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OFF
MEANING
SET
18
B
Vent/Purge Auto/Man diag status
7 - 4
B
Vent/Purge Remote/Profibus diag status
3 - 0
19
B
Interlock Mode diag status
7 - 4
B
Set Point Logic diag status
3 - 0
20
B
Heater Jacket Mode diag status
7 - 4
B
Load Gas Type diag status
3 - 0
21
B
Purge Gas Type diag status
7 - 4
B
Start/Stop/Interlock Mode diag status
3 - 0
22
B
Set Point Type diag status
7 - 4
B
Analog Out Type
3 - 0
23
B
Reserved
7 - 4
B
Reserved
3 - 0
INLET SCREEN INSTALLATION
The inlet screen mod. 969-9138 prevents the
blades of the pump from being damaged by debris
greater than 5.2 mm diameter.
The inlet screen, however, does reduce the pump-
ing speed by about 10%.
The inlet screen is fitted in the upper part of the
pump, as shown in the figure.
It is welded to the center ring of the ISO 250 F vi-
ton gasket.
The screen can be removed as shown in the fol-
lowing figure.
The following figure shows the ISO 250 F pump
flange section with the protection screen fitted on
it. As you can see, the overall dimensions do not
change as the inlet screen remains inside the
pump profile.
!
If the chamber of the system is "baked" at a high
temperature, a shield should be installed to pre-
vent thermal radiation heating the high vacuum
flange on the pump. The maximum temperature
allowed for the inlet flange is 80° C.
WATER COOLING CONNECTION
The pumping system is supplied with a metallic
model water cooling kit.
93
TECHNICAL INFORMATION
CAUTION
87-900-968-01(C)
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