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Turbo-V 70
Controller
Model 969-9507
87-900-869-01 (B)
APRIL 2002
vacuum technologies
MANUALE ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE ISTRUÇÕES
BEDRIJFSHANDLEIDING
ISTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
Ο∆ΗΓΙΕΣ ΧΡΗΣΕΩΣ
INSTRUCTION MANUAL

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  • Página 1 vacuum technologies MANUALE ISTRUZIONI Turbo-V 70 BEDIENUNGSHANDBUCH Controller NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES Model 969-9507 MANUAL DE ISTRUÇÕES BEDRIJFSHANDLEIDING ISTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA Ο∆ΗΓΙΕΣ ΧΡΗΣΕΩΣ INSTRUCTION MANUAL 87-900-869-01 (B) APRIL 2002...
  • Página 2 Turbo-V 70 Controller...
  • Página 5: Tabla De Contenido

    ISTRUZIONI PER L’USO ....................GEBRAUCHSANLEITUNG ................... MODE D’EMPLOI......................ISTRUCCIONES DE USO .................... ISTRUÇÕES PARA O USO ..................GEBRUIKSAANWIJZINGEN..................BRUGSANVISNING...................... BRUKSANVISNING ...................... BRUKERVEILEDNING....................KÄYTTÖOHJEET......................ODHGIES CRHSEWS...................... INSTRUCTIONS FOR USE ..................TECHNICAL INFORMATION..................TURBO-V 70 CONTROLLER DESCRIPTION ................CONTROLLER SPECIFICATIONS ....................CONTROLLER OUTLINE........................ Line Voltage Change Over ....................
  • Página 6 USE ..............................General..........................Startup........................... FRONT / REMOTE / 232 Selection..................Monitor Relay Programming....................Reset Command ........................Operating the Pump ......................Low Speed Operation......................Pump Shutdown ........................Power Failure ........................Remote Control Mode Operation ..................RS 232 Control Mode Operation ................... ERROR MESSAGES........................
  • Página 7: Istruzioni Per L'uso

    Imballo del controller 969-9507 Informazioni dettagliate sono fornite nell'appendice "Technical Information". Ogni controller giunge dalla Varian predisposto per una certa tensione di alimentazione: Questo manuale utilizza le seguenti convenzioni: • il modello 969-9507 per 120 Vac...
  • Página 8 Il controller modello 969-9507 non è fornito del cavo di sia stabile. Non far funzionare mai la pompa se la flangia di alimentazione, che può essere richiesto alla Varian come ingresso non è collegata al sistema o non è chiusa con la accessorio;...
  • Página 9 ISTRUZIONI PER L’USO Pannello sinistro Pannello destro 1. Connettore di ingresso dei segnali logici (il connettore di accoppiamento viene fornito con l’apposito ponticello di richiusura). 2. Connettore di uscita dei segnali logici e di verifica della corrente della pompa. 3. Connettore di uscita di potenza (24 Vcc per il ventilatore di raffreddamento pompa). 4.
  • Página 10 ISTRUZIONI PER L’USO In caso di guasto è possibile usufruire del servizio di MESSAGGI DI ERRORE riparazione Varian o del "Varian advance exchange In alcuni casi di guasto la circuiteria di autodiagnosi del service", che permette di ottenere un controller controller presenta alcuni messaggi di errore elencati rigenerato in sostituzione di quello guasto.
  • Página 11: Gebrauchsanleitung

