Brooks Instrument VDM100 Serie Manual Del Usuario página 5

Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
Paragraph
Number
Section 1 Introduction
1.1 Introduction ................................................................................................................................ 1-1
1.2 Intended Use .............................................................................................................................. 1-1
1.3 Product Identification Label ........................................................................................................ 1-1
1.4 Product Description Code .......................................................................................................... 1-2
1.5 VDM100 Front View .................................................................................................................... 1-3
1.6 VDM100 Bottom View ................................................................................................................. 1-5
1.7 VDM100 Internal Layout and Basic Function ............................................................................. 1-7
1.8 VDM100 Specifications .............................................................................................................. 1-8
Section 2 Installation
2.1 General ....................................................................................................................................... 2-1
2.2 Receipt of Equipment ................................................................................................................. 2-1
2.3 Recommended Storage Practice ................................................................................................ 2-2
2.4 Return Shipment ......................................................................................................................... 2-2
2.5 Transit Precautions ..................................................................................................................... 2-3
2.6 Removal from Storage ................................................................................................................ 2-3
2.7 Product Safety Information ......................................................................................................... 2-3
2.7.1 Hazards ...................................................................................................................................... 2-3
2.7.2 Safety Interlocks ......................................................................................................................... 2-3
2.7.3 VDM100 Outlet Fitting ................................................................................................................. 2-3
2.8 Installation Instructions ............................................................................................................... 2-4
2.8.1 Product Dimensions and Inlet Fitting Configurations .................................................................. 2-4
2.8.2 VDM100 Mounting and Orientation ............................................................................................. 2-5
2.9 Mechanical Connections ............................................................................................................ 2-5
2.9.1 Inlet Connections ........................................................................................................................ 2-6
2.9.2 Outlet Connection ....................................................................................................................... 2-6
2-10 Electrical Connections ................................................................................................................ 2-7
2-11 RS485 Communication .............................................................................................................. 2-10
Section 3 Operation
3.0 VDM Operation ........................................................................................................................... 3-1
3.1 Idle Mode .................................................................................................................................... 3-1
3.2 Normal Mode .............................................................................................................................. 3-1
3.2.1 Start-up (Normal Mode) .............................................................................................................. 3-2
3.2.2 Ready-to-Use (Normal Mode) ..................................................................................................... 3-3
3.2.3 Zeroing the VDM100 ................................................................................................................... 3-4
3.2.3.1 Procedure for Manually Zeroing the VDM100 ............................................................................. 3-4
3.2.3.2 Auto-zero .................................................................................................................................... 3-5
3.3 Drain Mode ................................................................................................................................. 3-5
Section 4 Operation of GUI
4.1 Operation of the Brooks GUI for VDM100 .................................................................................. 4-1
Section 5 Maintenance & Troubleshooting
5.0 General ....................................................................................................................................... 5-1
5.1 Troubleshooting the VDM100 ...................................................................................................... 5-1
5.2 General Troubleshooting ............................................................................................................. 5-2
5.3 Using the Brooks GUI as a Diagnostics Tool ............................................................................... 5-2
Section A Essential Instructions ...................................................................................................... A-1 to A-20
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover
Brooks ® VDM100 Vapor Delivery Module
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