In-Line Filter; Installation - Brooks Instrument SLA5850 Manual De Instalación Y Funcionamiento

Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013

2-8 In-Line Filter

2-9 Installation

Unless an integrated (internal) filter is already installed, it is recommended
that an in-line filter be installed upstream from the mass flow controller or
meter to prevent the possibility of any foreign material entering the flow
sensor or control valve MFC. The filtering element should be replaced
periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
Models Maximum Flow Rate
SLA5850/60
SLA5850/60
SLA5850/60
SLA5850/60
SLA5851/61
SLA5853/63
Note: Brooks provides many filter options. For those not listed here, please contact factory.
Recommended installation procedures:
a. The Brooks Digital MFC or MFM should be located in a clean,
dry atmosphere relatively free from shock and vibration.
b. Leave sufficient room for access to Self-zero function push-button.
c. Install in such a manner that permits easy removal if the instrument
requires servicing.
d. The Brooks Digital MFC or MFM can be installed in any position.
However, mounting in orientations other than the original factory
calibration(see calibration data sheet supplied with the instrument) can
result in a<±0.2% maximum full scale shift after re-zeroing.
Section 2 Installation
®
Brooks Digital MFC's & MFM's
100 ccm
500 ccm
1 to 5 lpm
10 to 100 lpm
10 to 30 lpm
> 100 lpm
Recommended Filter
2 micron
2 micron
10 micron
40 micron
40 micron
Consult factory
2-3