Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento página 16

Section 1 Introduction
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Brooks GF40/GF80 Series
Table 1-3 Specifications for Standard GF40/GF80 Series
P P P P P erformance erformance erformance erformance erformance
Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range
Flow Accur Flow Flow Flow Flow Accuracy Accur Accur Accur acy acy acy acy
Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Reproducibility
Linearity Linearity
Linearity Linearity Linearity
Response Response Response Response Response Time (Settling Time (Settling Time (Settling Time (Settling Time) Time (Settling
Contr tr tr tr trol Range Con Con Con Con ol Range ol Range ol Range ol Range
MultiFlo MultiFlo MultiFlo MultiFlo MultiFlo
Number of Bins Number of Bins Number of Bins Number of Bins Number of Bins
V V V V V alve Shut Down alve Shut Down alve Shut Down alve Shut Down alve Shut Down
Z Z Z Z Z er er er er ero Stability o Stability o Stability o Stability o Stability
Pr Pr Pr Pr Pressur essure Coefficien essur essur essur e Coefficien e Coefficien e Coefficien e Coefficient t t t t
A A A A A ttitude Sensitivity ttitude Sensitivity ttitude Sensitivity ttitude Sensitivity ttitude Sensitivity
Auto Z Auto Z Auto Zer er er er ero: o: o: o: o: Auto Z Auto Z
Ratings Ratings Ratings Ratings Ratings
Oper Oper ating T T T T T emper ating ating emper emper atur atur
Operating Oper Oper ating emperatur emper atur ature Range
Maximum Oper Maximum Oper ating Pr ating Pr
Maximum Oper Maximum Operating Pr Maximum Oper ating Pr ating Pressur
Design Pr Design Pr oof Pr oof Pr essur essure e e e e essur
Design Proof Pr Design Pr Design Pr oof Pr oof Pressur essur
Differ Differen en en en ential Pr Differ tial Pr tial Pr tial Pressur essur essure Range essur e Range e Range e Range
Differ Differ tial Pr essur e Range
Leak In Leak In tegrity (External) tegrity (External)
Leak In Leak Integrity (External) Leak In tegrity (External) tegrity (External)
Mec Mechanical Mec hanical hanical hanical
Mec Mec hanical
V V V V V alve alve alve alve alve T T T T T ype ype ype ype ype
Primary Primary W W W W W etted Materials Primary Primary Primary etted Materials etted Materials etted Materials etted Materials
External Seals External Seals External Seals External Seals External Seals
In In In In Internal Seals/V ternal Seals/V ternal Seals/V ternal Seals/V ternal Seals/Valve Seat alve Seat alve Seat alve Seat alve Seat
1-8
oducibility oducibility oducibility oducibility
Time) Time) Time) Time)
e Range e Range
e Range e Range
essur essur essure e e e e
essur
3-860 sccm = 7-45 psid, 861-7200 sccm = 15-45 psid, 7201-50000 sccm = 25-45 psid
Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure
Normally Closed, Normally Open, No Valve (Meter)
Viton, Buna, Kalrez, EPDM or Neoprene
Viton, Buna, Kalrez, EPDM or Neoprene
GF40 GF40 GF40 GF40 GF40
3 sccm to 50 slm
+1% S.P. 35-100%, +0.35% F.S. 2-35%
< + 0.2% S.P.
+ 0.5% F.S. (included in accuracy)
Normally Closed Valve < 1 sec. (within 2% for steps 0-10 through 0-100%)
Normally Open Valve < 3 sec (within 2% for steps 0-10 through 0-100%)
< 1% of F.S.
< + 0.5% F.S. per year
0.03% per psi (0-50psi N2)
<0.25% span change @ 90
Standard option
5-50
150 psig (10 bar)
4000 psig (275 bar)
1x10 -9 atm. cc/sec He
316 Stainless Steel, Hastelloy C-22, 17-7 PH, 430SS
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
GF80 GF80 GF80 GF80 GF80
2-100%
optional
10 bins
O after rezeroing (N2 @ 50 psi)
O C (41-122 O F)
1x10 -10 atm. cc/sec He
Normally Closed, No Valve (Meter)
Nickel
PFA/Kalrez
August, 2012