Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento página 49

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012
Table A-3 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA44 to SA50
Gas
Gas Symbol Code Gas Name
He 1 Helium
Ne 2 Neon
Ar 4 Argon
Kr 5 Krypton
Xe 6 Xenon
H2 7 Hydrogen
Air 8 Air
CO 9 Carbon Monoxide
HBr 10 Hydrogen Bromide
HCl 11 Hydrogen Chloride
N2 13 Nitrogen
D2 14 Deuterium
O2 15 Oxygen
NO 16 Nitric Oxide
HI 17 Hydrogen Iodide
F2 18 Fluorine
Cl2 19 Chlorine
H2S 22 Hydrogen Sulfide
H2Se 23 Hydrogen Selenide
CO2 25 Carbon Dioxide
N2O 27 Nitrous Oxide
CH4 28 Methane
NH3 29 Ammonia
PH3 31 Phosphine
SO2 32 Sulfur Dioxide
CH3F 33 Methyl Fluoride
COS 34 Carbonyl Sulfide
AsH3 35 Arsine
ClCN 37 Cyanogen Chloride
C2H4 38 Ethylene
SiH4 39 Silane
C2H2 42 Acetylene
GeH4 43 Germane
COF2 46 Carbonyl Fluoride
BF3 48 Boron Trifluoride
CHF3 49 Fluoroform (Freon-23)
NF3 53 Nitrogen Trifluoride
B2H6 58 Diborane
COCl2 60 Phosgene
PF3 62 Phosphorus Trifluoride
CF4 63 Carbon Tetrafluoride (Freon-14)
SiH2Cl2 67 Dichlorosilane
C3H6-b) 69 Propylene
BCl3 70 Boron Trichloride
ClO3F 72 Perchloryl Fluoride
ClF3 77 Chlorine Trifluoride
C2H7N 85 Dimethylamine
SiF4 88 Silicon Tetrafluoride
C3H8 89 Propane
C2F4 94 Tetrafluoroethylene
Si2H6 97 DISILANE
GeF4 99 Germanium Tetrafluoride
For reference only, consult factory on the latest tables.
For gases not specified for SA50, contact Brooks Product Marketing.
Appendix A: GF40/GF80 Series Gas Table
SA44
Elastomer seal GF040 Low High
Viton 401 1194
Viton 401 1207
Viton 401 1214
Viton 301 930
Viton 179 546
Viton 281 860
Viton 281 860
Viton 281 860
Viton 236 723
EPDM 281 860
Viton 281 860
Viton 281 880
Viton 281 860
Viton,Kalrez 281 860
Kalrez 142 432
- 255 780
Viton 174 531
Kalrez 233 713
Kalrez 203 620
Buna 210 642
Viton,Buna 201 611
Viton,Buna 216 660
Neoprene,EPDM 224 685
Kalrez 206 629
EPDM 158 483
Viton 205 625
Viton 184 562
Kalrez 171 510
Kalrez 143 435
Viton 164 501
Kalrez 171 523
Viton 171 530
- 162 495
Viton 161 500
Kalrez 151 457
Viton,Kalrez 146 445
Teflon 141 430
Kalrez 117 358
Kalrez 107 325
- 130 400
Viton 122 372
Kalrez 90 273
Viton 111 338
Kalrez 95 289
- 115 350
Kalrez 108 327
Viton,Kalrez 102 310
- 104 316
Viton 101 300
Viton,Buna 101 300
- 93 282
- 93 282
®
Brooks GF40/GF80 Series
SA45 SA46 SA47
Low High Low High Low
1195 3609 3610 11100 11101 23100
1208 3650 3651 10700 10701 22100
1215 3671 3672 10000 10001 20200
931 2800 2801 7160 7161 14901
547 1651 1652 4210 4211
861 2600 2601 8000 8001 16400
861 2600 2601 7400 7401 15000
861 2600 2601 7300 7301 15000
724 2187 2188 5610 5611 11701
861 2600 2601 6900 6901 14200
861 2600 2601 7200 7201 15000
881 2600 2601 8100 8101 16500
861 2600 2601 7200 7201 15000
861 2600 2601 7200 7201 15000
433 1305 1306 3340 3341
781 2358 2359 6700 6701 14000
532 1604 1605 4850 4851 10100
714 2155 2156 5900 5901 12100
621 1874 1875 4770 4771 10000
643 1942 1943 5300 5301 11000
612 1849 1850 5100 5101 10400
661 2000 2001 5800 5801 12000
686 2072 2073 6000 6001 12200
630 1901 1902 5200 5201 10700
484 1459 1460 3800 3801
626 1890 1891 5200 5201 10600
563 1700 1701 4500 4501
511 1550 1551 4000 4001
436 1320 1321 3400 3401
502 1516 1517 4400 4401
524 1581 1582 4400 4401
531 1600 1601 4400 4401
496 1500 1501 4000 4001
501 1500 1501 4000 4001
458 1381 1382 3800 3801
446 1344 1345 3600 3601
431 1300 1301 3600 3601
359 1082 1083 3100 3101
326 1000 1001 2520 2521
401 1200 1201 3200 3201
373 1123 1124 3010 3011
274 824 825 2140 2141
339 1022 1023 2800 2801
290 874 875 2230 2231
351 1060 1061 2800 2801
328 1000 1001 2560 2561
311 960 961 2530 2531
317 1000 1001 2600 2601
301 910 911 2420 2421
301 900 901 2300 2301
283 853 854 2300 2301
283 860 861 2200 2201
SA48 SA50
High Low High Low High
23101 47000 47001 90900
x x x x
20201 41000 41001 50001
x x x x
8761 x x x x
16401 33000 33001 66301
15001 30001 x x
15001 30001 x x
x x x x
14201 29001 x x
15001 30000 30001 50001
16501 33001 x x
15001 30000 30001 50001
15001 30001 x x
6960 6961 13901 x x
14001 28001 x x
10101 20201 x x
12101 24101 x x
10001 20001 x x
11001 22000 22001 35401
10401 21000 21001 33601
12001 24000 24001 41801
12201 25000 25001 41801
10701 21301 x x
7920 7921 15801 x x
10601 21201 x x
9400 9401 18301 x x
8500 8501 17001 x x
7060 7061 14101 x x
9300 9301 18201 x x
9300 9301 18201 x x
9300 9301 18201 x x
8400 8401 16401 x x
8400 8401 16500 16501 19001
7900 7901 15501 x x
7600 7601 15000 15001 23601
7500 7501 15000 15001 23601
6400 6401 12601 x x
5250 5251 10501 x x
6800 6801 13301 x x
6400 6401 12600 12601 20001
4450 4451 8901 x x
5900 5901 11701 x x
4650 4651 9301 x x
5800 5801 11501 x x
5340 5341 10701 x x
5400 5401 10601 x x
5400 5401 10601 x x
5100 5101 10101 x x
4900 4901 9801 x x
4900 4901 9801 x x
4700 4701 9401 x x
A-3