Brooks Instrument DLI Manual De Instalación Y Funcionamiento página 19

Installation and Operation Manual
X-VAP-DLI-Standard-eng
Part Number: 541B203AAG
May, 2016
controller can be 316L EP stainless steel, Alloy C22, or Titanium tubing
depending on the precursor. As precursor flow rates are typically low, it is
recommended to keep the inventory volume in the process hook-up tubing
as small as possible. It is good practice to have the precursor line from the
precursor vessel capable of being purged and cleaned. It is also desirable
to be able to apply a vacuum source to evacuate atmosphere and aid in
filling both the process line and the mass flow controller. It is good practice
to install a block/shutoff valve and purge valves in the precursor line.
• Install the exit orifice in the outlet fitting of the vaporizer, where required.
The exit orifice, if required, is a modified VCR gasket with a pre-calculated
laser-drilled hole that is based on the downstream chamber pressure and
the operating pressure of the vaporizer. Not all vaporizer systems require
an outlet orifice. The factory will determine what orifice is required; there
are cases where the vaporizer needs to be isolated "flow wise" from the
rest of the system. Installing a supersonic orifice in the outlet, as well as
the inlet, will remove any outside interference from the other controllers.
• All vaporizer piping / tubing should be 316L EP stainless steel, Alloy C22,
or Titanium, and capable of supporting the liquid and gas source
pressures. All process connections which use a VCR connection, should
use a suitable VCR gasket for sealing these connections. Reference the
Swagelok ® VCR ® Fitting Installation Instructions (http://www.swagelok.com/
downloads/webcatalogs/en/ms-crd-vcr.pdf) for the proper methods to
properly make the connection.
• To facilitate both pressure and helium leak test, it is recommended that all
flow controller valves on the vaporizer panel be opened. Both the liquid and
gas mass flow controllers should be placed in the Valve Override (VOR)
open position using the associated control electronics for the MFCs. With
supply pressure applied to the pilot valve, turn on the pilot valve toggle
switch and this will open the isolation valve in the liquid line. The manual
bypass valve should also be opened.
Section 2 Installation
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Brooks DLI Vaporizer System
2-5