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Turbo-V250
969-9007 series
969-9008 series
87-900-851-01(A)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Manuales relacionados para Varian 969-9008 serie
Resumen de contenidos para Varian 969-9008 serie
- Página 1 MANUALE DI ISTRUZIONI Turbo-V250 BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING 969-9007 series INSTRUKSTIONSBOG 969-9008 series BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-851-01(A) APRIL 2002...
- Página 2 Turbo-V 250...
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Página 5: Tabla De Contenido
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Página 6: Informazioni Generali
Le note contengono informazioni importanti estrapolate dal Le pompe turbomolecolari della serie Turbo-V 250 devono testo. essere utilizzate solo con uno degli appositi controllori Varian (serie 969-9423, 969-9504, 969-9523, 969-9425 e 969-9866) e IMMAGAZZINAMENTO devono essere collegate ad una pompa primaria (vedere schema in "Technical Information"). - Página 7 La turbopompa con flangia di ingresso ConFlat deve essere In caso di guasto è possibile usufruire del servizio di riparazione Varian o del "Varian advanced exchange service", fissata alla camera da vuoto per mezzo dell'apposita minuteria che permette di ottenere una pompa rigenerata in sostituzione meccanica Varian.
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Página 8: Vor Der Installation
Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen Mißachtung einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V 250 handelt es sich um Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. Sie eignen sich für jede Art von Gas oder gashaltige Gemische, nicht jedoch zur Förderung... - Página 9 Rotor vollkommen stillsteht. NM8-Gewinde Turbopumpen mit ConFlat-Eingangsflansch müssen mit dem Bei einem Defekt kann der Varian Service oder der " advanced speziellen Varian-Befestigungsmaterial an die Vakuumkammer exchange service" in Anspruch genommen werden. angeschlossen werden. Weitere Hinweise siehe Anhang “Technical Information”.
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Página 10: Preparation Pour L'installation
Varian, avant d'utiliser l'appareil. Varian décline par conséquent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations non autorisées ou d'un emploi contraire... - Página 11 "advanced exchange service", remplir et chambre à vide à l’aide des éléments mécaniques Varian faire parvenir au bureau local Varian la fiche "Sécurité et prévus à cet effet. Pour tout autre détail, se reporter à Santé" annexée à la présente notice d'instructions. Une copie l’appendice “Technical Information”.
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Página 12: Informacion General
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... -
Página 13: Utilizacion
En caso de avería se podrá utilizar el servicio de reparación cámara de vacío mediante los accesorios mecánicos Varian. Varian o el "Varian advanced exchange service", que permite Para más detalles véase el anexo “Technical Information”. obtener una bomba regenerada para sustituir la averiada. -
Página 14: Informações Gerais
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... -
Página 15: Manutenção
Em caso de defeito é possível usufruir do serviço de reparação à câmara de vácuo através de parafusos específicos da Varian ou do "Varian advanced exchange service", que permite mecânica Varian. Para maiores detalhes, ver o apêndice obter uma bomba regenerada que substitua a bomba com "Technical Information". -
Página 16: Installatie
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Página 17 In geval van storing is het mogelijk om de reparatiedienst van Zie “Technical Information” voor installatie van accessoires die Varian of de "Varian advanced exchange service" in te als optie verkrijgbaar zijn. schakelen: zo krijgt men een ruilpomp ter vervanging van de defecte pomp.
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Página 18: Almene Oplysninger
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Página 19 “Technical Information” for yderligere detaljer. Turbomolekulærpumperne i V 250 serien må kun anvendes ! ! ! ! med en af de særlige Varian kontrolapparater (serie 969-9423, PAS PÅ 969-9504, 969-9523, 969-9425 eller 969-9866) og skal Brug kun specialpumperne af Turbo - V 250 typen til pumpning forbindes med en primær pumpe (se skemaet i "Technical...
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Página 20: Förberedelser För Installationen
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Página 21 22 Nm med gänga M10 Om pumpen havererar, kontakta Varian reparationsverkstad Enkel klammer 11 Nm eller Varian utbytesservice, som kan ersätta pumpen med en med gänga M8 renoverad pump. Turbopumparna med intagsfläns ConFlat ska fästas till OBSERVERA vakuumkammaren med hjälp av Varian fästdelar. För detaljer Innan pumpen lämnas in till tillverkaren för reparation eller...
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Página 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Página 23 Se “Teknisk informasjon” for detaljer. VEDLIKEHOLD Turbo-V 250 serien turbo-molekulære pumper må kun brukes med en av de spesielle Varian kontrollere (969-9423, 969- Turbo-V 250 serien pumper er vedlikeholdsfrie. Alt arbeid på 9504, 969-9523, 969-9425 eller 969-9866), og må koples til pumpen må...
