Brooks Instrument VDM100 Serie Manual Del Usuario página 22

Section 2 Installation
®
Brooks VDM100 Vapor Delivery Module
2.9.1 Inlet Connections
2.9.2 Outlet Connection
2-6
Dl Water lnlet: The VDM100 can be ordered with a 1/4" VCR male fitting
or a 1/4" Swagelok fitting. This inlet is where the Dl water source is
connected for normal operation, or where the nitrogen source is
connected when draining the VDM100. It is up to the user to make sure
that the proper source is available for the particular mode of operation
desired.
NOTE: The lnlet pressure for both fluid sources must be between 10-40 psig for proper
operation.
Tank Drain: The VDM100 has a 1/8" lnstant Tube Fitting. This is the port
where the water will drain out of the tank of the VDM100.Make sure that the
1/8" drain tube is properly connected to this port when draining the tank.
Vapor Outlet: The VDM100 has a 112" VCR male fitting for this
connection. The VDM100 is designed to deliver vapor into a vacuum so be
sure that the connection to the tool will remain at or below 200 Torr during
normal operation.
Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012