Electrical Connections - Brooks Instrument VDM100 Serie Manual Del Usuario

Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012

2.10 Electrical Connections

Figure 2-3 Diagram of Electrical Connections to the VDM100
Brooks
Figure 2-3 shows a diagram of the electrical connections that go to the
VDM100. Read through the following connection descriptions and make
certain that the interfacing connections from the user side meet the
required specifications before any actual connections are made to the
VDM100. Detailed instructions on how to make the electrical connections
will follow.
lnput/Output Connection: The lnput/Output connection needs to be
connected to the tool interface. lt is this connection that allows the user to
send commands and set points and receive flow and alarm signals from
the VDM100. lt is also where DC power (±15 Vdc) for the internal
electronics and the DC powered MFC heaters is needed. The connector
on the VDM100 is a 15-Pin D-subminiature (DB-15) plug (male). The
interfacing connector must be a 15-Pin D-subminiature (DB-15)
receptacle (female).
Table 2-1 shows the Pin configuration for the lnput/Output DB-15 connector.
Section 2 Installation
®
VDM100 Vapor Delivery Module
2-7