Tabla de contenido
Publicidad
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Pressure Sensitivity
± 0.03% per psi up to 200 psig (N
Maximum Operating Pressure
See Table 1-1 below:
Optional 4500 psig (300 bar) For 50,60 and 61 Series body only.
All devices pressure tested without fittings.
Pressure Equipment Directive (PED) 97/23/EC
See Table 1-1:
Table 1-1 Flow Ranges and Pressure Ratings
Mass Flow Mass Flow
Controller
Meter
Model:
Model:
Min. f.s.
(1)
SLA5850
0.003
SLA5860
0.003
SLA5861
(1)
20
SLA5851
100
SLA5863
SLA5853
(2)
(1) 300 bar (4500 psi) version optional.
(2) Max. Delta P for 5853 is 20 bar (300 psi).
(3) 70 bar / 1000 psi for UL Certification.
Pressure Differential Range (Controllers)
Minimum:
Model SLA5850
5 psi (0.35 bar) up to 50 lpm (N
Model SLA5851
10 psi (0.69 bar) from 30 lpm to 100 lpm (N
Model SLA5853
7.5 psi (0.52 bar) at 500 lpm (N
14.5 psi (1.00 bar) at 1000 lpm (N
35.0 psi (2.41 bar) at 2500 lpm (N
High DP valve 30 psi (2.07 bar) to 290 psi (20 bar max.)
Low DP valve 7.5 psi (0.52 bar) to 30 psi (2.07 bar max.)
Minimum pressure drop depends on gas and FS flow rate (consult factory)
Leak Integrity
Inboard to Outboard: 1x10
Helium leak test performed without fittings.
Ambient Temperature Limits
Operating: 0°C to 65°C (32°F to 149°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)
Fluid Temperature Limits
0°C to 65°C (32°F to 149°F)
Section 1 Introduction
®
Brooks
Digital MFC's & MFM's
eq.)
2
Flow Ranges
Pressure
N
Eq.Ratings
Unit
2
Max. f.s.
Bar/psi
50
lpm
100bar/1500 psi
300bar/4500 psi
50
slpm
100bar/1500 psi
100
lpm
2500
lpm
70 bar/1000 psi
eq.)
2
eq.)
2
eq.)
2
eq.)
2
eq.)
2
-9
atm scc/sec Helium max.
PED Module H Category
SEP
SEP
(3)
SEP
1 for all 150 lbs flanges
2 for all other
connections
1-3
Publicidad
Tabla de contenido
