Agilent Technologies TV 551 SEM Navigator Manual De Instrucciones página 211

17
Technical Information
Pump Description
The Macrotorr stages are in the form of four discs.
The turbine rotor is supported by permanently lubricated high
precision ceramic ball bearings installed on the forevacuum side of
the pump.
The static blades of the stator are made of stainless steel. These are
supported and accurately positioned by spacer rings.
The Macrotorr stators are in the form of self-positioning machined
discs with pumping channels and an opening restricted by the
corresponding rotor discs. These are made of aluminium alloy.
The pump can be water cooled or air cooled: in the first case the
customer can use the dedicated channels on the pump body, in the
second case an external optional fan is available.
A thermistor sensor is mounted near the upper bearing to prevent
the pump from overheating.
The pump is balanced after assembly with a residual vibration
amplitude less than 0.01 μm.
The pump can operate in any position and can be supported on the
high vacuum flange. The connection of the forevacuum on the side of
the pump is a KF 25 NW flange.
Figure 4
TV 551/701 SEM Navigator User Manual / 87-900-958-01(G) 211/276