Tabla De Contenido - Brooks Instrument DLI Manual De Instalación Y Funcionamiento

Installation and Operation Manual
X-VAP-DLI-Standard-eng
Part Number: 541B203AAG
May, 2016
Paragraph
Number
Section 1 Introduction
1-1 Introduction ................................................................................................................................ 1-1
1-2 How To Use This Manual ........................................................................................................... 1-1
1-3 Product Support References ...................................................................................................... 1-1
1-4 Warning, Caution and Notice Statements .................................................................................. 1-2
1-5 Product Warranty ....................................................................................................................... 1-2
1-6 Description ................................................................................................................................. 1-3
1-7 Theory of Operation ................................................................................................................... 1-6
1-7-1 Fluid (Liquid) Flow Control Path ................................................................................................. 1-6
1-7-2 Gas Flow Control Path ............................................................................................................... 1-7
1-7-3 Vaporization ................................................................................................................................ 1-7
Section 2 Installation
2-1 General ...................................................................................................................................... 2-1
2-2 Receipt of Equipment ................................................................................................................. 2-1
2-3 Recommended Storage Practice ............................................................................................... 2-2
2-4 Transit Precautions .................................................................................................................... 2-3
2-5 Removal from Storage ............................................................................................................... 2-3
2-6 Installation Preparation ............................................................................................................... 2-4
2-7 Basic Vaporizer Panel Mechanical Installation ........................................................................... 2-4
2-8 Electrical Connections ................................................................................................................ 2-6
2-9 System Purging .......................................................................................................................... 2-7
2-10 Temperature Management of the Vaporizer Carrier Gas, Liquid Inlets, and Vapor Outlet .......... 2-7
2-11 Setting Up Temperature and Temperature Limit Controllers ...................................................... 2-8
2-11-1 Temperature Controller .............................................................................................................. 2-8
2-11-2 Temperature Limit Controller ...................................................................................................... 2-9
Section 3 Startup
3 Operation ................................................................................................................................... 3-1
3-1 Prior to Starting Up the DLI Vaporizer ........................................................................................ 3-1
3-2 Starting Up the DLI Vaporizer ..................................................................................................... 3-2
Section 4 Maintenance and Cleaning
4 Maintenance and Troubleshooting ............................................................................................. 4-1
4-1 Troubleshooting the DLI Vaporizer ............................................................................................. 4-1
4-2 General Troubleshooting Guide ................................................................................................. 4-1
4-3 Recommended Spare Parts ....................................................................................................... 4-3
4-4 Related Documentation .............................................................................................................. 4-3
4-5 DLI Vaporizer Removal .............................................................................................................. 4-3
4-6 DLI Vaporizer Packaging ............................................................................................................ 4-3
4-7 Return Shipment ........................................................................................................................ 4-4
Section A Essential Instructions .............................................................................................................A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover
Brooks ® DLI Vaporizer System
Contents
Page
Number
i