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Section 4 Maintenance &
Troubleshooting
Brooks
®
Digital MFC's & MFM's
Table 4-1 Sensor Troubleshooting
SENSOR
SCHEMATIC
Remove the sensor connector from the PC Board for this procedure.
OHMMETER CONNECTION
Pin 1 or 4 to meter body
Pin 4 to Pin 2
Pin 4 to Pin 3
Pin 5 to Pin 1
Pin 6 to Pin 7
4-1-2 System Checks
4-4
PIN
NO.
FUNCTION
1
Heater
Upstream
2
Temperature
Sensor (Su)
Downstream
3
Temperature
Sensor (Sd)
4
Sensor Common
5
Heater Common
6
Thermistor
7
Thermistor
RESULT IF ELECTRICALLY FUNCTIONAL
Open circuit on ohmmeter. If either heater (1) or
sensor common (4) are shorted, an ohmmeter
reading will be obtained.
Nominal 1100 ohms reading, depending on
temperature and ohmmeter current.
Nominal 1000 ohm reading.
Nominal 580 ohm reading.
The Brooks Digital Series Flowmeters and Controllers are generally used
as a component in gas handling systems, which can be complex in nature.
It can therefore be very difficult to isolate a malfunction in the system. An
inaccurately diagnosed malfunction can cause many hours of unnecessary
downtime. If possible, perform the following system checks before
removing a suspect Mass Flow Meter or Controller for bench
troubleshooting or return to the factory. (especially if the system is new):
1. Verify a low resistance common connection and that the correct power
supply voltage and signals are present of the connector of the Smart
TMF.
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
Flex Circuit Wire Numbers
April, 2013
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