Brooks Instrument SFP33 Manual De Instalación Y Funcionamiento página 39

Instruction and Operation Manual
X-PR-SFP-eng
Part Number: 541B070AAG
September, 2016
Greek
Brooks Instrument ,
,
Brooks Instrument.
:
.
.
:
.
: (1)
. (2)
:
.
Brooks Instrument
25 mm
25 mm
( / )
Brooks Instrument
«D»
.
:
:
.
:
1.
2.
3.
:
,
, , ,
,
'
,
/
.
.
,
,
,
,
0,5 bar (g)
(PED).
1
1
Brooks Instrument
( 2014/30/EU
,
,
.
.
CE.
.
.
.
,
ESD (
,
Section B Essential Instructions
!
.
.
.
.
.
.
Brooks Instrument.
,
25 mm
1.
,
CE
EMC).
:
CE.
100%
.
.
.
(ESD)
,
.
.
.
)
.
Brooks
.
.
,
/
Brooks Instrument.
.`
,
.
.
.
(PED)
1
PED.
2014/34/EU.
PED.
(SEP).
(EMC)
CE.
.
360 .
100%
,
(NMOS, SMOS .).
.
®
SFP
.
,
.
.
.
B-9