    Eingriffen und Mißachtung der einheimischen, hier zur Verpackungsmaterial muß korrekt entsorgt Geltung kommenden Bestimmungen übernimmt die werden. Es ist vollständig recyclebar und entspricht der Firma Varian keinerlei Haftung. EG-Richtlinie 85/399 für Umweltschutz. Controller Serie Turbo-V sind mikroprozessorgesteuerte Frequenzwandler. Sie sind mit Festkörperbauteilen gefertigt und verfügen über ein...
  • Página 12 Stand geachtet werden, da sonst die Gefahr von Das Controller-Modell 969-9507 wird ohne Netzkabel Personen- und Geräteschäden besteht. Die Pumpe nie geliefert. Es kann bei der Firma Varian als lieferbares einschalten, wenn der Eingangsflansch nicht am System Zubehör bestellt werden. Für weitere Hinweise siehe angeschlossen bzw.
  • Página 13 GEBRAUCHSANLEITUNG Linke Tafel Rechte Tafel 1. Eingangsverbinder der logischen Signale (der Kupplungsverbinder wird mit einer Wiederverschließbrücke geliefert). 2. Ausgangsverbinder der logischen und Pumpenstromkontrollsignale. 3. Leistungsausgangsverbinder (24 VGs für den Pumpen-kühlventilator). 4. Steckverbinder für den Anschluß des Pumpenkabels. 5. Versorgungseingangsmodul für den Controller. Umfaßt die Schutzsicherung, den Spannungswandler, die Leistungsanschlußbuchse und den EMC-Filter.
  • Página 14 GEBRAUCHSANLEITUNG Bei einem Defekt kann der Varian-Reparaturdienst FEHLERMELDUNGEN bzw. der "Varian advanced exchange service" in In einigen Störungsfällen zeigt das Selbstdiagnosessystem Anspruch genommen werden, der für die Erneuerung Controllers nachstehenden Tabelle defekter Controller sorgt. zusammengefaßten Meldungen an. ANMERKUNG GEFAHR! Beim...
  • Página 15: Mode D'emploi

    Varian, avant transport, contacter aussitôt le bureau de vente local. l'utilisation de l'appareil. Varian décline par conséquent Pendant l'opération d'ouverture de l'emballage, veiller toute responsabilité en cas d'inobservation totale ou tout particulièrement à...
  • Página 16 Le contrôleur modèle 969-9507 n'est pas doté du câble s'assurer que ce dernier est stable. Ne jamais faire d'alimentation qui peut être demandé à Varian comme fonctionner la pompe si la bride d'entrée n'est pas accessoire; pour tous autres détails, se reporter au connectée au système ou n'est pas fermée à...
  • Página 17 MODE D'EMPLOI Tableau gauche Tableau droit 1. Connecteur d'entrée des signaux logiques (le connecteur d'enclenchement est doté de la barrette de réenclenchement spéciale). 2. Connecteur de sortie des signaux logiques et de vérification du courant de la pompe. 3. Connecteur de sortie de puissance (24 Vcc pour le ventilateur de refroidissement de la pompe). 4.
  • Página 18 MODE D'EMPLOI En cas de panne, il est possible de s'adresser au MESSAGES D'ERREUR Service de réparation Varian ou bien au "Varian Dans certains cas de panne, l'ensemble de circuits advance exchange service" qui permet d'obtenir un d'autodiagnostic du contrôleur présente certains messages contrôler régénéré...
  • Página 19: Istrucciones De Uso

    Varian antes de utilizar el equipo. Varian se ponerse en contacto con la oficina de venta más considera libre de cualquier responsabilidad debida al cercana.
  • Página 20 NOTA El controler modelo 969-9507 se suministra sin cable de conexión a la bomba. El cable puede solicitarse como accesorio a Varian; para más detalles consultar el apartado “Accessories and spare parts” del anexo “Technical Information”. Éste va conectado por un lado al conector J16 del controler y por el otro al conector específico de la bomba.
  • Página 21 INSTRUCCIONES DE USO Panel izquierdo Panel derecho 1. Conector de entrada de las señales lógicas (el conector de acoplamiento se suministra con el conector puente específico de cierre). 2. Conector de salida de las señales lógicas y de comprobación de la corriente de la bomba. 3.
  • Página 22 INSTRUCCIONES DE USO En caso de avería es posible utilizar el servicio de MENSAJES DE ERROR reparación Varian o del “Varian advance exchange algunos casos avería circuitos service”, que permite obtener un controler regenerado autodiagnosis del controler presenta algunos mensajes en vez del averiado.
  • Página 23: Istruções Para O Uso

