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Turbo-V 70D
969-9361 series
969-9362 series
969-9363 series
969-9364 series
87-900-861-01(E)
MARCH 2003
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE DíEMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRU«'ES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKƒSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Manuales relacionados para Varian Turbo-V 70D 969-9361 serie
Resumen de contenidos para Varian Turbo-V 70D 969-9361 serie
- Página 1 MANUALE DI ISTRUZIONI Turbo-V 70D BEDIENUNGSHANDBUCH pumps NOTICE DE MODE DíEMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU«’ES BEDRIJFSHANDLEIDING 969-9361 series INSTRUKSTIONSBOG 969-9362 series BRUKSANVISNING 969-9363 series INSTRUKSJON MANUAL 969-9364 series OHJEKƒSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-861-01(E) MARCH 2003...
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Página 5: Tabla De Contenido
ISTRUZIONI PER LíUSO ....................1 GEBRAUCHSANLEITUNG....................3 MODE DíEMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRU«’ES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KƒYTT÷OHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Página 6: Istruzioni Per Líuso
Le pompe turbomolecolari della serie Turbo-V 70D devono essere Per garantire il massimo livello di funzionalit‡ ed affidabilit‡ delle utilizzate solo con uno degli appositi controllori Varian (serie 969-9405, pompe Turbomolecolari Varian, devono essere osservate le se- 969-9505, 969-9507e 969-9508) e devono essere collegate ad una guenti prescrizioni: pompa primaria (vedere schema in "Technical Information"). - Página 7 In caso di guasto Ë possibile usufruire del servizio di riparazione nica Varian. Per ulteriori dettagli vedere l'appendice "Technical Varian o del "Varian advanced exchange service", che permette di Information". ottenere una pompa rigenerata in sostituzione di quella guasta.
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Página 8: Gebrauchsanleitung
Beim Betrieb m¸ssen folgende Umgebungsbedingungen ein- gehalten werden: LAGERUNG − Maximaldruck: 2 Bar Um ein Hˆchstmafl an Effizienz und Zuverl‰ssigkeit der Varian − Temperatur: von +59C bis +359C Turbomolekularpumpen zu gew‰hrleisten, sind die folgenden − Relative Luftfeuchtigkeit: 0-95% (nicht kondensierend). - Página 9 Pumpengheh‰use unter 50[C abgesunken ist. Turbopumpen mit ConFlat-Eingangsflansch m¸ssen mit dem speziellen Varian-Befestigungsmaterial an die Vakuumkammer Bei einem Defekt kann der Varian Service oder der " advanced angeschlossen werden. Weitere Hinweise siehe Anhang ìTechni- exchange service" in Anspruch genommen werden.
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Página 10: Mode Díemploi
ÈlÈments devant Ítre exposÈs au vide. Mettre nie par Varian, avant d'utiliser l'appareil. Varian dÈcline par consÈ- toujours des gants ou toute autre protection appropriÈe. quent toute responsabilitÈ en cas d'inobservation totale ou partielle des instructions donnÈes, d'utilisation incorrecte de la part d'un... - Página 11 La turbopompe ‡ bride díentrÈe ConFiat doit Ítre fixÈe ‡ la cham- Avant de renvoyer au constructeur une pompe pour des rÈpara- bre ‡ vide ‡ líaide des ÈlÈments mÈcaniques Varian prÈvus ‡ cet tions ou un "advanced exchange service", remplir et faire parve- effet.
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Página 12: Instrucciones De Uso
Varian °ATENCION! antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las Para evitar la degasificaciÛn, no tocar con las manos sin guantes instrucciones, al uso poco apropiado por parte de personal sin los componentes destinados a someterse al vacÌo. - Página 13 En caso de averÌa se podr· utilizar el servicio de reparaciÛn rosca M8 Varian o el "Varian advanced exchange service", que permite obtener una bomba regenerada para sustituir la averiada. La turbobomba con brida de entrada ConFiat se fijar· a la c·mara de vacÌo mediante los accesorios mec·nicos Varian.
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Página 14: Instru«'Es Para O Uso
Para evitar problemas de perdas de g·s, n„o tocar com as m„os outra informaÁ„o adicional fornecida pela Varian antes de usar a os componentes destinados ‡ exposiÁ„o do v·cuo. Utilizar aparelhagem. - Página 15 Borne duplo com rosca 22 Nm Em caso de defeito È possÌvel usufruir do serviÁo de reparaÁ„o Varian ou do "Varian advanced exchange service", que permite Borne simples com rosca 11 Nm obter uma bomba regenerada que substitua a bomba com defeito.
