Resumen de contenidos para Brooks Instrument VDM100 Serie
- Página 1 Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG ® Brooks VDM100 Vapor Delivery Module December, 2012 ® Brooks VDM100 Series Vapor Delivery Module Brooks ® VDM100 Vapor Delivery Module...
- Página 2 Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG ® Brooks VDM100 Vapor Delivery Module December, 2012...
- Página 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Página 4 Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG ® Brooks VDM100 Vapor Delivery Module December, 2012 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Página 5 Contents Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module Paragraph Page Number Number Section 1 Introduction Introduction ..........................1-1 Intended Use ..........................1-1 Product Identification Label ......................1-1 Product Description Code ......................1-2 VDM100 Front View ........................
- Página 6 Contents Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module Figure Page Number Number VDM100 Vapor Delivery Module ....................1-1 Product Identification Label ......................1-1 Front View of the VDM100 ......................1-3 Front View Details of the VDM100 ....................1-4 Bottom View of the VDM100 .......................
-
Página 7: Intended Use
Section 1 Introduction Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module 1.1 Introduction This user guide covers the Brooks Vapor Delivery Module (VDM100) Series shown in Figure 1-1. lncluded herein is a product description, installation instructions, operating instructions, instructions for utilizing the Brooks Graphical User lnterface (GUl), troubleshooting information, and product warranty information. - Página 8 Section 1 Introduction Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module 1.4 Product Description Code The following Product Description Code (PDC) identifies the VDM100 and its optional features. This code is used to order the product. Call your Brooks Customer Service Center if you need assistance.
- Página 9 Section 1 Introduction Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module 1.5 VDM100 Front View Figure 1-3 below shows the front view of the VDM100. Figure 1-3 Front View of the VDM100...
- Página 10 Section 1 Introduction Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module Figure 1-4 Front View Details of the VDM100 Figure 1-4 (above) shows a detailed view of the switches and indicators located on the front of the VDM100. The following is a description of each switch and indicator.
- Página 11 Section 1 Introduction Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module 1.6 VDM100 Bottom View Figure 1-5 is a diagram of the bottom view of the VDM100. The following is a description of the various connections and features: 1.
- Página 12 Section 1 Introduction Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module 3. Power Entry Module: The power entry module is used to connect AC power to the VDM100 tank heaters. See Section 1.7 VDM100 lnternal Layout and Basic Function for more details about the tank heaters.
- Página 13 Section 1 Introduction Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module 1.7 VDM100 Internal Layout and Basic Function Figure 1-6 below illustrates the internal layout of the VDM100 system. The VDM100 has a titanium tank inside that serves as a reservoir for Dl water and a Mass Flow Controller (MFC).The Dl water is heated to the vapor state in the tank through the use of heaters attached to the tank and a heater control system.
- Página 14 Section 1 Introduction Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module 1.8 VDM100 Specifications (See Table 1-2)
-
Página 15: Performance Specifications
Section 1 Introduction Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module Table 1-2 VDM100 Product Specifications Description Description Description Description Description Performance Specifications Performance Specifications Performance Specifications Performance Specifications Performance Specifications 1 1 1 1 1 Full Scale Ranges (H Full Scale Ranges (H Full Scale Ranges (H... - Página 16 Section 1 Introduction Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module THIS PAGE WAS INTENTIONALLY LEFT BLANK 1-10...
- Página 17 If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to your nearest Product Service Department. Brooks Instrument 407 W. Vine Street P.O. Box 903...
- Página 18 Instrument must have been purged in accordance with the following: All flow instruments returned to Brooks requires completion of Form RPR003-1, Brooks Instrument Decontamination Statement, along with a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument.
-
Página 19: Removal From Storage
Section 2 Installation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG ® Brooks VDM100 Vapor Delivery Module December, 2012 2.5 Transit Precautions To safeguard against damage during transit, transport the instrument to the installation site in the same container used for transportation from the factory if circumstances permit. -
Página 20: Installation Instructions
Section 2 Installation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG ® Brooks VDM100 Vapor Delivery Module December, 2012 2.8 Installation Instructions The installation of the VDM100 involves mounting the device, making the required mechanical connections and making the required electrical connections. -
Página 21: Mechanical Connections
Section 2 Installation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG ® Brooks VDM100 Vapor Delivery Module December, 2012 Figure 2-2 VDM100 Installation Orientation 2.8.2 VDM100 Mounting and Orientation Figure 2-2 shows the proper mounting orientation for the VDM100.The VDM100 should be mounted using four 5/16" (7.9mm) screws tightening them to the recommended manufacturer specifications. - Página 22 Section 2 Installation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG ® Brooks VDM100 Vapor Delivery Module December, 2012 2.9.1 Inlet Connections Dl Water lnlet: The VDM100 can be ordered with a 1/4" VCR male fitting or a 1/4" Swagelok fitting. This inlet is where the Dl water source is connected for normal operation, or where the nitrogen source is connected when draining the VDM100.
