Varian TV 301 Manual De Instrucciones página 29

The turbopump with ISO inlet flange must be fixed to the vacuum
chamber by means of clamps or claws. The following table shows,
for each flange and fixing device, the necessary number of clamps
or claws and the relevant fixing torque.
FLANGE FIXING
DEVICE
ISO 100 M10 clamps
M8 claws
ISO 160 M10 clamps
M10 claws
The turbopump with ConFlat inlet flange must be fixed to the vac-
uum chamber by means of the appropriate Varian hardware. See
the appendix "Technical Information" for a detailed description.
NOTE
The TV 301 Navigator cannot be fixed by means of its base.
!
CAUTION
The TV 301 Navigator belongs to the second installation (or over-
voltage) category as per directive EN 61010-1. Connect the device
to a mains line that satisfy the above category.
The TV 301 Navigator has Input/Output and serial communication
connectors that must be connected to external circuits in such a
way that no electrical part is accessible.
Be sure that the insulation of the device connected to the TV 301
Navigator is adequate even in the case of single fault as per direc-
tive EN 61010-1.
For installation of optional accessories, see "Technical Informa-
tion".
USE
This paragraph details the fundamental operating procedures.
Make all electrical an pneumatic connections before the use of the sys-
tem.
While heating the vacuum chamber, the temperature of the inlet flange
must not exceed 120 °C.
!
WARNING!
Never use the turbopump when the inlet flange is not connected to
the vacuum chamber or is not blanked.
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
!
CAUTION
Avoid impacts, oscillations or harsh movements of the pump when
in operation. The bearings may become damaged.
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
For pumping aggressive gases, these pumps are fitted with a special
port to allow a steady flow of inert gas (like N
protection (see the appendix "Technical Information").
!
WARNING!
When employing the pump for pumping toxic, flammable, or ra-
dioactive gases, please follow the required procedures for each
gas disposal.
Do not use the pump in presence of explosive gases.
All manuals and user guides at all-guides.com
N. FIXING TORQUE
4 22 Nm
8 11 Nm
4 22 Nm
8 22 Nm
, Ar) for pump bearing
2
24
INSTRUCTION MANUAL
Switching on and Use of TV 301 Navigator
To switch on the TV 301 Navigator it is necessary to supply the
mains. The integrated controller automatically recognizes the
interlock and start signals presence and start up the pump.
The first pump start up is in "Soft Start" mode. When the start up
cycle is finished, the "Soft Start" mode automatically is disabled,
and the following start ups are without the "Soft Start" mode. To
re-enable the "Soft Start" mode it must be activated by the suitable
software command (see the paragraph "RS 232/485 COMMUNI-
CATION DESCRIPTION" in the appendix "Technical Informa-
tion").
The green LED located on the TV 301 Navigator base front panel
indicates with its flashing frequency the system operating condi-
tions:
•
with no flashing: the pump is normally rotating;
•
slowly flashing (period of about 400 ms): the system is in ramp, or
in braking, or in Stop, or in "Waiting for interlock" status;
•
fast flashing (period of about 200 ms): error condition.
TV 301 Navigator Switching off
To switch off the TV 301 Navigator it is necessary to remove the
mains. The integrated controller immediately stops the pump.
Emergency Stop
To immediately stop the TV 301 Navigator in an emergency condi-
tion it is necessary to remove the supply cable from the mains
plug.
MAINTENANCE
The TV 301 Navigator does not require any maintenance. Any
work performed on the system must be carried out by authorized
personnel.
!
WARNING!
Before carrying out any work on the system, disconnect it from the
mains, vent the pump by opening the appropriate valve, wait until
the rotor has stopped turning and wait until the surface tempera-
ture of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service center
who can supply a reconditioned system to replace that broken
down.
NOTE
Before returning the system to the constructor for repairs, or re-
placement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the system package before shipping.
If a system is to be scrapped, it must be disposed of in accor-
dance with the specific national standards.
87-900-946-01(B)