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Turbo-V 1000 ICE
E-series
Model 969-9128
87-900-942-01(A)
APRIL 2002
All manuals and user guides at all-guides.com
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Manuales relacionados para Varian E-series
Resumen de contenidos para Varian E-series
- Página 1 All manuals and user guides at all-guides.com MANUALE DI ISTRUZIONI Turbo-V 1000 ICE BEDIENUNGSHANDBUCH E-series NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING Model 969-9128 INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-942-01(A) APRIL 2002...
- Página 2 All manuals and user guides at all-guides.com Turbo-V 1000 ICE E-series...
- Página 3 All manuals and user guides at all-guides.com...
- Página 4 All manuals and user guides at all-guides.com...
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Página 5: Tabla De Contenido
All manuals and user guides at all-guides.com ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ...................... -
Página 6: Informazioni Generali
Le pompe della serie Turbo-V1000 ICE E-series sono pompe turbomolecolari per applicazioni di alto e ultra alto vuoto particolarmente adatte per l’uso nei settori legati all’industria dei semiconduttori, e sono capaci di pompare qualsiasi tipo di gas o di composto gassoso. - Página 7 Quando la pompa viene utilizzata per il pompaggio di gas controllori Varian (serie 969-9464 220V, 969-9564 120V) e tossici, infiammabili o radioattivi, seguire le appropriate devono essere collegate ad una pompa primaria (vedere procedure tipiche di ciascun gas.
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Página 8: Vor Der Installation
Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen Mißachtung einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V1000 ICE E-series handelt sich Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. Sie eignen sich insbesonders für... - Página 9 Pumpenghehäuse unter 50°C abgesunken ist. Wenn die Pumpen über ihr Unterteil installiert werden sollen, Bei einem Defekt kann der Varian Service oder der " advanced müssen in die Bohrungen des Unterteils 3 M6-Schrauben exchange service" in Anspruch genommen werden.
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Página 10: Indications Generales
Les pompes de la série Turbo-V1000 ICE E-series sont des pompes turbomoléculaires conçues pour des applications de vide poussé et ultrapoussé, particulièrement adaptées à... - Página 11 "advanced exchange service", remplir et Toutes les instructions pour le fonctionnement correct de la faire parvenir au bureau local Varian la fiche "Sécurité et turbopompe sont contenues dans la notice de l'unité de Santé" annexée à la présente notice d'instructions. Une copie contrôle.
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Página 12: Informacion General
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... -
Página 13: Mantenimiento
4,5 Nm. En caso de avería se podrá utilizar el servicio de reparación Para instalar los accesorios opcionales, véase “Technical Varian o el "Varian advanced exchange service", que permite Information”. obtener una bomba regenerada para sustituir la averiada. -
Página 14: Instalação
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Página 15 Em caso de defeito é possível usufruir do serviço de reparação três parafusos M6 fixados aos furos específicos existentes na Varian ou do "Varian advanced exchange service", que permite base da bomba. Os parafusos utilizados devem possuir um obter uma bomba regenerada que substitua a bomba com...
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Página 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Página 17 ! ! ! ! series mogen alleen gebruikt worden in combinatie met een GEVAAR! van de speciale Varian controllers (serie 969-9464 220V, 969- Wanneer de pomp wordt gebruikt voor het pompen van 9564 120V) en moeten aangesloten zijn op een primaire pomp...
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Página 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Página 19 Turbomolekulærpumperne i V1000 ICE-E series serien må kun Når pumpen anvendes til pumpning af giftige, brandfarlige eller anvendes med en af de særlige Varian kontrolapparater (serie radioaktive gasser, skal de gældende forskrifter for den enkelte 969-9464 220 V, 969-9564 120V) og skal forbindes med en gastype strengt overholdes.
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Página 20: Bruksanvisning
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Página 21 Då pumpen används för pumpning av giftiga, lättantändliga Turbomolekylärpumparna i serien V1000 ICE-E series måste eller radioaktiva typ, bör man följa de särskilda anvisningarna användas med en särskild styrenhet från Varian (serie 969- för varje enskild gas. 9464 220V, 969-9564 120V), och anslutas till en förpump (se Använd ej pumpen i närheten av explosiva gaser.
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Página 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Página 23 Se “Teknisk informasjon” for detaljer. ADVARSEL! Turbo-V1000 ICE-E series serien turbo-molekulære pumper Når pumpen brukes for å pumpe giftige, brannfarlige eller må kun brukes med en av de spesielle Varian kontrollere (serie radioaktive gasser skal de relevante forskriftene for de enkelte 969-9464 220V,...
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Página 24: Yleisiä Tietoja
YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä,... - Página 25 VAARA! Sarjan V1000 ICE-E series turbomolekyylipumppuja tulee Jolloin pumppua käytetään myrkyllisten, tulenvaarallisten ja käyttää ainoastaan niihin sopivien varian valvojien kanssa radioaktiivisten kaasujen pumppaamiseen tulee seurata joka (sarja 969-9464 220V, 969-9564 120V) ja niiden täytyy olla kaasuun sopivaa menettelytapaa. Älkää käytä pumppua yhdistettyinä...
