Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento página 48

Appendix A: GF40/GF80 Series Gas Table
Brooks ® GF40/GF80 Series
Table A-2 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA40 to SA43
Gas
Gas Symbol Code Gas Name
SiCl4 108 Silicon Tetrachloride
C3H9N 109 Trimethylamine
SF6 110 Sulfur Hexafluoride
C2F6 118 Hexafluoroethane (Freon-116)
WF6 121 Tungsten Hexafluoride
C3F8 128 Perfluoropropane
C4F8 129 Octafluorocyclobutane
C3F6 138 Hexafluoropropylene
C2HF5 155 PENTAFLUOROETHANE (FREON-125)
CH2F2 160 Difluoromethane
CH6Si 185 Methylsilane (MONO)
(CH3)3SiH 190 Trimethylsilane (TMSi)
C5F8 266 Octafluorocyclopentene
C4F6 270 Hexafluoro-2-butyne
C4F6-q) 297 Hexafluoro Butadiene-1-3
C5F8O 354 Epoxyperfluorocyclopentene
Si3H9N 368 Trisilylamine (TSA)
10%GeH4/H2 509 10%Germane/Hydrogen
10%PH3/H2 516 10%Phosphine/Hydrogen
4.5%PH3/N2 528 4.5%Phosphine/Nitrogen
20%O2/He 536 20%Oxygen/Helium
5%H2/N2 542 5%Hydrogen/Nitrogen
1%B2H6/H2 557 1%Diborane Hydrogen
1%PH3/H2 563 1%Phosphine/Hydrogen
3%B2H6/N2 595 3%Diborane/Nitrogen
3%H2/N2 597 3%Hydrogen/Nitrogen
30%He/O2 603 30%Helium/Oxygen
30%O2/He 604 30%Oxygen/Helium
4%H2/He 606 4%Hydrogen/Helium
4%H2/N2 607 4%Hydrogen/Nitrogen
5%B2H6/Ar 615 5%Diborane/Argon
50%PH3/SiH4 632 50%Phosphine/Silane
10%O2/He 649 10%Oxygen/Helium
2%SiH4/N2 653 2%SILANE/NITROGEN
5%B2H6/N2 654 5%Diborane/Nitrogen
.8%B2H6/N2 662 .8%Diborane/Nitrogen
10%PH3/He 674 10%Phosphine/Helium
2%B2H6/N2 695 2%Diborane/Nitrogen
10%GeH4/Ar 698 10%Germane/Argon
5%H2/He 762 5%Hydrogen/Helium
5%B2H6/He 766 5%Diborane/Helium
15%B2H6/H2 820 15%Diborane/Hydrogen
3%C2H4/He 878 3%Ethylene/Helium
10%B2H6/Ar 881 5%Diborane/Argon
2.7%C2H4/He 897 2.7%Ethylene/Helium
1%GeH4/H2 898 1%Germane/Hydrogen
.5%GeH4/H2 910 0.5%Germane/Hydrogen
2%PH3/H2 916 2%Phosphine/Hydrogen
3.9%H2/N2 930 3.9%Hydrogen/Nitrogen
10%B2H6/He 939 10%Diborane/Helium
30%C2H4/He 946 30%Ethylene/Helium
10%H2/He 950 10%Hydrogen/Helium
15%H2/B2H6 953 15%Hydrogen/Diborane
17%CH4/CO2 958 17%Methane/Carbon Dioxide
20%CH6Si/H2 962 20%Methylsilane (MONO)/Hydrogen
50%CH3SiHCl2/H2 965 50%Dichloromethylsilane/Hydrogen
20%GeH4/H2 978 20%Germane/Hydrogen
0.5%B2H6/He 979 0.5%Diborane/Helium
COS-Special 5022 Carbonyl Sulfide (Special)
For reference only, consult factory on the latest tables.