    Varian antes de utilizar a aparelhagem. A Varian não contacto com o escritório de vendas local. se responsabiliza pela inobservância total ou parcial das Durante a retirada da embalagem, tomar muito cuidado instruções, pelo uso indevido por parte de pessoas não...
  • Página 24 O controller modelo 969-9507 não é fornecido com o esteja estável. Nunca activar a bomba se o flange de cabo de alimentação, que pode ser solicitado à Varian entrada não está ligado ao sistema ou não está como acessório; para maiores detalhes consultar o fechado com o flange de fecho.
  • Página 25 INSTRUÇÕES PARA O USO Painel esquerdo Painel direito 1. Conector de entrada dos sinais lógicos (o conector de acoplamento é fornecido com ponte específica de fecho). 2. Conector de saída dos sinais lógicos e de verificao da corrente da bomba. 3.
  • Página 26 INSTRUÇÕES PARA O USO Em caso de defeito é possível utilizar o serviço de MENSAGENS DE ERRO reparação Varian ou o "Varian advanced exchange Em alguns casos de defeitos, os circuitos de service", que permite obter um controller regenerado autodiagnóstico do controller apresentam mensagens que substitua o controller com defeito.
  • Página 27: Gebruiksaanwijzingen

    Varian verstrekte informatie door te geconstateerd die tijdens het transport veroorzaakt zou lezen alvorens het apparaat in gebruik te nemen. Varian kunnen zijn, meteen contact opnemen met het acht zich niet aansprakelijk voor de gevolgen van het niet plaatselijke verkoopkantoor.
  • Página 28 969-9507 niet aan het apparaat te voorkomen. Laat de pomp nooit voedingskabel voorzien, welke als accessoire bij Varian werken zonder dat de ingangsflens aan het systeem is kan worden besteld; raadpleeg voor meer informatie de gekoppeld of de afsluitflens is gesloten.
  • Página 29 GEBRUIKSAANWIJZINGEN Linker paneel Rechter paneel 1. Connector voor ingang logische signalen (de te koppelen connector wordt met de speciale sluitklem geleverd). 2. Connector voor uitgang logische signalen en controle pompstroom. 3. Connector voor stroomuitgang (24 Vdc voor de koelventilator van de pomp). 4.
  • Página 30 GEBRUIKSAANWIJZINGEN In geval van storing is het mogelijk om de reparatiedienst FOUTMELDINGEN van Varian of de "Varian advanced exchange service" in In geval van storingen wekt het zelfdiagnose-circuit van te schakelen: zo krijgt men een ruilcontroller ter de controller enkele foutmeldingen op die in de vervanging van de defecte controller.
  • Página 31: Brugsanvisning

    Varian, før udstyret emballagen viser tegn på skader, der kan være opstået anvendes. Varian tager ikke ansvar for skader helt eller under transporten. Sørg for at styreenheden ikke tabes delvis følge tilsidesættelse disse eller udsættes for stød ved udpakningen. Smid ikke...
  • Página 32 Dette er for at forebygge skader på apparatet Styreenheden model 969-9507 leveres uden og personer. Start aldrig pumpen, hvis pumpetilløbet strømkabel, der kan bestilles hos Varian som tilbehør. ikke er tilsluttet systemet eller er blokeret. yderligere information henvises afsnittet "Accessories and Spare Parts" i bilag "Technical Information".
  • Página 33 BRUGSANVISNING Venstre panel Højre panel 1. Indgangskontakt til logiske signaler (tilslutningskontakten leveres med specielt forbindelsesbro). 2. Udgangskontakten til logiske signaler og kontrol af pumpens str ø 3. Udgangskontakt til effekt (24 V jævnstr ø ø m til pumpens k leventilator). 4.
  • Página 34 Tryk to gange på START-knappen for at starte OVERVOLTAGE fødespænding eller styreenheden har fået et pumpen igen. falsk signal. Hvis meddelelsen kommer igen tag kontakt med Varian for nødvendig vedligeholdelse. CONTROLLER FAILURE Afbrydelse sikring sekundært Ret henvendelse til Varian vedrørende effektkredsløb.
  • Página 35: Bruksanvisning

