Technical Information
Installation
AC
Mount the valve body on the pump inlet with centering ring and quick clamp
provided in the pump package of IDP3A21 B21 or C21. Observe valve body
orientation, otherwise the valve will not function properly.
See following figure.
Figure 23 Mount Inlet Valve with IDP-3 Pump
If VPI16IDP100, VPI16IDP115, or VPI16IDP220 is purchased separately from the
NOTE
IDP-3 AC rev pump, follow the installation procedure in the IDP-3 inlet valve kit
instruction manual (PN# 699904370).
Agilent IDP-3 Dry Scroll Vacuum Pump User Manual
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