2.3
Connect vacuum / inert gas with vessels / plenum
Vacuum- / inert gas tube couplings are screw- type as shown in Chapter 2.1.5.
Assignment of vessels to a particular plenum port is discretionary. However,we
recommend using as short as possible tube lengths, no matter on what level you are
working.
2.4
Connect vacuum- / inert gas to plenum ports
Vacuum- / inert gas fitting is designed for the 8/6 PTFE tube coming with the item.
Slip union ring over PTFE tube, install sealing ring, plug tube over nipple, pull union
ring tight.
clamp ring and
union ring
rear of item
sealing ring
union ring
vacuum / inert gas plenum
75
vacuum- / inert
gas nipple
PTFE vacuum
tube
E