    Varian före användning emballaget visar tecken på skador som kan ha uppstått utrustningen. Varian tar inget ansvar för skador som helt under transporten. eller delvis orsakats av åsidosättande av instruktionerna, Se till att styrenheten inte tappas eller utsätts för stötar olämplig användning av person utan tillräcklig kunskap,...
  • Página 36 Styrenheten modell 969-9507 levereras utan strömkabel, apparaten och personer. Sätt aldrig igång pumpen, om som dock kan beställas från Varian som tillbehör. För intagsflänsen varken är kopplad till systemet eller är ytterligare information hänvisas till avsnittet "Accessories blockerad på...
  • Página 37 BRUKSANVISNING Vänster panel Höger panel 1. Ingångskontakt för logiska signaler (anslutningskontakten levereras med speciell stängningsbrygga). 2. Utgångskontakt för logiska signaler och kontroll av pumpens ström. 3. Utgångskontakt för effekt (24 V likström för pumpens kylfläkt). 4. Kopplingsdon för anslutning av pumpkabel. 5.
  • Página 38 BRUKSANVISNING styrenheten havererar, kontakta Varian FELMEDDELANDEN reparationsverkstad eller Varian utbytesservice, som kan När vissa fel uppstår visar styrenhetens självdiagnoskrets ersätta styrenheten med en renoverad styrenhet. aktuellt felmeddelande på displayen. möjliga meddelandena listas i följande tabell. VARNING! OBSERVERA Innan något arbete utförs på styrenheten måste dess På...
  • Página 39: Brukerveiledning

    Brukeren bør lese denne brukerveiledningen og all annen beskyttelsesemballasje. Viser denne tegn på skader informasjon fra Varian før utstyret tas i bruk. Varian kan som kan ha oppstått under transporten, må du ta ikke holdes ansvarlig for hendelser som skjer på grunn av kontakt med det lokale salgskontoret.
  • Página 40 Dette er viktig for å Styreenheten modell 969-9507 leveres uten strømkabel, forhindre skader på apparatet og på personer. Dersom men den kan bestilles fra Varian som ekstrautstyr. For inngangsflensen hverken er tilkoplet systemet eller ytterligere informasjon vises det til avsnittet "Accessories dersom den er blokkert av låseflensen må...
  • Página 41 BRUKERVEILEDNING Venstre panel Høyre panel 1. Inngangskontakt for logiske signaler (tilkoplingskontakten leveres med spesiell lukkebrygge). 2. Utgangskontakt for logiske signaler og kontroll av pumpens strøm. 3. Utgangskontakt for effekt (24 V likestrøm til pumpens kjølevifte). 4. Kontakt for tilkopling av pumpekabel. 5.
  • Página 42 Det har oppstått en feil i styreenhetens OVERVOLTAGE starte pumpen igjen. Vises feilmeldingen matedel, eller så har styreenheten fått et om igjen, må du ta kontakt med Varian for falskt signal. nødvendig vedlikehold. Avbrudd i sikringen til det sekundæra Kontakt Varian for vedlikehold.
  • Página 43: Käyttöohjeet

