Section 1 Introduction; Introduction; Description - Brooks Instrument SFP33 Manual De Instalación Y Funcionamiento

Installation and Operation Manual
X-PR-SFP-eng
Part Number: 541B070AAG
September, 2016

1-1 Introduction

1-2 Description

Reading this manual is reccomended before attempting to install, operate
or troubleshoot a Brooks
This manual is organized into the following sections:
Section 1 Introduction
Section 2 Installation
Section 3 Maintenance
Section 4 Operation
Section 5 Parts List
Appendix A Repair and Warranty Request Sheet for SFP WA Only
Appendix B Essential Instructions
Back Cover Warranty, Local Sales/Service Contact Information
The Quality System at Brooks Instrument conforms to the quality
standards set forth in ISO 9001.
This instruction manual is intended to provide you with all the information
necessary to install, operate and maintain a Brooks Seal Free Pressure
Transmitter (SFP). The SFP pressure transmitter was designed to
measure the pressure of high purity chemicals and corrosive fluids found in
a wide variety of industries including semiconductor, optical, and flat panel
where metal free purity of the fluid is a key requirement for process
consistency and yield.
Brooks Seal Free Pressure Transmitters are primarily used to provide
accurate measurements of fluid pressure or pressure of gas exposed to a
corrosive fluid. The heart of this sensor is a single piece process
connection made from high purity PFA plastic that eliminates the need for
elastomeric seals to isolate the pressure-sensing device from the process
fluid. Eliminating elastomeric materials in contact with ultrapure fluids
reduces the potential of particle formation from these materials which can
contaminate the fluid.
The single piece PFA process connection is similar to the design of a drum
with rigid sidewalls and a relatively thin flexible diaphragm. Bonded to the
flexible PFA isolating film is a ceramic pressure sensor constructed with a
thin alumina diaphragm. The surface structure of the alumina allows for a
very strong bond with PFA. The internal volume of the pressure sensor is
either vented to atmosphere for a gauge sensing unit or a vacuum is
created inside the sensor for absolute pressure measurements.
(See Figure 1-1.)
Thus, the single piece process connection means SFP can be exposed to
vacuum pressures without damage to the sensor. Options are available for
measuring gauge pressure (referenced to local atmospheric pressure) and
absolute pressure (referenced to an internal vacuum in the sensor).
Brooks SFP is available in two variants. The WA version is designed for
use with ultrapure water and the CA version is designed for use with high
purity chemicals. A variety of fluid process connections and electrical
output signals result in flexible pressure measuring device that can be
easily integrated into a process piping and control systems.

Section 1 Introduction

®
Seal Free Pressure Transmitter.
®
Brooks SFP
1-1