Installation Preparation; Basic Vaporizer Panel Mechanical Installation - Brooks Instrument DLI Manual De Instalación Y Funcionamiento

Section 2 Installation
®
Brooks DLI Vaporizer System

2-6 Installation Preparation

2-7 Basic Vaporizer Panel Mechanical Installation

2-4
All Brooks DLI vaporizers require mounting and electrical hook-up.
Additionally, attention must be given to the preparation of inlet and outlet
piping (tubing).
All power connections should be installed in accordance with the National
Electrical Code NFPA codes, and local codes for the state, province or
country where the equipment is installed.
• The vaporizer panel should be installed as close as possible to the point
at which vapor is to be delivered. It is necessary to heat trace the vapor line
from the DLI vaporizer connection to the point where the vapor is to be
used, to prevent condensation of the vapor in the process line. Heat tracing
material and its installation is the responsibility of the end user.
• The vaporizer panel should be mounted in a vertical position with the
vapor outlet down. Securely mount the vaporizer to a solid surface (e.g., a
large piece of equipment, wall, or strut channel framework).
• Mount the outlet of the vaporizer as close as possible to the point of vapor
use. If possible, mount the vaporizer outlet higher than the point of use,
avoiding low spots in the piping that might cause and/or collect
condensation of the fluid being vaporized.
• The vaporizer has at least two inlet connections: One to three inlets
connected to the atomizer for the liquid(s), and one inlet for the carrier gas.
Care must be taken to properly size the inlet piping and the all components
in the piping system (for example, pressure regulators, valves, filters, and
fittings). The capacity of any regulators, valves, and filters must have
adequate delivery capacity or the vaporizer system will not work correctly.
The flow rates and pressures required for your system can be found in the
DLI Vaporizer Operating Parameter Guide that was shipped with your
product.
• Carrier gas is delivered from a pressurized regulated source capable of
delivering a constant flow. The hookup should be made with clean and dry
stainless steel tubing, preferably 316L EP stainless steel. It is good practice
to install a block/shutoff valve in the process gas line.
• Precursor liquid delivery from the source vessel should be delivered to the
vaporizer by a regulated source pressure consistent with your process
conditions this system was sized for. The hookup to the liquid mass flow
Installation and Operation Manual
X-VAP-DLI-Standard-eng
Part Number: 541B203AAG
May, 2016