    Mikäli havaitsette mahdollisesti mukana seuraava käyttöohje sekä kaikki muut Varianin kuljetuksen aikana sattuneita vaurioita, ottakaa yhteys toimittamat lisätiedot. Varian ei vastaa seurauksista, jotka paikalliseen myyntitoimistoon. johtuvat laitteen käyttöohjeiden täydellisestä tai osittaisesta Pakkauksen purkamisen yhteydessä huolehtikaa, että laiminlyömisestä, ammattitaidottomien henkilöiden valvoja eipääse putoamaan ja välttäkää...
  • Página 44 KÄYTTÖOHJEET ASENNUS VAARA! VAARA! Mikäli pumppu on asetettu pöydälle, varmistakaa että se on vakaa. Näin vältytään vammoilta ihmisille sekä Valvojamallia 969-9507 ei toimiteta sähkökaapelin itse koneelle. Älkää myöskään käyttäkö pumppua, kanssa, mutta se voidaan pyytää lisävarusteena. mikäli sisääntulon laippaa ei ole kytketty järjestelmään Lähempiä...
  • Página 45 KÄYTTÖOHJEET Vasen paneli Oikea paneli 1. Logiikkasegnaalien tulokytkentä (pariliittimet toimitetaan niihin sopivilla yhdyskaapelisulkijalla). 2. Logiikkasegnaalien poistokytkentä ja pumpun sähkövirran tarkistus. 3. Tehon poistokytkentä (24 vaihtovirta pumpun jäähdytystuulettimelle). 4. Pumpun kaapelin kytkentäliitin. 5. Valvojan sähkövirran tulomoduuli. Käsittää suojasulakkeen, jännitteenmuuntajan, sähkövoiman pistorasian ja EMC suodattimen. 6.
  • Página 46 KÄYTTÖOHJEET Toimintahäiriön sattuessa on mahdollista käyttää VIANETSINTÄ Varianin korjauspalvelua tai "Varian advance exchange Joidenkin toimintahäiriöiden yhteydessä valvojan service" -palvelua, jolloin on mahdollista vaihtaa itsemäärittelypiiri analysoi virheen, joka näkyy rikkoontunut valvoja ladattuun valvojaan. viesteinä, jotka on kuvailtu seuraavassa taulukossa. HUOM VAARA! Valvontamallissa 969-9507 virheviestit näkyvät vain...
  • Página 47: Odhgies Crhsews

    Ç . H Varian den fev r ei kamiv a Katav th diav r keia tou anoiv g matoÇ thÇ suskeuasiv a Ç, dwv s te euquv n h ov s on aforav thn olikhv hv merikhv aqev t hsh twn idiaiv t erh prosochv ev t si wv s te na mhn pev s ei kai na mhn odhgiwv n , thn akatav l lhlh crhv s h ek mev r ouÇ...
  • Página 48 . perissov t ereÇ Varian leptomev r eieÇ sumbouleuteiv t e thn parav g rafo -Axesouav r kai antallaktikav - tou Pararthv m atoÇ -Tecnikev Ç Plhroforiv e Ç-. Aytov prev p ei na sundeqeiv apov th miv a pleurav sto buv s ma J16 tou ruqmisthv kai apov thn av l lh sto eidikov buv s ma thÇ...
  • Página 49 ODHGIES CRHSEWS Aristerov Ç piv n akaÇ Dexiov Ç piv n akaÇ 1. Buv s ma eisov d ou twv n logikwv n shmav t wn (to buv s ma zeugarwv m atoÇ promhqeuv e tai me to eidikov gefurav k i kleisiv m atoÇ).
  • Página 50 ODHGIES CRHSEWS Se periv p twsh blav b hÇ mporeiv t e na crhsimopoihv s ete thn MHNUMATA LAQOUS uphresiv a episkeuwv n thÇ Varian hv to "Varian advance orismev n eÇ periptwv s eiÇ blav b hÇ kuklwv m ata exchange service", pou saÇ...
  • Página 51: Instructions For Use

    If this shows signs of damage which may have other additional information supplied by Varian before occurred during transport, contact your local sales operating the equipment. Varian will not be held office. When unpacking the controller, ensure that it is responsible for any events occurring due to non- not dropped or subjected to any form of impact.
  • Página 52 INSTRUCTIONS FOR USE INSTALLATION WARNING! WARNING! To avoid injury to personnel and damage to the The controller model 969-9507 is not equipped with the power equipment, if the pump is laying on a table make sure it cord. It can be requested as an accessory; detailed information is steady.
  • Página 53 INSTRUCTIONS FOR USE Left Panel Right Panel 1. Logic input signals connectors (mating connector supplied with link). 2. Logic output signals connector and pump current monitor. 3. Power output connector (24 Vdc for pump cooling fan). 4. Connector to the pump cable. 5.
  • Página 54 INSTRUCTIONS FOR USE When a fault has occurred it is possible to use the ERROR MESSAGES Varian repair service. Replacement controllers are For a certain type of failure, the controller will self- available on an advance exchange basis through diagnose the error and the messages described in the Varian.
  • Página 55: Technical Information

