Brooks Instrument DLI Manual De Instalación Y Funcionamiento página 27

Installation and Operation Manual
X-VAP-DLI-Standard-eng
Part Number: 541B203AAG
May, 2016
12. Perform a dry carrier gas purge and monitor system pressure at:
• Atomizer inlet
• Vaporizer outlet (if pressure transducer is available)
• Process chamber
13. Optional – Perform moisture monitoring for sensitive process
precursors (for example, Silanes, Siloxanes, Metal Halides, TEMAHf,
TEMAZr, etc.).
14. Conduct a system base particle count.
15. Set the Temperature controller to the desired vaporization
temperature.
16. Set the Temperature Limit controller to the upper limit for the given
process fluid (normally 10 – 20°C above normal operating temperature).
Establish the carrier gas flow rate before the liquid process fluid is
introduced to the vaporizer. Allow the temperature to stabilize with carrier
gas flowing at the desired flow rate.
18. Establish carrier gas flow at the prescribed rate and or volume. Gas
can be diverted or bypassed from the vaporizer outlet to a vent/stack until
needed in the process chamber. Pressure in the vaporizer will be the result
of the system design and the sizing of the vaporizer exit orifice. Changing
the inlet pressure, outlet pressure, or maximum specified flow rates might
require a change in the size of the exit orifice. The gas pressure into the
MFC must be 2.2 X the vaporizer outlet pressure + 10 psig.
19. Ramp up the process (liquid flow rate) from zero to setpoint gradually
with the specified carrier gas flow and monitor system pressure at:
• Atomizer inlet
• Vaporizer outlet
• Process chamber
The diverter can be left open until full vapor flow is realized.
20. Monitor the Liquid MFC performance for:
• Flow stability
• Valve drive signal trend/stability to characterize system vapor flow, using
the Brooks Service Suite software tool.
21. When the result is satisfactory, the system is ready for vapor
deposition on test wafers or other substrates for evaluation of films
mechanical properties, optical, and electrical property measurement, and
particle count as needed to meet final product specifications.
Section 3 Startup
®
Brooks DLI Vaporizer System
1 7 .
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