A-2
Min inlet pressure for
vac. exhaust (PSIA)
SA40-
Elastomer seal GF040 SA47 SA48 SA50
Kalrez 8.7
Kalrez 6.7 8.7
Viton,EPDM 19.7 19.7 20.7
Viton,Buna 19.7 19.7
- 9.7 11.7
Viton 19.7 19.7
Viton 19.7 19.7
Viton,Buna 19.7 19.7
Viton 19.7 19.7
Viton 24.7 29.7
- 9.7 14.7
- 6.7
- 9.7 14.7
- 9.7
- 14.7 14.7
- 19.7 19.7
- 6.0 7.2
MIX-Check components 20.7 20.7
MIX-Check components 14.7 14.7
MIX-Check components 20.7 29.7
MIX-Check components 19.7 29.7
MIX-Check components 24.7 29.7
MIX-Check components 24.7 29.7
MIX-Check components 19.7 19.7
MIX-Check components 20.7 29.7
MIX-Check components 24.7 29.7
MIX-Check components 24.7 29.7
MIX-Check components 19.7 29.7
MIX-Check components 19.7 19.7
MIX-Check components 24.7 29.7
MIX-Check components 24.7
MIX-Check components 16.7 24.7
MIX-Check components 19.7 24.7
MIX-Check components 19.7 24.7
MIX-Check components 24.7 29.7
MIX-Check components 24.7 29.7
MIX-Check components 14.7 19.7
MIX-Check components 24.7 29.7
MIX-Check components 24.7 29.7
MIX-Check components 19.7 19.7
MIX-Check components 14.7 16.7
MIX-Check components 14.7 14.7
MIX-Check components 19.7 19.7
MIX-Check components 24.7 29.7
MIX-Check components 19.7 19.7
MIX-Check components 20.7 20.7
MIX-Check components 20.7 20.7
MIX-Check components 21.7 21.7
MIX-Check components 24.7 29.7
MIX-Check components 19.7 19.7
MIX-Check components 19.7 24.7
MIX-Check components 19.7 19.7
MIX-Check components 19.7 19.7
MIX-Check components 24.7 29.7
MIX-Check components 14.7 19.7
MIX-Check components 11.7 13.7
MIX-Check components 19.7 24.7
MIX-Check components 14.7 19.7
- 24.7 29.7
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
Min inlet pressure for
atm. exhaust (PSIA) SA40
SA40-
SA47 SA48 SA50 Low High Low
16.0 0 0 3
15.5 16.0 0 0 3
21.3 21.3 22.0 0 0 3
21.3 21.3 0 0 3
16.3 17.0 0 0 3
21.3 21.3 0 0 3
21.3 21.3 0 0 3
21.3 21.3 0 0 3
21.3 21.3 0 0 3
25.1 29.7 3 6 7
16.3 18.4 3 4 5
15.5 0 0 3
16.3 18.4 0 0 3
16.3 0 0 3
18.4 18.4 0 0 3
21.3 21.3 0 0 3
15.3 15.6 0 0 3
22.0 22.0 3 9 10
18.4 18.4 3 9 10
22.0 29.7 3 10 11
21.3 29.7 4 13 14
25.1 29.7 3 10 11
25.1 29.7 3 10 11
21.3 21.3 3 10 11
22.0 29.7 3 9 10
25.1 29.7 3 10 11
25.1 29.7 4 11 12
21.3 29.7 4 12 13
21.3 21.3 5 14 15
25.1 29.7 3 10 11
25.1 4 12 13
19.4 25.1 3 6 7
21.3 25.1 5 13 14
21.3 25.1 3 10 11
25.1 29.7 3 9 10
25.1 29.7 3 10 11
18.4 21.3 4 13 14
25.1 29.7 3 10 11
25.1 29.7 4 12 13
21.3 21.3 5 14 15
18.4 19.4 4 12 13
18.4 18.4 3 8 9
21.3 21.3 4 13 14
25.1 29.7 4 11 12
21.3 21.3 4 13 14
22.0 22.0 3 10 11
22.0 22.0 3 10 11
22.7 22.7 3 10 11
25.1 29.7 3 10 11
21.3 21.3 4 11 12
21.3 25.1 3 10 11
21.3 21.3 4 13 14
21.3 21.3 3 4 5
25.1 29.7 3 7 8
18.4 21.3 3 7 8
17.0 17.9 3 4 5
21.3 25.1 3 8 9
18.4 21.3 5 14 15
25.1 29.7 3 7 8
August, 2012
SA41 SA42 SA43
High Low High Low High
6 7 18 19 56
8 9 25 26 78
8 9 25 26 77
8 9 23 24 71
5 6 16 17 50
5 6 16 17 50
5 6 16 17 50
6 7 20 21 60
8 9 25 26 77
19 20 57 58 174
12 13 37 38 111
7 8 20 21 62
5 6 14 15 44
6 7 19 20 57
6 7 17 18 52
4 5 13 14 40
6 7 20 21 60
28 29 86 87 260
28 29 90 91 275
30 31 94 95 280
38 39 120 121 360
30 31 92 93 280
30 31 91 92 270
30 31 90 91 273
29 30 90 91 270
30 31 92 93 280
33 34 100 101 301
37 38 113 114 345
41 42 126 127 400
30 31 92 93 280
38 39 116 117 353
20 21 62 63 190
41 42 123 124 380
30 31 93 94 280
28 29 86 87 262
30 31 93 94 280
40 41 120 121 370
30 31 93 94 280
38 39 114 115 350
41 42 125 126 400
38 39 115 116 350
25 26 76 77 230
40 41 125 126 375
35 36 105 106 320
40 41 125 126 377
30 31 91 92 275
30 31 92 93 280
30 31 91 92 275
30 31 92 93 280
34 35 103 104 314
30 31 90 91 275
40 41 125 126 380
14 15 42 43 130
23 24 70 71 210
23 24 71 72 212
14 15 42 43 130
26 27 81 82 241
42 43 130 131 400
20 21 60 61 183