Brooks Instrument VDM100 Serie Manual Del Usuario página 13

Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
1.7 VDM100 Internal Layout and Basic Function
Figure 1-6 VDM100 Block Diagram
Brooks
Figure 1-6 below illustrates the internal layout of the VDM100 system. The
VDM100 has a titanium tank inside that serves as a reservoir for Dl water
and a Mass Flow Controller (MFC).The Dl water is heated to the vapor state
in the tank through the use of heaters attached to the tank and a heater
control system. The liquid water level is monitored by a level detection
system (not shown in diagram) in the tank. The MFC delivers the
appropriate amount of Dl water vapor on demand through the Dl water
vapor outlet. The fill valve controls the flow of Dl water into the tank which
works in tandem with the level detection system to maintain the optimal
amount of liquid Dl water in the tank for vaporization during operation. The
tank drain controlled by the drain valve allows the tank to be emptied for
maintenance and extended periods of downtime.
Section 1 Introduction
® VDM100 Vapor Delivery Module
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