Connection A - High Vacuum Flange; Connection Configurations; Connection B - Fore-Vacuum Pump; Connection C - Electrical - Varian E-series Manual De Instrucciones

Connection A - HIGH VACUUM FLANGE

To connect the Turbo pump to the ISO inlet flange,
remove the outer ring and position the centering
ring as shown in the figure.

Connection configurations

Connection B - FORE-VACUUM PUMP

A flange KF 40 NW is available to connect the Tur-
bopump to the fore-vacuum pump. A hose or vac-
uum approved pipe can be used. If a rigid pipe is
used, any vibration generated by the mechanical
pump must be eliminated through the use of bel-
lows.
NOTE
The Turbo pump is characterized by its high com-
pression ratio also for oil vapors. When using a
mechanical oil-sealed pump, it is advisable to in-
stall a suitable trap between the turbopump and the
fore-vacuum pump in order to prevent oil back-
streaming.
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TECHNICAL INFORMATION
Then fix the two flanges with the clamps or claws
as shown in the figure.

Connection C - ELECTRICAL

87-900-942-01(A)