-
Página 23: Electrical Connections
Section 2 Installation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG ® Brooks VDM100 Vapor Delivery Module December, 2012 2.10 Electrical Connections Figure 2-3 shows a diagram of the electrical connections that go to the VDM100. Read through the following connection descriptions and make certain that the interfacing connections from the user side meet the required specifications before any actual connections are made to the VDM100. - Página 24 Section 2 Installation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG ® Brooks VDM100 Vapor Delivery Module December, 2012 Table 2-1 VDM100 Input/Output Connector Pin-Out...
- Página 25 Section 2 Installation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG ® Brooks VDM100 Vapor Delivery Module December, 2012 Power Entry Module Connection and Configuration: The connection to the power entry module is a standard IEC plug. This is where AC power for the VDM100 internal tank heaters is connected.
- Página 26 Section 2 Installation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG ® Brooks VDM100 Vapor Delivery Module December, 2012 on the VDM100. lt is recommended that this connection be secured to the jack screws on either side of the DB-15 plug on the VDM100. Note that if the DC power supplied by the user is on, the VDM100 electronics will power up at this point.
-
Página 27: Idle Mode
Section 3 Operation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module 3.0 VDM100 Operation The VDM100 has three main modes of operation: ldle, Normal, and Drain. ln each mode the VDM100 functions are in different conditions. Also, in the Normal mode, there is a sub-mode referred to as Warm-up or Start-up. - Página 28 Section 3 Operation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module 3.2.1 Start-up (Normal Mode) When Pin 3 of the DB-15 on the VDM100 is grounded, the VDM100 goes into the Start-up sub-mode to prepare for Normal mode. Depending on the state of the VDM100 (temperature, water level, etc.) when the Normal mode signal is given, it will take between 5 and 55 minutes to complete the Start-up sub-mode.
- Página 29 Section 3 Operation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module For most other situations, however, the VDM100 will compute a shorter time to complete the Start-up sub-mode. This computed time depends upon the deviation of the MFC temperature from its operational set point.
- Página 30 Section 3 Operation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module 3.2.3 Zeroing the VDM100 Over a period of time the flow sensor in the VDM100 could accumulate a zero offset. lt is recommended that the VDM100 flow sensor is zeroed if this occurs to insure accuracy when delivering water vapor.
- Página 31 Section 3 Operation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module 3.2.3.2 Auto-zero The VDM100 Auto-zero feature automatically removes any possible accumulated zero offset. With this feature turned on, there is no need to perform a manual zeroing procedure.
- Página 32 Section 3 Operation Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module 4. The user needs to ground Pin 14 of the DB-15 to start the Drain mode. When the Drain mode is started the following takes place: a.
- Página 33 Section 4 Operation of GUI Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module 4.1 Operation of the Brooks GUI for VDM100 The GUI can be a very useful tool for operating and, if needed, trouble-shooting the VDM100.
- Página 34 Section 4 Operation of GUI Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module Figure 4-2 The Brooks GUI VDM100 Interface Screen The VDM100 interface screen can be accessed from the GUI main screen by clicking on the "Options"...
- Página 35 Section 4 Operation of GUI Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module 4. This section shows the operation mode and status of the VDM100. The "Switch State" fìeld indicates what mode to which the VDM100 is set.
- Página 36 Section 4 Operation of GUI Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 Brooks ® VDM100 Vapor Delivery Module THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Página 37 Section 5 Maintenance & Troubleshooting Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module 5.0 General 5.1 Troubleshooting the VDM100 The VDM is not intended to be serviceable by the customer. ln some instances, however, Brooks Field Service personnel or customers trained on the operation of the VDM can do basic diagnostic investigation and repair.
-
Página 38: General Troubleshooting
Section 5 Maintenance & Troubleshooting Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module 5.2 General Troubleshooting Refer to Table 5-1 for general troubleshooting information. Table 5-1 General Troubleshooting Information and Courses of Action Table 2-1 Brooks Brooks... - Página 39 Section 5 Maintenance & Troubleshooting Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module Table 5-2 List of Possible Alarm Codes Detected by the VDM100 Brooks Brooks...
