Technical Information; Description Of The Turbo-V 2K-G; Pump Description - Varian Turbo-V 2K-G 969-8871 Manual De Instrucciones

DESCRIPTION OF THE TURBO-V 2K-G

The Turbo-V 2K-G pumping system consists of a
pump with a dedicated controller fixed to it. The
system has an ISO 250 F high vacuum flange.
The system model part numbers are:
- 969-8871 with Monitorr
- 969-8873 with Monitorr and ProfiBus options
The following figure shows the Turbo-V 2K-G.

Pump Description

The pump consists of a high frequency motor driv-
ing a turbine fitted with 5 bladed stages and 2
Macrotorr stages. The turbine rotates in an anti-
clockwise direction when viewed from the high
vacuum flange end.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of alumin-
ium alloy. These are supported and accurately po-
sitioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding
rotor discs. These are made of aluminium alloy.
During normal operation, the motor is fed with a
voltage of 54 Vac (between phases) three-phase
at 555 Hz. To avoid rotor overheating, an auto-
matic power management routine is implemented
in the control unit microprocessor. The user can
select (through serial line) the gas load type be-
tween "Argon" and "Nitrogen (or lighter gases)"
with window 157 0=Argon and default 1=Nitrogen.
When Nitrogen is selected the power limit is fixed
at 400 W, for Argon selection the user must set the
maximum foreseen water cooling temperature
(Twater,max) by the window 158. After these set-
tings the controller will operate as shown in the fol-
lowing diagram.
69

TECHNICAL INFORMATION

87-900-968-01(C)