Purge The Gas Supply Line Before Gf40/Gf80 Series Installation - Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012

2-11 Purge the Gas Supply Line Before GF40/GF80 Series Installation

For additional safety, it is recommended to close the two valves
between the charged gas line and the GF40/GF80 Series to be
installed. See Figure 2-1 for more details.
It is recommended to archive service and calibration
documentation for the GF40/GF80 Series in order to determine the
contamination state of each gas line and to assist service
personnel.
DO NOT remove the shipping caps covering the inlet/outlet
fittings, or DO NOT remove the blue tape on the bottom of the
device for downported fittings before the GF40/GF80 Series is
actually being installed. Failure to comply will introduce
contaminants into the GF40/GF80 Series.
Before operating the GF40/GF80 Series, the gas supply line must be
completely purged with nitrogen or argon to ensure the line is free from toxic
or flammable gases, contaminants, moisture, and oxygen. The purge gas
must be free of moisture and oxygen to less than 100 ppb. Purge the gas
lines as follows or in accordance with prescribed company and safety
procedures.
1. Shut off the process gas supply valve(s) upstream of the GF40/GF80
Series. If such a valve is not available, shut the valve on the gas panel.
Tag the valve at this point to prevent accidental re-exposure of the
process gas to the gas line.
2. Cycle purge the gas line with dry nitrogen or argon to fully flush out the
process gas. Cycle purging consists of evacuating to a low pressure
adequate to induce out-gassing and then purging to remove adhered
moisture and oxygen. If a toxic or reactive gas is present and a clogged
GF40/GF80 Series is suspected, then proceed with caution. Pump down
and purge the GF40/GF80 Series from both downstream and upstream
lines. If check valves are present in the gas line, both pumping down and
purging are required. Pumping down without purging is inadequate. If a
good vacuum source is not available, the GF40/GF80 Series can be de-
contaminated by purge only.
3. Repeat the purge cycle several times within 2-4 hours to complete the
cleaning. For toxic and corrosive gasses, it is recommended to use 100-
120 cycles.
Section 2 Installation
®
Brooks GF40/GF80 Series
NOTICE
2-5