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Página 16: Gebruiksaanwijzingen
EEG milieurichtlijn 85/399. gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet ATTENTIE! aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht... - Página 17 ConFlat inlaatflens moet Varian of de "Varian advanced exchange service" in te schakelen: vacu¸mkamer worden bevestigd met behulp van de speciale zo krijgt men een ruilpomp ter vervanging van de defecte pomp. mechanische bevestigingselementen van Varian. Zie voor meer informatie de bijlage ìTechnical Informationî.
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Página 18: Brugsanvisning
For at undg afgasningsproblemer skal man ikke r¯re med de Varian har leveret, inden udstyret tages i brug. Varian er ikke ans- bare hÊnder de dele, der vil bliver udsat for vakuum. Brug altid varlig, hvis vejledningen ikke er n¯je fulgt, eller hvis den kun er... - Página 19 Varian. For detaljer henvises til ìTeknisk informationî. stykker. For at fastspÊnde pumpen til fundamentet er det n¯dvendigt at anvende tre M4-skruer, som indsÊttes i hullerne pÂ...
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Página 20: Bruksanvisning
Utrustningen ‰r avsedd fˆr yrkesm‰ssig anv‰ndning. Anv‰ndaren VIKTIGT bˆr l‰sa denna bruksanvisning, samt ˆvrig dokumentation frÂn Varian fˆre anv‰ndning av utrustningen. Varian tar inget ansvar Komponenter som skall uts‰ttas fˆr vakuum fÂr inte hanteras med fˆr skador helt eller delvis till fˆljd av Âsidos‰ttande av bara h‰nder p g a kontamineringsrisken. - Página 21 22 Nm pumpens yttemperatur ‰r l‰gre ‰n 50dC. med g‰nga M10 Enkel klammer med 11 Nm Om pumpen havererar, kontakta Varian reparationsverkstad eller g‰nga M8 Varian utbytesservice, som kan ers‰tta pumpen med en renoverad pump. Turbopumparna med intagsfl‰ns ConFlat f‰stas till vakuumkammaren med hj‰lp av Varian f‰stdelar.
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Página 22: Brukerveiledning
Brukeren b¯r lese denne brukerveiledningen og all annen For  unng avgassingsproblemer, m ingen del som skal informasjon fra Varian f¯r utstyret tas i bruk. Varian kan ikke utsettes for vakuum hÂndteres med bare hendene. Bruk alltid holdes ansvarlig for hendelser som skjer p grunn av manglende hansker eller andre og passende verneutstyr. - Página 23 ConFlat skal festes p vakuumkammeret ved hjelp av de spesielle lÂsedelene fra Varian. For detaljer henvises det til ìTeknisk informasjonî. MERK For  feste pumpen til fundamentet er det n¯dvendig  bruke tre F¯r pumpen returneres til produsenten for reparasjon, eller som M4-skruer, som skrues fast i hullene pÂ...
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Página 24: Kƒytt÷Ohjeet
Jotta kaasun poistumisongelmilta v‰ltytt‰isiin, tyhjiˆˆn k‰yttˆohje sek‰ kaikki muu Varianin toimittama lis‰tieto. Varian ei tarkoitettuihin osiin tule koskea paljain k‰sin. Hanskojen tai muun ota vastuuta seurauksista, jotka johtuvat laitteen k‰yttˆohjeiden sopivan suojan k‰yttˆ on tarpeellinen. t‰ydest‰ tai osittaisesta laiminlyˆnnist‰, ammattitaidottoman henkilˆn... - Página 25 50f. Yksinkertainen 11 Nm kiinnike, kierteitys Laitteen vahingoittuessa mahdollista k‰ytt‰‰ Varianin korjauspalvelua tai "Varian advanced exchange service", joka mahdollistaa regeneroidun pumpun saamisen vahingoittuneen Torbopumppu ConFlat sia‰‰ntilolaipalla tulee kiinnitt‰‰ tilalle. tyhjiˆkammariin sopivien Varian mekaanisien varusteiden avulla. Lis‰tietoja lˆytyy ©Technical Information©-liittest‰. Pumppu tulee HUOMAUTUS kiinnitt‰‰...
