Controller Description; Technical Specification - Varian TV 301 Manual De Instrucciones

The pump can be water cooled or air cooled: in
the first case the customer can use the dedicated
channels on the pump body, in the second case
an external optional fan is available.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating.
The pump is balanced after assembly with a re-
sidual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange. The con-
nection of the forevacuum on the side of the pump
is a KF 16 NW flange (KF25 – optional).
PUMP
CONNECTOR
CONTROLLER

Controller Description

The dedicated controller is a solid-state frequency
converter which is driven by a single chip micro-
computer and is composed of two PCBs which in-
clude power supply and 3-phase output, analog
and input/output section, microprocessor and digi-
tal section.
The power supply, together with the 3-phase out-
put, converts the single phase AC mains supply
into a 3-phase, low voltage, medium frequency
output which is required to power the pump.
The controller can be operated by a remote host
computer via the serial connection. A Windows-
based software is available (optional).

TECHNICAL SPECIFICATION

Pumping speed With CFF 8" or
ISO 160:
N : 280 l/s
2
He: 230 l/s
H : 210 l/s
2
Compression ratio
Base pressure * mechanical:
(with recommended < 2 x 10
forepump) diaphragm:
-8
2 x 10
Inlet flange CFF 8" O.D.
CFF 6" O.D.
Foreline flange KF16 NW (KF25 – optional)
Rotational speed 56000 RPM
All manuals and user guides at all-guides.com
CABLE
With CFF 6" or
ISO 100:
N : 250 l/s
2
He: 220 l/s
H : 200 l/s
2
8
N : >2 x 10
2
5
He: 1 x 10
4
H : 2 x 10
2
-10 -10
mbar (< 1.5 x 10 Torr)
-8
mbar (1.5 x 10 Torr)
ISO 160
ISO 100
26
TECHNICAL INFORMATION
Start-up time < 3 minutes
Recommended mechanical: Varian SD 300
forepump diaphragm: Varian MD 60
Operating position any
Cooling Natural air convection
requirements Forced air or water optional
Operating ambient + 5° C to + 35° C
temperature
Coolant water flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
Bakeout temperature 120° C at inlet flange max. (CF flange)
80° C at inlet flange max. (ISO flange)
< 0.01 µm at inlet flange
Vibration level
(displacement)
≤ 45 dB (A) at 1 meter
Noise level
Pwr supply (mains):
Input voltage: 100 - 240 Vac
Input freq.: 50 - 60 Hz
Max input pwr: 300 VA
Stand-by pwr: 10 W
Max oper. power: 150 W with water or air cooling
Protection fuse 4 A
Pwr supply (24 Vdc):
Input voltage: 24 Vdc
Max input pwr: 200 W
Stand-by pwr: 10 W
Max oper. power: 150 W with water or air cooling
Protection fuse 8 A
Compliance with: UNI EN 292-1
UNI EN 292-2
EN-CENELEC 55011
IEC 1000-4-2 (ex 801-2)
IEC 1000-4-3 (ex 801-3)
IEC 1000-4-4 (ex 801-4)
EN 61010-1 (IEC 1010-1)
EN 1012-2
Power cable With European or NEMA plug
3 meters long (optional)
Serial communication RS232 cable with a 9-pin D type male
(Navigator kit) connector and a 9-pin D type female
connector, and Navigator software
(optional)
Storage temperature -20° C to +70° C
Input 75 Vac, three phase, 963 Hz
Lubricant permanent lubrication
Installation category II
Pollution degree 2
Storage temperature - 20° C to + 70° C
Weight kg (lbs):
Kit: ISO 100 and 160: 4.5 (10)
CFF 6" and 8": 8 (17.6)
Controller: 1 (2.2)
* (According to standard DIN 28 428, the base pressure is that
measured in a leak-free test dome, 48 hours after the completion
of test dome bake-out, with a Turbopump fitted with a ConFlat
flange and using the recommended pre-vacuum pump)
87-900-946-01(B)