Brooks Instrument SFP33 Manual De Instalación Y Funcionamiento página 9

Section 1 Introduction
Installation and Operation Manual
X-PR-SFP-eng
Part Number: 541B070AAG
®
Brooks SFP
September, 2016
Ceramic Sensing Diaphragm
O-ring
Spring
The pressure sensing diaphragm is made
from a sintered alumina ceramic with a
NANO composite structure
PFA Pressure
Diaphragm
Process Fluid
Area
This results in a tough, strong bond to
the PFA diaphragm
Sensor
Holder
Injection Molded
PFA Process
Connection
Figure 1-1 Design of the Pressure Sensor Assembly with the Ceramic Diaphragm Bonded to the PFA Diaphragm
1-3