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The recommended procedure to vent the system
and the pump avoiding the contact between the
pump bearings and the corrosive gas is described
in the following points:
1.
Close the corrosive gas flow into the system.
2.
Leaving the Turbo-V pump and the backing
pump running and the purge gas flowing, wait
for enough time to evacuate the corrosive
gas from the system.
3.
Turn off the Turbopump.
4.
Open the Turbo-V vent port slowly until to
reach atmospheric pressure in the system.
5.
Turn off the Turbopump.
6.
When the Turbo-V pump and the backing
pump are stopped and the system is at at-
mospheric pressure, for a better bearing pro-
tection it is advisable to leave the purge gas
flowing into the Turbo-V pump, with the
chamber or the Turbo-V vent valve opened,
to avoid system overpressures. If the vent
valve can't be kept opened, the backing
pump should be left operating.
1. Purge gas line
2. Pressure regulator
3. Gas purge valve
4. Gas purge port
5. Forevacuum pump
6. Turbopump
7. Vent valve
TYPICAL LAYOUT DIAGRAM
1.
Turbo-V controller
2.
Vent valve
3.
Vacuum pump shut-off valve (optional)
4.
System vent valve (optional)
5.
Vacuum chamber
6.
Ionisation gauge
7.
Fore-vacuum pump connecting flange
8.
Oil mist eliminator
9.
Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Flexible connection
Connection A - HIGH VACUUM FLANGE
To connect the Turbo pump to the ISO inlet
flange, remove the outer ring and position the cen-
tering ring as shown in the figure.
32
TECHNICAL INFORMATION
87-900-914-01(F)
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