Performance Specifications - Brooks Instrument VDM100 Serie Manual Del Usuario

Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
Table 1-2 VDM100 Product Specifications

Performance Specifications

Performance Specifications Performance Specifications Performance Specifications Performance Specifications
Full Scale Ranges (H Full Scale Ranges (H Full Scale Ranges (H Full Scale Ranges (H Full Scale Ranges (H O) O) O) O) O)
2 2 2 2 2
Turndown Ratio Turndown Ratio Turndown Ratio Turndown Ratio Turndown Ratio
Step Response Time Step Response Time Step Response Time Step Response Time Step Response Time
Accuracy Accuracy Accuracy Accuracy Accuracy
Linearity Linearity Linearity Linearity Linearity
Repeatability Repeatability Repeatability Repeatability Repeatability
Temperature Coefficient Temperature Coefficient
Temperature Coefficient Temperature Coefficient Temperature Coefficient
Valve Shutdown Valve Shutdown
Valve Shutdown Valve Shutdown Valve Shutdown
Electrical Electrical
Electrical Electrical Electrical
Communication Communication Communication Communication Communication
Input Signals Input Signals
Input Signals Input Signals Input Signals
Output Signals Output Signals Output Signals Output Signals Output Signals
Power Power Power
Power Power
Diagnostic Ports Diagnostic Ports Diagnostic Ports Diagnostic Ports Diagnostic Ports
Mechanical Mechanical Mechanical Mechanical Mechanical
Fittings Fittings Fittings Fittings Fittings
Weight Weight Weight Weight Weight
Mounting Orientation Mounting Orientation Mounting Orientation Mounting Orientation Mounting Orientation
Environmental Environmental Environmental Environmental Environmental
Maximum Outlet Pressure Maximum Outlet Pressure Maximum Outlet Pressure Maximum Outlet Pressure Maximum Outlet Pressure
Water Supply Pressure Water Supply Pressure Water Supply Pressure Water Supply Pressure Water Supply Pressure
N N N N N Purge Pressure Purge Pressure Purge Pressure Purge Pressure Purge Pressure
2 2 2 2 2
Over Pressure Max (Water/N Over Pressure Max (Water/N Over Pressure Max (Water/N Over Pressure Max (Water/N Over Pressure Max (Water/N
Ambient Ambient Ambient Temperature Range Ambient Ambient Temperature Range Temperature Range Temperature Range Temperature Range
Humidity Humidity
Humidity Humidity Humidity
Certifications Certifications
Certifications Certifications Certifications
Electromagnetic Compatibility Electromagnetic Compatibility Electromagnetic Compatibility Electromagnetic Compatibility Electromagnetic Compatibility
SEMI F47-0706 SEMI F47-0706 SEMI F47-0706 SEMI F47-0706 SEMI F47-0706
SEMI S2-0703 SEMI S2-0703
SEMI S2-0703 SEMI S2-0703 SEMI S2-0703
SEMI S8-1103 SEMI S8-1103 SEMI S8-1103 SEMI S8-1103 SEMI S8-1103
SEMI S14-1103 SEMI S14-1103 SEMI S14-1103 SEMI S14-1103 SEMI S14-1103
R o H S R o H S R o H S R o H S R o H S
1. All performance specifications apply only in the ready state, ready light on.
1 1 1 1 1
±1.0% of setpoint (25% to 100%); ±1.0% of full scale, 5-25% full scale setpoint
Purge) Purge) Purge) Purge) Purge)
2 2 2 2 2
Specification for semiconductor processing equipment voltage immunity
Brooks ® VDM100 Vapor Delivery Module
Description Description Description Description Description
3 slpm
20:1
2 seconds
±0.5% of full scale
±0.2% of full scale
0.05% per °C zero and span
Normally closed <0.5% full scale
15-pin D sub
Flow setpoint (0 to 5 Vdc)
Start up/drain - TTL
RS485 (digital setpoint control and diagnostics)
Flow output (0 to 5 Vdc)
Ready to use - TTL
DC: ±15 Vdc @ 1 amp
AC: 110 Vac, 260 watts nominal, 230 Vac, 290 watts nominal
RS485
2 status LEDs, bi-color
See Model Code for list
Dry: 15lbs Wet: 16lbs
Vertical (inlet down)
200 Torr
10 to 40 psig
10 to 40 psig
60 psig
15°C to 45°C
0 to 95% RH, non-condensing
Fully CE compliant to EMC directive 2004/108/EC
Product safety assessment
Ergonomic assessment
Fire risk assessment
Compliant to EU directive 2011/65/EU
Section 1 Introduction
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