Idle Mode; Normal Mode - Brooks Instrument VDM100 Serie Manual Del Usuario

Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
3.0 VDM100 Operation

3.1 Idle Mode

3.2 Normal Mode

Brooks
The VDM100 has three main modes of operation: ldle, Normal, and Drain.
ln each mode the VDM100 functions are in different conditions. Also, in
the Normal mode, there is a sub-mode referred to as Warm-up or Start-up.
Table 3-1 shows the required states of Pins 3 and 14 of the lnput/Output
DB-15 to achieve the desired mode of operation. ln the following sections
each mode and how to achieve each mode will be discussed.
Table 3-1 Signals Required for Switching Modes on the VDM100
The ldle mode is just that; the VDM100 is idle. lt is expected that AC and
DC power to the VDM100 is on; therefore the internal electronics are
active. However, the tank and MFC heaters are off, the fill and drain water
valves are closed, and the VDM100 will not deliver water vapor on demand.
The amber "WARM UP" LED will be flashing and the other two LEDs,
"FAULT' and "READY", will be off.
The VDM100 will communicate with the GUl while in the ldle mode (see Section 4.0
Operation of the Brooks GUl for VDM100).
The ldle mode is achieved when Pins 3 and 14 of the DB-15 are left in a
floating state (see Table 2-1 earlier in this manual).
It is recommended that the VDM100 be put into the ldle mode during
extended periods of downtime.
The VDM100 Normal mode is the primary mode of operation. lt is in this
mode that the VDM100 will deliver water vapor on demand. There is,
however, a sub-mode that occurs before the VDM100 reaches a Ready-to-
Use state in Normal mode, and that sub-mode is referred to as "Warm-up"
or "Start-up". When it is desired that the VDM100 deliver water vapor, the
VDM100 has to be prepared to do so. The Start-up sub-mode is what the
VDM100 automatically goes into when the signal for normal operation is
given by the user. Once it has reached the "Ready-to-Use" state, it is
recommended that the VDM100 flow sensor be zeroed. The following
sections will explain in greater detail the operation of the VDM100 in Normal
mode and the recommended process for zeroing the VDM100 flow sensor.
Section 3 Operation
®
VDM100 Vapor Delivery Module
3-1