    TECHNICAL INFORMATION power supply converts single phase TURBO-V 70 CONTROLLER DESCRIPTION (50-60 Hz) AC mains supply into a 3-phase, low The controller, factory set for 120 Vac, 50-60 Hz input voltage, medium frequency output which is required to voltage, is a solid-state frequency converter which is power the Turbo-V pump.
  • Página 56: Controller Specifications

    TECHNICAL INFORMATION CONTROLLER SPECIFICATIONS Radio interference EN 55011 class A group 1 Input: suppression EN 61010-1 Voltage 100, 120, 220, 240 Vac IEC1000-4-2, ±10%, 1000-4-3, 1000 4-4 1-phase Frequency Weight: 3.8 Kg (8.4 lbs) 47 to 63 Hz Power 350 VA maximum Output: CONTROLLER OUTLINE 54 Vac nominal ±10%,...
  • Página 57: Line Voltage Change Over

    TECHNICAL INFORMATION Inspect the controller for any shipping damage. POWER INTERCONNECTIONS The Turbo-V 70 controller model is 969-9507 is factory- Connection J7 - 120 Vac Connector set for 120 Vac operation. The 120 Vac, 1 A maximum (independent of line voltage) output voltage is present after START pushbutton is pressed and will remain present until a fault condition is displayed on the front panel display or...
  • Página 58: Connection P6 - 24 Vdc Connector

    TECHNICAL INFORMATION Connection P6 - 24 Vdc Connector DESCRIPTION The 24 Vdc, 100 mA maximum output voltage is present after START pushbutton is pressed and will Remote START/STOP optically isolated from remain present until a fault condition is displayed on the internal circuit, requires a permanently front panel display or the turbopump is stopped.
  • Página 59: Connection J2 - Logic Output Interconnections

    TECHNICAL INFORMATION Connection J2 - Logic Output Interconnections DESCRIPTION 7-14 R2 signal 24 V, 60 mA, optically isolated output (pin 14 positive, pin 7 negative). The output Voltage will be present upon the programmed condition delay YES or delay NO (see the cycle diagram in the following pages).
  • Página 60: Controller-To-Pump Connection

    The communication port mating connector is supplied with the RS 232 PCB (AMP/Cannon or equivalent 15- NOTE pin "D" type male connector). Varian cannot guarantee compliance with The external cable (not supplied) between the host regulations for radiated emissions unless all external computer and the controller doesn’t require any...
  • Página 61: Rs 232 Communication Descriptions

    TECHNICAL INFORMATION RS 232 Communication Descriptions CHARACTER ASCII CONVERTED ASCII Communication format: FOR CRC CALCULATION • 8 data bit "A" • no parity • 2 stop bit • "B" The baud rate is programmable via front panel from 600 to 9600 baud. The controller is factory-set for 9600 baud operation.
  • Página 62 Answer will contain a string of 11 characters with the following type: following parameters: BYTES MEANING "H" + ..data ..+ CRC Cycle time Pump life 9-10 Cycle number On request a sample program in QBasic language is available by Varian. 87-900-869-01 (B)
  • Página 63: Use

    TECHNICAL INFORMATION Startup • Plug the controller power cable into a suitable General power source. • Make all vacuum manifold and electrical connections and The display lights, and shows: refer to Turbo-V pump instruction manual before to operating the Turbo-V controller. R E A D Y F O R L O C A L...
  • Página 64: Front / Remote/ 232 Selection