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Página 26: Pdhgies Crhsews
(to anètero 38000 s.a.l.), h opo∂a kine∂tai apÒ ◊na trifasikÒ hlektrikÒ mot◊r uyhlÿj apÒdoshj..Oi antl∂ej Turbo-V1000 ICE E-series den peri◊coun rupantikoÚj par£gontej, e∂nai kat£llhlej loipÒn kai gia efarmog◊j pou apaitoÚn ◊na økaqarÒø kenÒ. - Página 27 SUNTHRHSH antl∂a (bl◊pe scÿma stij øTecnik◊j Plhrofor∂ejø). H tourmpoantl∂a mpore∂ na egkatastaqe∂ se opoiadÿpote Oi antl∂ej thj kathgor∂aj Turbo-V1000 ICE E-series de q◊sh. Stereèste thn tourmpoantl∂a se staqerÿ q◊sh enènontaj crei£zontai kam∂a suntÿrhsh. Opoiadÿpote ep◊mbash pr◊pei th fl£ntza eisÒdou me m∂a staqerÿ kÒntrofl£ntza ikanÿ na na g∂netai apÒ...
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Página 28: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Página 29 The Turbo - V 1000 ICE-E series series pumps must only be When employing the pump for pumping toxic, flammable, or used with one of the special Varian controllers (series 969- radioactive gases, please follow the required procedures for 9464 220V, 969-9564 120V) and must be connected to a pri- each gas disposal.
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Página 30: Technical Information
Two thermistor sensors are mounted near the up- per and the lower bearings to prevent the pump The Turbo-V1000 ICE E-series pump consists of a from overheating. The thermistor sensors, the mo- high frequency motor driving a turbine fitted with 15 tor stator windings and the earth are connected to bladed stages. -
Página 31: Technical Specification
Start-up time < 4 minutes * According to standard DIN 28 428, the base Recommended Varian VSp 60; Varian VSr 90 pressure is that measured in a leak-free test dome, forepump 48 hours after the completion of test dome bake-... - Página 32 All manuals and user guides at all-guides.com TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of inlet pressure vs foreline pressure with fixed inlet flow (Ar) 87-900-942-01(A)
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Página 33: Inlet Screen Installation
All manuals and user guides at all-guides.com TECHNICAL INFORMATION Graph of inlet pressure vs foreline pressure with fixed inlet flow (N2) INLET SCREEN INSTALLATION The screen can be mounted on each pump model. The inlet screens mod. 969-9316 prevents the blades of the pump from being damaged by debris greater than 1.4 mm diameter. -
Página 34: Heating Jacket Installation
All manuals and user guides at all-guides.com TECHNICAL INFORMATION HEATING JACKET INSTALLATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9338 (metal- lic model), and 969-9348 (plastic model). - Página 35 All manuals and user guides at all-guides.com TECHNICAL INFORMATION The water cooling kit 969-9338 has to be con- nected to a 3/8" internal diameter flexible water line. The water cooling kit 969-9348 has to be con- nected to a 6x8 (internal diameter x external di- ameter) metric flexible water line.
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Página 36: Vent Device Installation
All manuals and user guides at all-guides.com TECHNICAL INFORMATION VENT DEVICE INSTALLATION VENT VALVE INSTALLATION The vent valve mod. 969-9833 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an automatic vent operation. -
Página 37: Solid State Flowmeter Installation
CAUTION To prevent bearing damage, the integrated purge valve is foreseen for a gas flow rate of 20 sccm (0.34 mbar l/s). Please contact Varian for specific SOLID STATE FLOWMETER INSTALLATION applications. A gas purge valve is integrated to protect the pump... -
Página 38: Typical Layout Diagram
All manuals and user guides at all-guides.com TECHNICAL INFORMATION TYPICAL LAYOUT DIAGRAM Turbo-V controller 13. Turbopump Vent valve 14. Flexible connection Vacuum pump shut-off valve (optional) 15. Solid state flowmeter System vent valve (optional) Vacuum chamber Ionisation gauge Fore-vacuum pump connecting flange Oil mist eliminator Fore-vacuum pump with internal one-way valve... -
Página 39: Connection A - High Vacuum Flange
All manuals and user guides at all-guides.com TECHNICAL INFORMATION Then fix the two flanges with the clamps or claws Connection A - HIGH VACUUM FLANGE as shown in the figure. To connect the Turbo pump to the ISO inlet flange, remove the outer ring and position the centering ring as shown in the figure. -
Página 40: Suggested Pump Installation
The heater jacket working tempera- ture should be adjusted on the pump control unit (see controller manual for reference). Ask VARIAN for proper temperature setting. Heater jacket must be always on even during start-up and shutdown. -
Página 41: Pump Used In Presence Of Magnetic Fields
Varian's specialist. As a matter of fact, in case of high magnetic fields, also important forces might be generated and ap- For a complete overview of Varian's extensive plied to the rotor. product lines, please refer to the Varian catalog. 87-900-942-01(A) -
Página 42: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Página 43 All manuals and user guides at all-guides.com Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact...
- Página 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...