Perform A Leak Test; Performance Checks; Zeroing Setup Process - Brooks Instrument GF40 Serie Manual De Instalación Y Funcionamiento

Section 2 Installation
Brooks ® GF40/GF80 Series

2-13 Perform a Leak Test

2-14 Performance Checks

2-15 Zeroing Setup Process

2-8
It is critical to leak test the gas supply lines and GF40/GF80 Series
connections before turning on the process gas supply after any new
installation. Check for leaks using a helium leak detector or any other
appropriate leak test method. Follow leak test specifications as defined by
integrator.
This section describes how to zero and sequence the GF40/GF80 Series
devices for proper operation.
If the GF40/GF80 Series has been in the purge mode for a long
period of time, wait until the GF40/GF80 Series has cooled down
before zeroing. The cool down period should be ~30 minutes for
purges up to five minutes and at least 60 minutes after longer
purging.
• The GF40/GF80 Series must be warmed up for at least 45 minutes.
• The active gas page must be correct.
The following steps are required before the GF40/GF80 Series is zeroed.
1. Place the GF40/GF80 under normal inlet operating pressure.
2. Make sure that the GF40/GF80 Series has been installed inside the
equipment (panel) for at least four hours and powered up at least one
hour prior to zeroing. This insures that the GF40/GF80 Series is in its
"use attitude" and is operating at normal temperature. If the GF40/GF80
Series is subjected to a vacuum purge for more than one minute, turn off
the GF40/GF80 Series (i.e., provide a zero setpoint) for a time period of
twice the vacuum purge time.
3. Refer to Figure 2-1. Open the upstream shut-off valve (5) and close the
downstream shut-off valve (7). This eliminates a pressure drop across the
GF40/GF80 Series and subsequent leakage from the PID control valve
inside the GF40/GF80 Series.
4. Provide a 100% setpoint to the GF40/GF80 Series for no longer than 30
seconds. This equalizes the pressure across the PID control valve.
5. Refer to Figure 2-1. Close the upstream shut-off valve (5) to prevent any
pressure effects from the regulator (3).
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
NOTICE
August, 2012