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Technical Information
IDP-3 Inlet Valve Kit
The IDP-3 scroll pump incorporates with an exhaust valve to prevent rapid leak-up
to atmosphere when turned off. However, any vacuum pump generates a small
increase in inlet line pressure when turned off. A small amount of gas or pump
debris can be carried back into a vacuum line or chamber when the pump is turned
off. To prevent this in applications where the process is sensitive to pump debris,
install a fast acting, automatic, normally closed valve. For your convenience, Agilent
offers an optional inlet valve and operator kit for the IDP-3 (see following figure).
Figure 22 IDP-3 with Inlet Valve
This kit includes upper and lower brackets, solenoid valve with wire harness,
centering O-ring, quick clamp, nuts and screws for installation, a cord clamp, and a
¼" flexible screw driver.
The opening of this valve occurs a minimum of 10 s after pump startup.
Valve closing occurs ≤25 ms after pump shut off.
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Agilent IDP-3 Dry Scroll Vacuum Pump User Manual
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