
- Página 41 Section A Essential Instructions Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG May, 2016 ® Brooks DLI Vaporizer System Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED).
- Página 42 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Página 43 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2004/108/EC). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
- Página 44 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
- Página 45 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
- Página 46 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2004/108/EC).
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Página 47: Instruções Básicas
Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de... -
Página 48: Indica Ii De Referin
În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei. - Página 49 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Página 50 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
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Página 51: Directriz Europea De Los Equipos De Presión (Ped)
¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento. - Página 52 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Página 53 Installation and Operation Manual X-VAP-DLI-Standard-eng Part Number: 541B203AAG ® Brooks DLI Vaporizer System May, 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Página 54 Asia +81 (0) 3 5633 7100 Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks, Quantim, XacTorr, SolidSenseII, Brooks Service Suite & Brooks Service Tool are trademarks of Brooks Instrument, LLC.