Installation Instructions - Brooks Instrument VDM100 Serie Manual Del Usuario

Section 2 Installation
®
Brooks VDM100 Vapor Delivery Module

2.8 Installation Instructions

2.8.1 Product Dimensions and Inlet Fitting Configurations
2-4 Figure 2-1 VDM100 Dimensions
The installation of the VDM100 involves mounting the device, making the
required mechanical connections and making the required electrical
connections.
Figure 2-1 below shows the mechanical dimensions of the VDM100.
Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012