Introduction; How To Use This Manual; Appendix A Gf40/Gf80 Series Gas Table; Appendix B Gf40/Gf80 Series Patents - Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012

1-1 Introduction

1-2 How to Use This Manual

Based upon Brooks award-winning GF100 Series, the GF40/80 Series is a
performance/value MFC platform designed for OEM applications,
delivering the following class leading features:
• MultiFlo™ process gas and flow range programmability, enabling
customers to re-configure the MFC for new gases and full scale flow
rates for unparalleled process flexibility.
• A high-performance, corrosion-resistant flow measurement sensor
delivers improved reproducibility and stability.
• Elastomer (GF40) and metal seal (GF80) options enable customers to
select the optimum and most cost effective mix of products for their
application.
• Full range of industrial communication protocols (DeviceNet, Profibus
DP-V1, and EtherCAT).
• An independent service/diagnostic port enables on-tool reconfiguration/
optimization, data logging, and troubleshooting without having to
remove the MFC from the gas line.
Figure 1-1 GF40/GF80 Series MultiFlo
This manual is intended to provide the user with all the information
necessary to install, operate, troubleshoot and maintain these thermal
mass flow devices. The manual is organized in the following sections:
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance and Troubleshooting
Section 5 Product Description Code

Appendix A GF40/GF80 Series Gas Table

Appendix B GF40/GF80 Series Patents

Appendix C Essential Instructions

Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting
to operate or repair these devices.
Section 1 Introduction
®
Brooks GF40/GF80 Series
TM Capable Digital Thermal Mass Flow Devices
1-1