    TECHNICAL INFORMATION X X X X C Y C L E X X X X X m NOTE P U M P X X X X X h After pressing the START push-button, if the P1 connector is not in place with the link or the external interlock connections are open, the display will be as shown in the following figure.
  • Página 65 TECHNICAL INFORMATION The display shows: NOTE The Soft Start mode may be deselected/selected only R S 2 3 2 H O S T P R I when the pump is stopped. S E L E C T I O N : X X X X X If necessary press CYCLE NUMBER to select YES or NO, then enter the selection by pressing the PUMP...
  • Página 66: Monitor Relay Programming

    TECHNICAL INFORMATION With connected, bidirectional Monitor Relay Programming communication is established by selecting HOST. Data • The display shows: are sent to an external computer every time the external computer asks for the values. S P E E D T H R E S H O L D The data available are: S E L E C T I O N : X X K R P M...
  • Página 67 TECHNICAL INFORMATION Cycle diagram When the last digit is entered, the display will be as where: shown in the following figure. XXX = YES or NO. D E L A Y E V E N A F T E R By pressing the CYCLE NUMBER push-button, select YES if relay R2 must operate only after the T H R E S H O L D :...
  • Página 68: Reset Command

    TECHNICAL INFORMATION • Reset Command Press the START push-button (or use the remote or RS 232 start signal), and the display shows: • The display shows: S O F T S T A R T P U M P X X X X X h R E S E T ? X X X where:...
  • Página 69: Operating The Pump

    TECHNICAL INFORMATION • Operating the Pump If the Soft Start mode has been deselected the display will change and shows: After the starting period, if the system has a vacuum leak or the pressure in the pump/chamber is high (from P U M P S T A R T 1 mbar to atmosphere), the pump continues to operate...
  • Página 70: Pump Shutdown

    TECHNICAL INFORMATION The pump reaches the Normal high speed, then When the low speed mode is deselected, the pump decrease the speed to the low speed value and the starts to accelerate to its rotational speed. display shows: The display shows: A P P R O A C H N O R M A L O P E R A T...
  • Página 71: Remote Control Mode Operation

    TECHNICAL INFORMATION Remote Control Mode Operation RS 232 Control Mode Operation If remote signals are used to operate the controller, it If the RS 232 option is installed and the controller has must be programmed for remote operation (see been programmed for RS 232 operation, the controller paragraph "FRONT/REMOTE/232 Selection")
  • Página 72: Error Messages

    TECHNICAL INFORMATION Verify that systems has no leaks than press STOP ERROR MESSAGES RESET pushbutton twice to start the pump. For a certain type of failure, the controller will self- diagnose the error and the following messages will be NOTE displayed if the hand-held terminal is connected.
  • Página 73: Controller Test

    − 54 Vdc ±10% between TP3(-) and TP5(+) − 24 Vdc ±15% on the fan connector. Since no operation can be carried out, contact VARIAN. b) AC three-phase output voltage test On the pump connector connect the DVM in turn between: pins B and C, B and D, C and D.
  • Página 74: Test With Dummy Load

    TECHNICAL INFORMATION − Disconnect the potentiometer, set it to 10 KΩ, and then reconnect it. Pump over-Temperature Test − Connect the power cable. − Disconnect the potentiometer, set it to 5KΩ, and − On the controller front panel push the START and then reconnect it.
  • Página 75: Accessories And Spare Parts

    TECHNICAL INFORMATION ACCESSORIES AND SPARE PARTS DESCRIPTION PART NUMBER J1 input mating connector 969-9853 P7 mating plug 969-9854 Mains cable (European plug, 3 m long) 03-660441-01 Mains cable (American plug, 120 V, 3 m long) 03-660441-02 OPTIONS DESCRIPTION PART NUMBER RS 232 kit 969-9851 P2 output mating connector...
  • Página 76 TECHNICAL INFORMATION 87-900-869-01 (B)
  • Página 77 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Página 78 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
  • Página 79 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...

Este manual también es adecuado para:

969-9507

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