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Página 26: Pdhgies Crhsews
£llh pr“ sqeth plhrofor∂a pou d∂nei h Varian, prin ap“ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kamm∂a euq⁄ nh “ son afor£ thn olikˇ ˇ merikˇ aq◊thsh odhgiËn, akat£llhlh... - Página 27 FLANTZA TUPOS MEGGENHS ZEUGOS Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj BIDWMATOS Varian ˇ sto ìVarian advanced exchange serviceî, pou saj d∂nei th ISO 63 22 Nm Diplˇ m◊ggenh el∂kwsh M10 dunat“ thta na antikatastˇsete thn calasm◊nh antl∂a me m∂a 11 Nm Monˇ...
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Página 28: Instructions For Use
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Página 29 50 KC. FLANGE FIXING FIXING TORQUE DEVICE In the case of breakdown, contact your local Varian service center ISO 63 M10 clamps 22 Nm who can supply a reconditioned pump to replace that broken...
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Página 30: Technical Information
TECHNICAL INFORMATION DESCRIPTION OF THE TURBOPUMP The turbine is made of high-strength, light alumin- ium alloy, and is machined from a single block of The Turbo-V70D pump is available in four ver- aluminium. The turbine blades have five different sions. The difference between the two versions angles, from 42°... -
Página 31: Technical Specification
Recommended fore- mechanical: Varian SD-40 sure is that measured in a leak-free test dome, 48 pump diaphragm: Varian MD 6 hours after the completion of test dome bake-out, Operating position with a Turbopump fitted with a ConFlat flange and using the recommended pre-vacuum pump. - Página 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump 87-900-861-01(E)
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Página 33: Inlet Screen Installation
TECHNICAL INFORMATION The screen can be mounted on either pump series INLET SCREEN INSTALLATION and is supplied with a small tab for easy removal (see figure). The inlet screens mod. 969-9300 and 969-9309 prevent the blades of the pump from being dam- aged by debris greater than 0.7 mm diameter. -
Página 34: Heater Band Installation
TECHNICAL INFORMATION Switch on the heater while the turbopump is in op- HEATER BAND INSTALLATION eration. If, for any reason, the turbopump body overheats, it will be automatically cut out by the thermistor sensor. NOTE The turbopump must be "baked" only when oper- ating with an inlet pressure less than 10 mbar and with water cooling. -
Página 35: Water Cooling Kit Installation
TECHNICAL INFORMATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (me- tallic model), and 969-9347 (plastic model). -
Página 36: Base Fixing Kit Installation
TECHNICAL INFORMATION BASE FIXING KIT INSTALLATION The kit mod. 969-9326 enables the pump to be fixed at the base. For the feet to the pump by tightening the previ- Open the package containing the feet and respec- ously inserted grub screws with the Allen key. tive screws. -
Página 37: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION SIDE MOUNTING A fan kit model 969-9310 is available for air cool- ing the pump, when natural air convection is insufficient. Fan specification: The fan can also be mounted under the pump as − air flow: 9 l/s (10 CFM) shown in the figure. -
Página 38: Vent Valve Installation
TECHNICAL INFORMATION VENT VALVE INSTALLATION The vent valve mod. 969-9833 enables undesired pump areation during a temporary power failure (5 sec maximum) to be avoided, and enables an automatic vent operation. Unscrew the threaded plug. VENT DEVICE INSTALLATION Screw the adapter (1) into the vent hole (2) of the pump. -
Página 39: Typical Layout Diagram
TECHNICAL INFORMATION Screw the flange mod. 969-9109 on the pump, TYPICAL LAYOUT DIAGRAM taking care of the o-ring right position. Assemble the seal ring and lock the vent device in position using the KF klamp. Turbo-V controller VIBRATION ISOLATOR INSTALLATION Vent valve A vibration damper model 969-9340 for ISO 63 inlet flange version pump is available as accesso-... -
Página 40: Connection A - High Vacuum Flange
TECHNICAL INFORMATION For ConFlat flange connections we recommend Connection A - HIGH VACUUM FLANGE using Varian hardware. To connect the Turbo-V70D pump to the ISO inlet flange, remove the outer ring and position the cen- To facilitate assembly and dismantling, apply Fel- tering ring as shown in the figure. -
Página 41: Connection B - Fore-Vacuum Pump
Base fixing kit 969-9326 For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. The turbopump is connected to the controller through an 6-pin connector. Pins B, C and D are the 3-phase supply to the motor, pins A and F are connected to the temperature sensor (NTC type, 30 KΩ... - Página 42 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Página 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Página 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...