Troubleshooting Checklist - Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012

4-4 Troubleshooting Checklist

Section 4 Maintenance & Troubleshooting
1. Check environmental factors that could affect changes to GF40/GF80
Series performance. The most common environmental factors are listed
in Table 4-1.
2. Check supply voltage and check for a consistent ground.
3. Insure OEM tool setpoint matches the setpoint at the GF40/GF80
Series. Observe for consistency.
4. Verify isolations valves are open and the gas supply is turned on. Then
verify operating pressures are within operating ranges.
5. Check GF40/GF80 Series voltage response by moving the setpoint back
and forth.
Observe for voltage changes.
Table 4-1 Environmental Factors
GF40/GF80 Series
Performance
Inaccurate flow.
Control problems. Can
not reach setpoint.
Oscillation.
Zeroing problems, Indicated
zero is not stable.
®
Brooks GF40/GF80 Series
Possible Causes
Temperature shift (steady state or transient).
Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference
Dirty gas chamber
Changes in gas.
Differential pressure not within operating range
Inlet pressure not stable
Temperature shift (steady state or transient).
Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference
4-3