- Página 40 Section 5 Maintenance & Troubleshooting Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module Table 5-2 List of Possible Alarm Codes Detected by the VDM100 (Continued) Brooks Brooks Brooks Brooks...
- Página 41 Section 5 Maintenance & Troubleshooting Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module Table 5-2 List of Possible Alarm Codes Detected by the VDM100 (Continued) Brooks Brooks...
- Página 42 Section 5 Maintenance & Troubleshooting Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module Table 5-2 List of Possible Alarm Codes Detected by the VDM100 (Continued) Brooks Brooks Brooks Brooks...
- Página 43 Section 5 Maintenance & Troubleshooting Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module Table 5-2 List of Possible Alarm Codes Detected by the VDM100 (Continued) Brooks...
- Página 44 Section 5 Maintenance & Troubleshooting Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG December, 2012 ® Brooks VDM100 Vapor Delivery Module THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Página 45 Section A - Essential Instructions Installation and Operation Manual X-VAP-VDM100-eng Part Number:541B178AAG Brooks ® VDM100 Vapor Delivery Module December, 2012 Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" ( (PED).
- Página 46 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
- Página 47 Section A - Essential Instructions Installation and Operation Manual X-VAP-VDM100-eng Part Number:541B178AAG Brooks ® VDM100 Vapor Delivery Module December, 2012 Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så...
- Página 48 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken. De volgende instructies moeten worden toegevoegd aan en geïntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert, bedient en onderhoudt.
- Página 49 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite nõuetele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrument'i toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Página 50 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
- Página 51 Brooks Instrument et que des personnes qualifiées effectuent le remplacement. Les pièces et procédures non autorisées peuvent porter atteinte au fonctionnement du produit et mettre en péril la sécurité de votre procédé. Les remplacements par des pièces d’apparence similaire peuvent entraîner des incendies, des risques électriques ou un mauvais fonctionnement.
- Página 52 Bitte zuerst lesen! Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt. Die folgenden Anweisungen müssen eingehalten werden und in Ihr Sicherheitsprogramm integriert werden, wenn Sie Brooks Produkte installieren, bedienen und warten.
- Página 53 Section A - Essential Instructions Installation and Operation Manual X-VAP-VDM100-eng Part Number:541B178AAG Brooks ® VDM100 Vapor Delivery Module December, 2012 Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED).
- Página 54 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Página 55 Leggerle subito! La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali. Tali apparecchiature devono essere installate, messe in esercizio e tenute in manutenzione in maniera adeguata affinché operino in conformità alle loro normali specifiche di funzionamento.
- Página 56 P rliecinieties par to, lai pirms instrumenta tehnisk s apkopes b tu likvid ts procesa l nijas spiediens. Ja ir nepieciešams veikt k du da u nomai u, nodrošiniet, lai tiktu izmantotas „Brooks Instrument” nor d t s da as un da u nomai u veiktu kvalific ts person ls. Neat autu da u un proced ru izmantošana var ietekm s ražojuma sniegumu un samazin t procesa droš...
- Página 57 25 mm arba 1 colio ar mažesni matuokliai atitinka tinkam inžinerijos praktik (SEP). Europoje taikomi elektromagnetinio suderinamumo (EMC) reikalavimai CE ženklu pažym ta „Brooks Instrument“ (elektrin / elektronin ) ranga buvo s kmingai išbandyta pagal elektromagnetinio suderinamumo reikalavimus (EMC direktyv 2004/108/EC).
- Página 58 Urz dzenia pomiarowe o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2004/108/EC).
-
Página 59: Instruções Básicas
Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de... -
Página 60: Indica Ii De Referin
În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei. - Página 61 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Página 62 Najprej preberite jih Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim doma im in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podro ju funkcioniranja. Naslednjih navodil se mora držati in potrebno je vgraditi v program varstva pri delu pri instaliranju, koriš...
-
Página 63: Directriz Europea De Los Equipos De Presión (Ped)
¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento. - Página 64 Läs detta innan du fortsätter ! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Página 65 Installation and Operation Manual X-VAP-VDM100-eng Part Number: 541B178AAG Brooks ® VDM100 Vapor Delivery Module December, 2012...
- Página 66 +86 21 5079 8828 Japan +81 3 5633 7100 Singapore +6297 9741 Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks ............... Brooks Instrument, LLC Swagelok ................ Swagelok Company Teflon ............