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Página 24: Yleisiä Tietoja
YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä,... - Página 25 Laakerit voivat Information”-liitteestä. vahingoittua. Sarjan V 250 turbomolekyylipumppuja tulee käyttää ainoastaan niihin sopivien varian valvojien kanssa (sarja 969-9423, 969- ! ! ! ! 9504, 969-9523, 969-9425 tai 969-9866) ja niiden täytyy olla HUOMIO yhdistettyinä pääpumppuun (katso kaaviota osasta "Technical Information").
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Página 26: Pdhgies Crhsews
£llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ÿ crÿsh pou den sumfwne∂... - Página 27 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj q£lamo kenoÚ m◊sw diplèn ÿ monèn m◊ggenwn. H akÒlouqh Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei th tamp◊la perigr£fei to apara∂thto noÚmero m◊ggenwn kai me poio zeÚgoj bidèmatoj na ta sf∂xete.
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Página 28: General Information
This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper... - Página 29 In the case of breakdown, contact your local Varian service FLANGE FIXING...
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Página 30: Technical Information
TECHNICAL INFORMATION DESCRIPTION OF THE TURBOPUMP During normal operation, the motor functions with a power feed at 58 Vac three-phase at 933 Hz. To The Turbo-V250 pump is available in two versions. reduce losses during start-up to a minimum, the The difference between the two versions lies frequency increases according to a ramp with a purely in the high vacuum connection. -
Página 31: Technical Specification
TECHNICAL INFORMATION TECHNICAL SPECIFICATION UPPER VIEW BOTTOM VIEW Pumping speed (l/s) : 250 l/s Operating ambient + 5° C to + 35° C He: 220 l/s temperature : 200 l/s Coolant water flow: 30 l/h (0.13 GPM) Compression ratio : 2 x 10 temperature: + 10°... - Página 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump 87-900-851-01(A)
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Página 33: Inlet Screen Installation
TECHNICAL INFORMATION INLET SCREEN INSTALLATION The inlet screens mod. 969-9302 prevents the Overall dimensions with the protection screen fit- blades of the pump from being damaged by debris ted on pump series 969-9007 (with ISO 100 greater than 0.7 mm diameter. flange). -
Página 34: Heater Band Installation
TECHNICAL INFORMATION HEATER BAND INSTALLATION Switch on the heater while the turbopump is in op- eration. If, for any reason, the turbopump body overheats, it will be automatically cut out by the thermistor sensor. NOTE The turbopump must be "baked" only when operating with an inlet pressure less than 10 mbar and with water cooling. -
Página 35: Water Cooling Kit Installation
TECHNICAL INFORMATION WATER COOLING KIT INSTALLATION Two 6 mm (1/4") internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles. NOTE These hoses must be held on the respective noz- zles using hose clips to avoid that the tube do not detach during operation. -
Página 36: Base Fixing Kit Installation
TECHNICAL INFORMATION BASE FIXING KIT INSTALLATION Fix the feet to the pump by tightening the previ- ously inserted grub screws with the Allen key. The kit mod. 969-9326 enables the pump to be fixed at the base. Open the package containing the feet and respec- tive screws. -
Página 37: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION Insert the respective washers and screws and tighten with a screwdriver. Connect the fan to the controller. SIDE MOUNTING Two fan kits are available for air cooling the pump, when natural air convenction is insufficient. Specification for small fan (mod. -
Página 38: Vent Valve Installation
TECHNICAL INFORMATION VENT VALVE INSTALLATION Screw the vent valve into the pump. Tighten the valve using a 10 mm hexagonal span- ner. CAUTION The vent valve mod. 969-9833 enables undesired Do not overtighten the valve as this may damage pump areation during a temporary power failure (5 the thread on the pump. -
Página 39: Vent Device Installation
TECHNICAL INFORMATION VENT DEVICE INSTALLATION Assemble the seal ring and lock the vent device in position using the KF klamp. VIBRATION ISOLATOR INSTALLATION The vent device mod. 969-9831 allows to avoid Vibration isolators for both ISO and CF version undesired pump aeration of the pump during a pumps are available as accessories. -
Página 40: Typical Layout Diagram
Vacuum chamber Ionization gauge For ConFlat flange connections we recommend Fore-vacuum pump connecting flange using Varian hardware. Oil mist eliminator To facilitate assembly and dismantling, apply Fel- 10. Fore-vacuum pump with internal one-way pro C-100 high temperature lubricant to the screw... -
Página 41: Connection B - Fore-Vacuum Pump
For a complete overview of Varian's extensive through an 6-pin connector. Pins B, C and D are product lines, please refer to the Varian catalog. the 3-phase supply to the motor, pins A and F are connected to the temperature sensor (NTC type, 30 KΩ... -
Página 42: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Página 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Página 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...